JPWO2021106460A5 - - Google Patents
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- Publication number
- JPWO2021106460A5 JPWO2021106460A5 JP2021561230A JP2021561230A JPWO2021106460A5 JP WO2021106460 A5 JPWO2021106460 A5 JP WO2021106460A5 JP 2021561230 A JP2021561230 A JP 2021561230A JP 2021561230 A JP2021561230 A JP 2021561230A JP WO2021106460 A5 JPWO2021106460 A5 JP WO2021106460A5
- Authority
- JP
- Japan
- Prior art keywords
- mass
- alkylammonium fluoride
- content
- quaternary alkylammonium
- cleaning composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000005210 alkyl ammonium group Chemical group 0.000 description 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 5
- 238000000354 decomposition reaction Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002998 adhesive polymer Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- SGWCNDDOFLBOQV-UHFFFAOYSA-N oxidanium;fluoride Chemical compound O.F SGWCNDDOFLBOQV-UHFFFAOYSA-N 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019212251 | 2019-11-25 | ||
| JP2019212251 | 2019-11-25 | ||
| PCT/JP2020/039997 WO2021106460A1 (ja) | 2019-11-25 | 2020-10-23 | 分解洗浄組成物の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021106460A1 JPWO2021106460A1 (https=) | 2021-06-03 |
| JPWO2021106460A5 true JPWO2021106460A5 (https=) | 2022-07-21 |
| JP7619277B2 JP7619277B2 (ja) | 2025-01-22 |
Family
ID=76129504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021561230A Active JP7619277B2 (ja) | 2019-11-25 | 2020-10-23 | 分解洗浄組成物の製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12545862B2 (https=) |
| JP (1) | JP7619277B2 (https=) |
| KR (1) | KR102772597B1 (https=) |
| CN (1) | CN114746536B (https=) |
| TW (1) | TWI776264B (https=) |
| WO (1) | WO2021106460A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115315788B (zh) * | 2020-03-23 | 2026-03-20 | 日产化学株式会社 | 半导体基板的清洗方法、经加工的半导体基板的制造方法以及剥离用组合物 |
| CN116507683B (zh) * | 2021-09-16 | 2025-03-28 | 日产化学株式会社 | 半导体基板的清洗方法、经加工的半导体基板的制造方法以及剥离和溶解用组合物 |
| KR20240036038A (ko) * | 2021-12-24 | 2024-03-19 | 가부시끼가이샤 레조낙 | 분해 세정 조성물 및 그 제조 방법 |
| JPWO2024058018A1 (https=) * | 2022-09-13 | 2024-03-21 | ||
| EP4571819A4 (en) * | 2022-09-13 | 2025-12-31 | Nissan Chemical Corp | METHOD FOR CLEANING A SEMICONDUCTIVE SUBSTRATE, METHOD FOR PRODUCING A TREATMENTED SEMICONDUCTIVE SUBSTRATE, AND PEEL AND DISSOLUTION COMPOSITION |
| JPWO2024176810A1 (https=) * | 2023-02-20 | 2024-08-29 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL95122C (https=) * | 1954-11-22 | |||
| US3673099A (en) | 1970-10-19 | 1972-06-27 | Bell Telephone Labor Inc | Process and composition for stripping cured resins from substrates |
| US4428871A (en) | 1981-09-23 | 1984-01-31 | J. T. Baker Chemical Company | Stripping compositions and methods of stripping resists |
| US4744834A (en) | 1986-04-30 | 1988-05-17 | Noor Haq | Photoresist stripper comprising a pyrrolidinone, a diethylene glycol ether, a polyglycol and a quaternary ammonium hydroxide |
| US20040084060A1 (en) * | 1999-05-28 | 2004-05-06 | Peter Zhu | Method and kit for removing aldehyde-based stains |
| US6576734B1 (en) * | 1999-12-16 | 2003-06-10 | Chisso Corporation | Modified polyorganosiloxane and method for producing it |
| US6475292B1 (en) * | 2000-07-31 | 2002-11-05 | Shipley Company, L.L.C. | Photoresist stripping method |
| WO2004094581A1 (en) | 2003-04-18 | 2004-11-04 | Ekc Technology, Inc. | Aqueous fluoride compositions for cleaning semiconductor devices |
| US8030263B2 (en) * | 2004-07-01 | 2011-10-04 | Air Products And Chemicals, Inc. | Composition for stripping and cleaning and use thereof |
| US7632796B2 (en) * | 2005-10-28 | 2009-12-15 | Dynaloy, Llc | Dynamic multi-purpose composition for the removal of photoresists and method for its use |
| JP5513994B2 (ja) * | 2010-06-01 | 2014-06-04 | 出光興産株式会社 | 洗浄剤組成物及びそれを用いたエアゾール組成物 |
| EP2497844A1 (en) * | 2011-03-10 | 2012-09-12 | Kao Corporation, S.A. | Quaternary ammonium esters (Esterquats) containing composition for inhibiting corrosion of metal surface |
| JP6165665B2 (ja) | 2013-05-30 | 2017-07-19 | 信越化学工業株式会社 | 基板の洗浄方法 |
| CN107034028B (zh) * | 2015-12-04 | 2021-05-25 | 三星电子株式会社 | 用于除去有机硅树脂的组合物、使用其薄化基材和制造半导体封装体的方法及使用其的系统 |
| KR102067444B1 (ko) | 2015-12-11 | 2020-01-17 | 후지필름 가부시키가이샤 | 반도체 디바이스용 처리액의 보관 방법, 처리액 수용체 |
| KR102295991B1 (ko) | 2017-08-31 | 2021-09-01 | 후지필름 가부시키가이샤 | 처리액, 키트, 기판의 세정 방법 |
| US11787908B2 (en) * | 2018-12-21 | 2023-10-17 | Dow Silicones Corporation | Methods for making polyfunctional organosiloxanes and compositions containing same |
| JP7219423B2 (ja) * | 2019-02-15 | 2023-02-08 | 日産化学株式会社 | 洗浄剤組成物及び洗浄方法 |
| WO2020179819A1 (ja) * | 2019-03-05 | 2020-09-10 | 日産化学株式会社 | 洗浄剤組成物及び洗浄方法 |
| US11732214B2 (en) * | 2019-11-20 | 2023-08-22 | Nissan Chemical Corporation | Cleaning agent composition comprising an alkylamide solvent and a fluorine-containing quaternary ammonium salt |
-
2020
- 2020-10-23 KR KR1020227007935A patent/KR102772597B1/ko active Active
- 2020-10-23 CN CN202080081816.5A patent/CN114746536B/zh active Active
- 2020-10-23 WO PCT/JP2020/039997 patent/WO2021106460A1/ja not_active Ceased
- 2020-10-23 JP JP2021561230A patent/JP7619277B2/ja active Active
- 2020-10-23 US US17/774,025 patent/US12545862B2/en active Active
- 2020-11-03 TW TW109138151A patent/TWI776264B/zh active
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