JPWO2020255577A1 - - Google Patents

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Publication number
JPWO2020255577A1
JPWO2020255577A1 JP2021527439A JP2021527439A JPWO2020255577A1 JP WO2020255577 A1 JPWO2020255577 A1 JP WO2020255577A1 JP 2021527439 A JP2021527439 A JP 2021527439A JP 2021527439 A JP2021527439 A JP 2021527439A JP WO2020255577 A1 JPWO2020255577 A1 JP WO2020255577A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021527439A
Other versions
JPWO2020255577A5 (ja
JP7435605B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2020255577A1 publication Critical patent/JPWO2020255577A1/ja
Publication of JPWO2020255577A5 publication Critical patent/JPWO2020255577A5/ja
Application granted granted Critical
Publication of JP7435605B2 publication Critical patent/JP7435605B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733Overhead conveying
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • B65G1/0457Storage devices mechanical with suspended load carriers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67276Production flow monitoring, e.g. for increasing throughput
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67294Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736Loading to or unloading from a conveyor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0297Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Warehouses Or Storage Devices (AREA)
JP2021527439A 2019-06-20 2020-05-08 搬送車 Active JP7435605B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019114535 2019-06-20
JP2019114535 2019-06-20
PCT/JP2020/018612 WO2020255577A1 (ja) 2019-06-20 2020-05-08 搬送車

Publications (3)

Publication Number Publication Date
JPWO2020255577A1 true JPWO2020255577A1 (ja) 2020-12-24
JPWO2020255577A5 JPWO2020255577A5 (ja) 2022-03-10
JP7435605B2 JP7435605B2 (ja) 2024-02-21

Family

ID=74037229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021527439A Active JP7435605B2 (ja) 2019-06-20 2020-05-08 搬送車

Country Status (8)

Country Link
US (1) US20220359251A1 (ja)
EP (1) EP3988474A4 (ja)
JP (1) JP7435605B2 (ja)
KR (1) KR20220008331A (ja)
CN (1) CN114126988B (ja)
IL (1) IL289059A (ja)
TW (1) TWI830922B (ja)
WO (1) WO2020255577A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023140607A1 (ko) 2022-01-20 2023-07-27 주식회사 엘지에너지솔루션 리튬 이차전지의 양극 제조용 바인더 조성물, 및 이에 의해 제조된 리튬 이차전지의 양극

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2715130B2 (ja) * 1989-01-12 1998-02-18 株式会社ダイフク 荷搬送設備
JP2005001804A (ja) * 2003-06-11 2005-01-06 Hitachi Ltd 自動クレーンシステム及びクレーン制御方法
JP2018118809A (ja) * 2017-01-23 2018-08-02 株式会社ダイフク 物品搬送車

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041234B2 (ja) * 1976-08-20 1985-09-14 株式会社 山口機械研究所 水流利用の発電装置
JPS58152235A (ja) * 1982-03-08 1983-09-09 Fuji Photo Film Co Ltd ハロゲン化銀写真感光材料
JPS6013801A (ja) 1983-07-01 1985-01-24 Seiko Instr & Electronics Ltd 高分子物質精製濃縮装置
JPH09289708A (ja) * 1996-04-19 1997-11-04 Toyota Autom Loom Works Ltd 移動体運行システムの通信方法
JPH09295707A (ja) * 1996-05-07 1997-11-18 Shinko Electric Co Ltd 搬送ロボットを用いたクリーンルームの物品搬送管理方法
JP2002068481A (ja) * 2000-08-28 2002-03-08 Ishikawajima Harima Heavy Ind Co Ltd コンテナの段積貯蔵装置
JP4651835B2 (ja) * 2001-03-08 2011-03-16 株式会社シンク・ラボラトリー ロール立体倉庫における被製版ロールの収納・取り出し方法
JP2003150247A (ja) * 2001-11-19 2003-05-23 Murata Mach Ltd 有軌道台車システム
JP2004010204A (ja) * 2002-06-04 2004-01-15 Matsushita Electric Ind Co Ltd マーカシステム
JP4131706B2 (ja) * 2004-02-12 2008-08-13 日本輸送機株式会社 無人搬送車の走行停止制御装置
CN101183431A (zh) * 2006-06-09 2008-05-21 日本电气株式会社 无线通信系统和无线通信方法
JP5266683B2 (ja) * 2007-08-03 2013-08-21 村田機械株式会社 搬送システム、及び該搬送システムにおける教示方法
JP5450334B2 (ja) * 2010-09-28 2014-03-26 株式会社椿本チエイン 物品管理システム
DE202013008718U1 (de) * 2013-09-30 2013-12-19 Grenzebach Maschinenbau Gmbh Transportfahrzeug zum störungsfreien Transport von Lastregalen in Werkshallen mit Funkabschattungen und mit teilweise autonomem Fahrbetrieb
DE102013019368A1 (de) * 2013-11-18 2015-05-21 Grenzebach Maschinenbau Gmbh Verfahren und Vorrichtung zur weitgehend maschinellen Zusammenstellung von Warenlieferungen in Lagerhallen
JP6365136B2 (ja) * 2014-09-02 2018-08-01 村田機械株式会社 走行車システム
JP6168476B2 (ja) 2015-03-19 2017-07-26 村田機械株式会社 搬送台車と搬送台車システム
JP2017154840A (ja) * 2016-02-29 2017-09-07 株式会社ダイフク 物品搬送設備
JP6520797B2 (ja) * 2016-04-11 2019-05-29 株式会社ダイフク 物品搬送設備
JP7066160B2 (ja) * 2017-08-23 2022-05-13 学校法人千葉工業大学 自走型鉄筋作業用ロボット、自走型鉄筋結束ロボット
JP6946965B2 (ja) 2017-11-22 2021-10-13 村田機械株式会社 搬送システム
DE102017222883A1 (de) 2017-12-15 2019-06-19 Te Connectivity Germany Gmbh Kontaktierungseinheit zum elektrischen Kontaktieren zumindest eines Elektroniksegments eines Elektronikmoduls und Verfahren

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2715130B2 (ja) * 1989-01-12 1998-02-18 株式会社ダイフク 荷搬送設備
JP2005001804A (ja) * 2003-06-11 2005-01-06 Hitachi Ltd 自動クレーンシステム及びクレーン制御方法
JP2018118809A (ja) * 2017-01-23 2018-08-02 株式会社ダイフク 物品搬送車

Also Published As

Publication number Publication date
US20220359251A1 (en) 2022-11-10
CN114126988A (zh) 2022-03-01
EP3988474A4 (en) 2023-06-21
IL289059A (en) 2022-02-01
TWI830922B (zh) 2024-02-01
TW202105111A (zh) 2021-02-01
EP3988474A1 (en) 2022-04-27
WO2020255577A1 (ja) 2020-12-24
CN114126988B (zh) 2023-11-10
JP7435605B2 (ja) 2024-02-21
KR20220008331A (ko) 2022-01-20

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