JPWO2021171697A5 - - Google Patents
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- Publication number
- JPWO2021171697A5 JPWO2021171697A5 JP2022503085A JP2022503085A JPWO2021171697A5 JP WO2021171697 A5 JPWO2021171697 A5 JP WO2021171697A5 JP 2022503085 A JP2022503085 A JP 2022503085A JP 2022503085 A JP2022503085 A JP 2022503085A JP WO2021171697 A5 JPWO2021171697 A5 JP WO2021171697A5
- Authority
- JP
- Japan
- Prior art keywords
- resin composition
- photosensitive resin
- strip sample
- composition according
- screening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011342 resin composition Substances 0.000 claims 15
- 238000000034 method Methods 0.000 claims 11
- 238000012216 screening Methods 0.000 claims 8
- 239000011347 resin Substances 0.000 claims 7
- 229920005989 resin Polymers 0.000 claims 7
- 238000009661 fatigue test Methods 0.000 claims 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 4
- 238000009864 tensile test Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 230000009477 glass transition Effects 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 238000001035 drying Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000011229 interlayer Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 claims 1
- 239000011241 protective layer Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023002247A JP7764867B2 (ja) | 2020-02-26 | 2023-01-11 | 感光性樹脂組成物 |
| JP2025086562A JP2025113409A (ja) | 2020-02-26 | 2025-05-23 | 感光性樹脂組成物 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020030486 | 2020-02-26 | ||
| JP2020030134 | 2020-02-26 | ||
| JP2020030134 | 2020-02-26 | ||
| JP2020030486 | 2020-02-26 | ||
| PCT/JP2020/040109 WO2021171697A1 (ja) | 2020-02-26 | 2020-10-26 | 感光性樹脂組成物、感光性樹脂組成物の選別方法、パターン硬化膜の製造方法、及び半導体装置の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023002247A Division JP7764867B2 (ja) | 2020-02-26 | 2023-01-11 | 感光性樹脂組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021171697A1 JPWO2021171697A1 (https=) | 2021-09-02 |
| JPWO2021171697A5 true JPWO2021171697A5 (https=) | 2022-11-11 |
| JP7212832B2 JP7212832B2 (ja) | 2023-01-26 |
Family
ID=77491359
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022503085A Active JP7212832B2 (ja) | 2020-02-26 | 2020-10-26 | 感光性樹脂組成物、感光性樹脂組成物の選別方法、パターン硬化膜の製造方法、及び半導体装置の製造方法 |
| JP2023002247A Active JP7764867B2 (ja) | 2020-02-26 | 2023-01-11 | 感光性樹脂組成物 |
| JP2025086562A Withdrawn JP2025113409A (ja) | 2020-02-26 | 2025-05-23 | 感光性樹脂組成物 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023002247A Active JP7764867B2 (ja) | 2020-02-26 | 2023-01-11 | 感光性樹脂組成物 |
| JP2025086562A Withdrawn JP2025113409A (ja) | 2020-02-26 | 2025-05-23 | 感光性樹脂組成物 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12405198B2 (https=) |
| JP (3) | JP7212832B2 (https=) |
| KR (1) | KR20220145837A (https=) |
| CN (1) | CN115151868B (https=) |
| TW (1) | TWI872143B (https=) |
| WO (1) | WO2021171697A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113671794A (zh) * | 2021-08-25 | 2021-11-19 | Oppo广东移动通信有限公司 | 正型光刻胶及制备方法、玻璃壳体的制备方法和电子设备 |
| WO2024190309A1 (ja) * | 2023-03-13 | 2024-09-19 | 東レ株式会社 | 感光性組成物、硬化物、表示装置、及び硬化物の製造方法 |
| CN117470793B (zh) * | 2023-12-25 | 2024-03-22 | 湖南信健科技有限公司 | 一种光敏性树脂组合物的高效综合检测方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4640037B2 (ja) | 2005-08-22 | 2011-03-02 | Ｊｓｒ株式会社 | ポジ型感光性絶縁樹脂組成物およびその硬化物 |
| JP2008076583A (ja) | 2006-09-20 | 2008-04-03 | Asahi Kasei Electronics Co Ltd | 硬化レリーフパターンの製造方法 |
| JP5067028B2 (ja) | 2007-06-12 | 2012-11-07 | 日立化成工業株式会社 | ポジ型感光性樹脂組成物、レジストパターンの製造方法及び電子デバイス |
| EP2372457B1 (en) * | 2008-12-26 | 2014-11-26 | Hitachi Chemical Company, Ltd. | Positive-type photosensitive resin composition, method for producing resist pattern, semiconductor device, and electronic device |
| JP5263603B2 (ja) * | 2009-01-09 | 2013-08-14 | 日立化成株式会社 | 感光性樹脂組成物、感光性フィルム、レジストパターンの形成方法及びそれを用いた永久レジスト。 |
| TWI481657B (zh) * | 2010-09-15 | 2015-04-21 | 旭化成電子材料股份有限公司 | A phenol resin composition and a hardened embossed pattern, and a method for manufacturing the semiconductor |
| US9633848B2 (en) * | 2012-10-31 | 2017-04-25 | Hitachi Chemical Company, Ltd. | Photosensitive resin composition, method for producing patterned cured film, semiconductor element and electronic device |
| JP6776772B2 (ja) | 2016-09-29 | 2020-10-28 | 東レ株式会社 | 感光性樹脂組成物 |
| JP2018095721A (ja) * | 2016-12-13 | 2018-06-21 | 東レ株式会社 | 樹脂組成物、樹脂シートおよび硬化膜 |
| JP7066978B2 (ja) | 2017-04-27 | 2022-05-16 | 住友ベークライト株式会社 | 感光性樹脂組成物 |
| KR102425708B1 (ko) * | 2017-05-10 | 2022-07-28 | 쇼와덴코머티리얼즈가부시끼가이샤 | 포지티브형 감광성 수지 조성물, 포지티브형 감광성 수지용 열가교제, 패턴 경화막 및 그의 제조 방법, 반도체 소자, 그리고 전자 디바이스 |
| JP2018203959A (ja) | 2017-06-09 | 2018-12-27 | 日鉄ケミカル＆マテリアル株式会社 | ポリイミド及び感光性樹脂組成物 |
-
2020
- 2020-10-26 JP JP2022503085A patent/JP7212832B2/ja active Active
- 2020-10-26 CN CN202080097092.3A patent/CN115151868B/zh active Active
- 2020-10-26 US US17/801,378 patent/US12405198B2/en active Active
- 2020-10-26 KR KR1020227029840A patent/KR20220145837A/ko active Pending
- 2020-10-26 WO PCT/JP2020/040109 patent/WO2021171697A1/ja not_active Ceased
- 2020-10-27 TW TW109137210A patent/TWI872143B/zh active
-
2023
- 2023-01-11 JP JP2023002247A patent/JP7764867B2/ja active Active
-
2025
- 2025-05-23 JP JP2025086562A patent/JP2025113409A/ja not_active Withdrawn
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