CN115023896A - 弹性波装置 - Google Patents

弹性波装置 Download PDF

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Publication number
CN115023896A
CN115023896A CN202180011353.XA CN202180011353A CN115023896A CN 115023896 A CN115023896 A CN 115023896A CN 202180011353 A CN202180011353 A CN 202180011353A CN 115023896 A CN115023896 A CN 115023896A
Authority
CN
China
Prior art keywords
elastic wave
wave device
support substrate
acoustic velocity
piezoelectric layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180011353.XA
Other languages
English (en)
Chinese (zh)
Inventor
岩本英树
大门克也
木村哲也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN115023896A publication Critical patent/CN115023896A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
CN202180011353.XA 2020-02-06 2021-02-05 弹性波装置 Pending CN115023896A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020019048 2020-02-06
JP2020-019048 2020-02-06
PCT/JP2021/004392 WO2021157714A1 (ja) 2020-02-06 2021-02-05 弾性波装置

Publications (1)

Publication Number Publication Date
CN115023896A true CN115023896A (zh) 2022-09-06

Family

ID=77200017

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180011353.XA Pending CN115023896A (zh) 2020-02-06 2021-02-05 弹性波装置

Country Status (4)

Country Link
US (1) US12191839B2 (https=)
JP (1) JPWO2021157714A1 (https=)
CN (1) CN115023896A (https=)
WO (1) WO2021157714A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118316412A (zh) * 2024-04-29 2024-07-09 晨宸辰科技有限公司 一种抑制saw器件杂散响应的结构

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102670034B1 (ko) * 2018-12-06 2024-05-29 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
CN114731147A (zh) * 2019-12-09 2022-07-08 株式会社村田制作所 弹性波装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170093372A1 (en) * 2014-06-27 2017-03-30 Murata Manufacturing Co., Ltd. Ladder filter
US20170093367A1 (en) * 2014-06-23 2017-03-30 Murata Manufacturing Co., Ltd. Elastic wave device
US20190149128A1 (en) * 2017-11-16 2019-05-16 Murata Manufacturing Co., Ltd. Elastic wave device, high-frequency front-end circuit, and communication apparatus
CN110166017A (zh) * 2018-02-16 2019-08-23 株式会社村田制作所 弹性波装置、多工器、高频前端电路以及通信装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3233290B2 (ja) 1991-11-06 2001-11-26 株式会社村田製作所 表面波装置
JPH07254835A (ja) * 1994-03-15 1995-10-03 Murata Mfg Co Ltd 弾性表面波共振子フィルタ
JP3301399B2 (ja) 1998-02-16 2002-07-15 株式会社村田製作所 弾性表面波装置
JP3587354B2 (ja) 1999-03-08 2004-11-10 株式会社村田製作所 横結合共振子型表面波フィルタ及び縦結合共振子型表面波フィルタ
CN103262410B (zh) 2010-12-24 2016-08-10 株式会社村田制作所 弹性波装置及其制造方法
KR20190042107A (ko) 2014-12-25 2019-04-23 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
KR102670034B1 (ko) * 2018-12-06 2024-05-29 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
JP6940012B2 (ja) * 2018-12-25 2021-09-22 株式会社村田製作所 フィルタ装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170093367A1 (en) * 2014-06-23 2017-03-30 Murata Manufacturing Co., Ltd. Elastic wave device
US20170093372A1 (en) * 2014-06-27 2017-03-30 Murata Manufacturing Co., Ltd. Ladder filter
US20190149128A1 (en) * 2017-11-16 2019-05-16 Murata Manufacturing Co., Ltd. Elastic wave device, high-frequency front-end circuit, and communication apparatus
CN110166017A (zh) * 2018-02-16 2019-08-23 株式会社村田制作所 弹性波装置、多工器、高频前端电路以及通信装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118316412A (zh) * 2024-04-29 2024-07-09 晨宸辰科技有限公司 一种抑制saw器件杂散响应的结构

Also Published As

Publication number Publication date
JPWO2021157714A1 (https=) 2021-08-12
US12191839B2 (en) 2025-01-07
US20220368305A1 (en) 2022-11-17
WO2021157714A1 (ja) 2021-08-12

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