JP7619277B2 - 分解洗浄組成物の製造方法 - Google Patents

分解洗浄組成物の製造方法 Download PDF

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Publication number
JP7619277B2
JP7619277B2 JP2021561230A JP2021561230A JP7619277B2 JP 7619277 B2 JP7619277 B2 JP 7619277B2 JP 2021561230 A JP2021561230 A JP 2021561230A JP 2021561230 A JP2021561230 A JP 2021561230A JP 7619277 B2 JP7619277 B2 JP 7619277B2
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Japan
Prior art keywords
cleaning composition
decomposition
producing
group
formula
Prior art date
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JP2021561230A
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English (en)
Japanese (ja)
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JPWO2021106460A1 (https=
JPWO2021106460A5 (https=
Inventor
晋 中崎
邦明 宮原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
Resonac Corp
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Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd, Showa Denko Materials Co Ltd, Resonac Corp filed Critical Hitachi Chemical Co Ltd
Publication of JPWO2021106460A1 publication Critical patent/JPWO2021106460A1/ja
Publication of JPWO2021106460A5 publication Critical patent/JPWO2021106460A5/ja
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/26—Organic compounds containing nitrogen
    • C11D3/32—Amides; Substituted amides
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/66—Non-ionic compounds
    • C11D1/72—Ethers of polyoxyalkylene glycols
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/26—Organic compounds containing nitrogen
    • C11D3/30—Amines; Substituted amines ; Quaternized amines
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/263—Ethers
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/28—Organic compounds containing halogen
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3209—Amines or imines with one to four nitrogen atoms; Quaternized amines
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3263—Amides or imides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/20—Cleaning during device manufacture
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/18—Glass; Plastics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Emergency Medicine (AREA)
  • Detergent Compositions (AREA)
JP2021561230A 2019-11-25 2020-10-23 分解洗浄組成物の製造方法 Active JP7619277B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019212251 2019-11-25
JP2019212251 2019-11-25
PCT/JP2020/039997 WO2021106460A1 (ja) 2019-11-25 2020-10-23 分解洗浄組成物の製造方法

Publications (3)

Publication Number Publication Date
JPWO2021106460A1 JPWO2021106460A1 (https=) 2021-06-03
JPWO2021106460A5 JPWO2021106460A5 (https=) 2022-07-21
JP7619277B2 true JP7619277B2 (ja) 2025-01-22

Family

ID=76129504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021561230A Active JP7619277B2 (ja) 2019-11-25 2020-10-23 分解洗浄組成物の製造方法

Country Status (6)

Country Link
US (1) US12545862B2 (https=)
JP (1) JP7619277B2 (https=)
KR (1) KR102772597B1 (https=)
CN (1) CN114746536B (https=)
TW (1) TWI776264B (https=)
WO (1) WO2021106460A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115315788B (zh) * 2020-03-23 2026-03-20 日产化学株式会社 半导体基板的清洗方法、经加工的半导体基板的制造方法以及剥离用组合物
CN116507683B (zh) * 2021-09-16 2025-03-28 日产化学株式会社 半导体基板的清洗方法、经加工的半导体基板的制造方法以及剥离和溶解用组合物
KR20240036038A (ko) * 2021-12-24 2024-03-19 가부시끼가이샤 레조낙 분해 세정 조성물 및 그 제조 방법
JPWO2024058018A1 (https=) * 2022-09-13 2024-03-21
EP4571819A4 (en) * 2022-09-13 2025-12-31 Nissan Chemical Corp METHOD FOR CLEANING A SEMICONDUCTIVE SUBSTRATE, METHOD FOR PRODUCING A TREATMENTED SEMICONDUCTIVE SUBSTRATE, AND PEEL AND DISSOLUTION COMPOSITION
JPWO2024176810A1 (https=) * 2023-02-20 2024-08-29

