JPWO2021157714A5 - - Google Patents
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- Publication number
- JPWO2021157714A5 JPWO2021157714A5 JP2021576191A JP2021576191A JPWO2021157714A5 JP WO2021157714 A5 JPWO2021157714 A5 JP WO2021157714A5 JP 2021576191 A JP2021576191 A JP 2021576191A JP 2021576191 A JP2021576191 A JP 2021576191A JP WO2021157714 A5 JPWO2021157714 A5 JP WO2021157714A5
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- limited
- layer structure
- silicon oxide
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020019048 | 2020-02-06 | ||
| PCT/JP2021/004392 WO2021157714A1 (ja) | 2020-02-06 | 2021-02-05 | 弾性波装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2021157714A1 JPWO2021157714A1 (https=) | 2021-08-12 |
| JPWO2021157714A5 true JPWO2021157714A5 (https=) | 2022-09-21 |
Family
ID=77200017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021576191A Pending JPWO2021157714A1 (https=) | 2020-02-06 | 2021-02-05 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12191839B2 (https=) |
| JP (1) | JPWO2021157714A1 (https=) |
| CN (1) | CN115023896A (https=) |
| WO (1) | WO2021157714A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102670034B1 (ko) * | 2018-12-06 | 2024-05-29 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 장치 |
| CN114731147A (zh) * | 2019-12-09 | 2022-07-08 | 株式会社村田制作所 | 弹性波装置 |
| CN118316412B (zh) * | 2024-04-29 | 2025-08-12 | 晨宸辰科技有限公司 | 一种抑制saw器件杂散响应的结构 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3233290B2 (ja) | 1991-11-06 | 2001-11-26 | 株式会社村田製作所 | 表面波装置 |
| JPH07254835A (ja) * | 1994-03-15 | 1995-10-03 | Murata Mfg Co Ltd | 弾性表面波共振子フィルタ |
| JP3301399B2 (ja) | 1998-02-16 | 2002-07-15 | 株式会社村田製作所 | 弾性表面波装置 |
| JP3587354B2 (ja) | 1999-03-08 | 2004-11-10 | 株式会社村田製作所 | 横結合共振子型表面波フィルタ及び縦結合共振子型表面波フィルタ |
| CN103262410B (zh) | 2010-12-24 | 2016-08-10 | 株式会社村田制作所 | 弹性波装置及其制造方法 |
| KR102083803B1 (ko) * | 2014-06-23 | 2020-03-03 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 장치 |
| WO2015198709A1 (ja) * | 2014-06-27 | 2015-12-30 | 株式会社村田製作所 | ラダー型フィルタ |
| KR20190042107A (ko) | 2014-12-25 | 2019-04-23 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 장치 |
| JP2019092095A (ja) * | 2017-11-16 | 2019-06-13 | 株式会社村田製作所 | 弾性波装置、高周波フロントエンド回路及び通信装置 |
| JP2019145895A (ja) * | 2018-02-16 | 2019-08-29 | 株式会社村田製作所 | 弾性波装置、マルチプレクサ、高周波フロントエンド回路及び通信装置 |
| KR102670034B1 (ko) * | 2018-12-06 | 2024-05-29 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 장치 |
| JP6940012B2 (ja) * | 2018-12-25 | 2021-09-22 | 株式会社村田製作所 | フィルタ装置 |
-
2021
- 2021-02-05 CN CN202180011353.XA patent/CN115023896A/zh active Pending
- 2021-02-05 WO PCT/JP2021/004392 patent/WO2021157714A1/ja not_active Ceased
- 2021-02-05 JP JP2021576191A patent/JPWO2021157714A1/ja active Pending
-
2022
- 2022-07-28 US US17/875,496 patent/US12191839B2/en active Active
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