JPWO2021187574A5 - - Google Patents
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- Publication number
- JPWO2021187574A5 JPWO2021187574A5 JP2021517064A JP2021517064A JPWO2021187574A5 JP WO2021187574 A5 JPWO2021187574 A5 JP WO2021187574A5 JP 2021517064 A JP2021517064 A JP 2021517064A JP 2021517064 A JP2021517064 A JP 2021517064A JP WO2021187574 A5 JPWO2021187574 A5 JP WO2021187574A5
- Authority
- JP
- Japan
- Prior art keywords
- producing
- light
- film
- transparent conductive
- conductive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims 6
- 239000007789 gas Substances 0.000 claims 5
- 238000004544 sputter deposition Methods 0.000 claims 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 229910052743 krypton Inorganic materials 0.000 claims 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims 2
- 229910052786 argon Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052756 noble gas Inorganic materials 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 229910052724 xenon Inorganic materials 0.000 claims 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (17)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020049864 | 2020-03-19 | ||
| JP2020049864 | 2020-03-19 | ||
| JP2020074854 | 2020-04-20 | ||
| JP2020074853 | 2020-04-20 | ||
| JP2020074853 | 2020-04-20 | ||
| JP2020074854 | 2020-04-20 | ||
| JP2020134832 | 2020-08-07 | ||
| JP2020134833 | 2020-08-07 | ||
| JP2020134833 | 2020-08-07 | ||
| JP2020134832 | 2020-08-07 | ||
| JP2020140238 | 2020-08-21 | ||
| JP2020140238 | 2020-08-21 | ||
| JP2020200421 | 2020-12-02 | ||
| JP2020200421 | 2020-12-02 | ||
| JP2020200422 | 2020-12-02 | ||
| JP2020200422 | 2020-12-02 | ||
| PCT/JP2021/011149 WO2021187574A1 (ja) | 2020-03-19 | 2021-03-18 | 透明導電性フィルムの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021187574A1 JPWO2021187574A1 (https=) | 2021-09-23 |
| JPWO2021187574A5 true JPWO2021187574A5 (https=) | 2023-03-29 |
| JP7451505B2 JP7451505B2 (ja) | 2024-03-18 |
Family
ID=77771038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021517064A Active JP7451505B2 (ja) | 2020-03-19 | 2021-03-18 | 透明導電性フィルムの製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP7451505B2 (https=) |
| KR (1) | KR20220155279A (https=) |
| CN (1) | CN115298756B (https=) |
| TW (1) | TW202145259A (https=) |
| WO (1) | WO2021187574A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20250129468A1 (en) * | 2023-10-18 | 2025-04-24 | Northrop Grumman Systems Corporation | Sputtering of high-quality superconducting thin films |
| CN120717705B (zh) * | 2025-09-04 | 2025-12-16 | 洛阳理工学院 | 一种高透ito导电玻璃及其制备方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05334924A (ja) * | 1992-05-29 | 1993-12-17 | Tonen Corp | 透明導電薄膜の製造法 |
| JPH0641723A (ja) * | 1992-07-27 | 1994-02-15 | Tonen Corp | 透明導電膜 |
| JPH07262829A (ja) * | 1994-03-25 | 1995-10-13 | Hitachi Ltd | 透明導電膜及びその形成方法 |
| JP2000038654A (ja) * | 1998-07-21 | 2000-02-08 | Nippon Sheet Glass Co Ltd | 透明導電膜付き基板の製造方法、透明導電膜付き基板およびそれを用いた液晶表示素子 |
| JP5543907B2 (ja) * | 2010-12-24 | 2014-07-09 | 日東電工株式会社 | 透明導電性フィルムおよびその製造方法 |
| JP6435597B2 (ja) * | 2013-09-13 | 2018-12-12 | 東ソー株式会社 | 透明導電性フィルム及びその製造方法 |
| JP6211557B2 (ja) * | 2014-04-30 | 2017-10-11 | 日東電工株式会社 | 透明導電性フィルム及びその製造方法 |
| CN105637111A (zh) * | 2014-05-20 | 2016-06-01 | 日东电工株式会社 | 透明导电性薄膜及其制造方法 |
| JP2019003900A (ja) | 2017-06-19 | 2019-01-10 | 学校法人 工学院大学 | 透明導電膜、透明導電膜つき透明基板、透明導電膜つき透明基板の製造方法、タッチパネル |
-
2021
- 2021-03-18 JP JP2021517064A patent/JP7451505B2/ja active Active
- 2021-03-18 CN CN202180021682.2A patent/CN115298756B/zh active Active
- 2021-03-18 KR KR1020227030801A patent/KR20220155279A/ko not_active Ceased
- 2021-03-18 WO PCT/JP2021/011149 patent/WO2021187574A1/ja not_active Ceased
- 2021-03-19 TW TW110110067A patent/TW202145259A/zh unknown
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