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170158888A1 (en) 2015-12-04 2017-06-08 Dongwoo Fine-Chem Co., Ltd. Composition for removing silicone resins and method of thinning substrate by using the same
WO2017099121A1 (ja) 2015-12-11 2017-06-15 富士フイルム株式会社 半導体デバイス用処理液の保管方法、処理液収容体
WO2020166702A1 (ja) 2019-02-15 2020-08-20 日産化学株式会社 洗浄剤組成物及び洗浄方法
WO2021100651A1 (ja) 2019-11-20 2021-05-27 日産化学株式会社 洗浄剤組成物及び洗浄方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL95122C (https=) * 1954-11-22
US3673099A (en) 1970-10-19 1972-06-27 Bell Telephone Labor Inc Process and composition for stripping cured resins from substrates
US4428871A (en) 1981-09-23 1984-01-31 J. T. Baker Chemical Company Stripping compositions and methods of stripping resists
US4744834A (en) 1986-04-30 1988-05-17 Noor Haq Photoresist stripper comprising a pyrrolidinone, a diethylene glycol ether, a polyglycol and a quaternary ammonium hydroxide
US20040084060A1 (en) * 1999-05-28 2004-05-06 Peter Zhu Method and kit for removing aldehyde-based stains
US6576734B1 (en) * 1999-12-16 2003-06-10 Chisso Corporation Modified polyorganosiloxane and method for producing it
US6475292B1 (en) * 2000-07-31 2002-11-05 Shipley Company, L.L.C. Photoresist stripping method
WO2004094581A1 (en) 2003-04-18 2004-11-04 Ekc Technology, Inc. Aqueous fluoride compositions for cleaning semiconductor devices
US8030263B2 (en) * 2004-07-01 2011-10-04 Air Products And Chemicals, Inc. Composition for stripping and cleaning and use thereof
US7632796B2 (en) * 2005-10-28 2009-12-15 Dynaloy, Llc Dynamic multi-purpose composition for the removal of photoresists and method for its use
JP5513994B2 (ja) * 2010-06-01 2014-06-04 出光興産株式会社 洗浄剤組成物及びそれを用いたエアゾール組成物
EP2497844A1 (en) * 2011-03-10 2012-09-12 Kao Corporation, S.A. Quaternary ammonium esters (Esterquats) containing composition for inhibiting corrosion of metal surface
JP6165665B2 (ja) 2013-05-30 2017-07-19 信越化学工業株式会社 基板の洗浄方法
KR102295991B1 (ko) 2017-08-31 2021-09-01 후지필름 가부시키가이샤 처리액, 키트, 기판의 세정 방법
US11787908B2 (en) * 2018-12-21 2023-10-17 Dow Silicones Corporation Methods for making polyfunctional organosiloxanes and compositions containing same
WO2020179819A1 (ja) * 2019-03-05 2020-09-10 日産化学株式会社 洗浄剤組成物及び洗浄方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170158888A1 (en) 2015-12-04 2017-06-08 Dongwoo Fine-Chem Co., Ltd. Composition for removing silicone resins and method of thinning substrate by using the same
WO2017099121A1 (ja) 2015-12-11 2017-06-15 富士フイルム株式会社 半導体デバイス用処理液の保管方法、処理液収容体
WO2020166702A1 (ja) 2019-02-15 2020-08-20 日産化学株式会社 洗浄剤組成物及び洗浄方法
WO2021100651A1 (ja) 2019-11-20 2021-05-27 日産化学株式会社 洗浄剤組成物及び洗浄方法

Also Published As

Publication number Publication date
US20220380704A1 (en) 2022-12-01
TWI776264B (zh) 2022-09-01
KR102772597B1 (ko) 2025-02-26
WO2021106460A1 (ja) 2021-06-03
US12545862B2 (en) 2026-02-10
JPWO2021106460A1 (https=) 2021-06-03
CN114746536A (zh) 2022-07-12
CN114746536B (zh) 2024-01-09
KR20220047592A (ko) 2022-04-18
TW202124698A (zh) 2021-07-01

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