JPWO2021111243A5 - - Google Patents

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Publication number
JPWO2021111243A5
JPWO2021111243A5 JP2021562199A JP2021562199A JPWO2021111243A5 JP WO2021111243 A5 JPWO2021111243 A5 JP WO2021111243A5 JP 2021562199 A JP2021562199 A JP 2021562199A JP 2021562199 A JP2021562199 A JP 2021562199A JP WO2021111243 A5 JPWO2021111243 A5 JP WO2021111243A5
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JP
Japan
Prior art keywords
insulator
semiconductor
conductor
adjacent
intersection
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JP2021562199A
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English (en)
Japanese (ja)
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JP7714471B2 (ja
JPWO2021111243A1 (https=
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Priority claimed from PCT/IB2020/061059 external-priority patent/WO2021111243A1/ja
Publication of JPWO2021111243A1 publication Critical patent/JPWO2021111243A1/ja
Publication of JPWO2021111243A5 publication Critical patent/JPWO2021111243A5/ja
Priority to JP2025119962A priority Critical patent/JP2025157403A/ja
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Publication of JP7714471B2 publication Critical patent/JP7714471B2/ja
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JP2021562199A 2019-12-06 2020-11-24 半導体装置および電子機器 Active JP7714471B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025119962A JP2025157403A (ja) 2019-12-06 2025-07-16 半導体装置

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2019220945 2019-12-06
JP2019220945 2019-12-06
JP2020069023 2020-04-07
JP2020069023 2020-04-07
PCT/IB2020/061059 WO2021111243A1 (ja) 2019-12-06 2020-11-24 半導体装置および電子機器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025119962A Division JP2025157403A (ja) 2019-12-06 2025-07-16 半導体装置

Publications (3)

Publication Number Publication Date
JPWO2021111243A1 JPWO2021111243A1 (https=) 2021-06-10
JPWO2021111243A5 true JPWO2021111243A5 (https=) 2023-11-27
JP7714471B2 JP7714471B2 (ja) 2025-07-29

Family

ID=76221085

Family Applications (2)

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JP2021562199A Active JP7714471B2 (ja) 2019-12-06 2020-11-24 半導体装置および電子機器
JP2025119962A Pending JP2025157403A (ja) 2019-12-06 2025-07-16 半導体装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025119962A Pending JP2025157403A (ja) 2019-12-06 2025-07-16 半導体装置

Country Status (5)

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US (1) US12207462B2 (https=)
JP (2) JP7714471B2 (https=)
KR (1) KR20220110201A (https=)
CN (1) CN114787998A (https=)
WO (1) WO2021111243A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12444466B2 (en) * 2020-01-16 2025-10-14 Semiconductor Energy Laboratory Co., Ltd. Memory device and method for manufacturing the same
CN116368602A (zh) 2020-10-02 2023-06-30 株式会社半导体能源研究所 半导体装置
KR102910882B1 (ko) * 2021-06-21 2026-01-14 삼성전자주식회사 반도체 장치 및 이를 포함하는 데이터 저장 시스템
US20230354578A1 (en) * 2022-04-28 2023-11-02 Yangtze Memory Technologies Co., Ltd. Dynamic flash memory (dfm) with channel first scheme

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6756631B2 (en) * 2002-11-14 2004-06-29 Intelligent Sources Development Corp. Stacked-gate cell structure and its NAND-type flash memory array
KR100880338B1 (ko) * 2006-12-04 2009-01-28 주식회사 하이닉스반도체 플래시 메모리 소자의 제조방법
US9076824B2 (en) * 2012-11-02 2015-07-07 Micron Technology, Inc. Memory arrays with a memory cell adjacent to a smaller size of a pillar having a greater channel length than a memory cell adjacent to a larger size of the pillar and methods
KR20160094186A (ko) * 2015-01-30 2016-08-09 에스케이하이닉스 주식회사 반도체 장치 및 이의 제조방법
JP2016225614A (ja) 2015-05-26 2016-12-28 株式会社半導体エネルギー研究所 半導体装置
JP6956525B2 (ja) 2017-06-08 2021-11-02 株式会社半導体エネルギー研究所 半導体装置、記憶装置、及び電子機器
JP6693907B2 (ja) 2017-06-08 2020-05-13 株式会社半導体エネルギー研究所 半導体装置、記憶装置、及び電子機器
JP7137913B2 (ja) 2017-06-23 2022-09-15 株式会社半導体エネルギー研究所 半導体装置
JP7195068B2 (ja) 2017-06-26 2022-12-23 株式会社半導体エネルギー研究所 半導体装置、電子機器
DE112018003262T5 (de) 2017-06-27 2020-03-12 Semiconductor Energy Laboratory Co., Ltd. Halbleitervorrichtung, Halbleiterwafer, Speichervorrichtung und elektronisches Gerät
US10665604B2 (en) 2017-07-21 2020-05-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, semiconductor wafer, memory device, and electronic device
TWI882001B (zh) * 2019-10-31 2025-05-01 日商半導體能源研究所股份有限公司 半導體裝置及電子裝置

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