JPWO2020131839A5 - - Google Patents
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- JPWO2020131839A5 JPWO2020131839A5 JP2021533444A JP2021533444A JPWO2020131839A5 JP WO2020131839 A5 JPWO2020131839 A5 JP WO2020131839A5 JP 2021533444 A JP2021533444 A JP 2021533444A JP 2021533444 A JP2021533444 A JP 2021533444A JP WO2020131839 A5 JPWO2020131839 A5 JP WO2020131839A5
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- Prior art keywords
- angled
- ion source
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- platen
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- Prior art date
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- 150000002500 ions Chemical class 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 18
- 238000010884 ion-beam technique Methods 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 5
- 238000009826 distribution Methods 0.000 claims 1
- 239000000463 material Substances 0.000 description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862780805P | 2018-12-17 | 2018-12-17 | |
| US201862780792P | 2018-12-17 | 2018-12-17 | |
| US62/780,805 | 2018-12-17 | ||
| US62/780,792 | 2018-12-17 | ||
| PCT/US2019/066789 WO2020131839A1 (en) | 2018-12-17 | 2019-12-17 | Method of optical device fabrication using an ion beam source |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2022515348A JP2022515348A (ja) | 2022-02-18 |
| JPWO2020131839A5 true JPWO2020131839A5 (https=) | 2022-12-23 |
| JP2022515348A5 JP2022515348A5 (https=) | 2022-12-23 |
| JP7555340B2 JP7555340B2 (ja) | 2024-09-24 |
Family
ID=71071206
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021533791A Active JP7410951B2 (ja) | 2018-12-17 | 2019-12-17 | 電子ビーム装置を使用した光学装置の製造方法 |
| JP2021533442A Active JP7447118B2 (ja) | 2018-12-17 | 2019-12-17 | 光学装置製造のためのイオンビーム源 |
| JP2021533444A Active JP7555340B2 (ja) | 2018-12-17 | 2019-12-17 | イオンビーム源を使用した光学装置の製造方法 |
| JP2021533786A Active JP7447119B2 (ja) | 2018-12-17 | 2019-12-17 | 光学装置製造のための電子ビーム装置 |
Family Applications Before (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021533791A Active JP7410951B2 (ja) | 2018-12-17 | 2019-12-17 | 電子ビーム装置を使用した光学装置の製造方法 |
| JP2021533442A Active JP7447118B2 (ja) | 2018-12-17 | 2019-12-17 | 光学装置製造のためのイオンビーム源 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021533786A Active JP7447119B2 (ja) | 2018-12-17 | 2019-12-17 | 光学装置製造のための電子ビーム装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (5) | US11462386B2 (https=) |
| EP (4) | EP3899614A4 (https=) |
| JP (4) | JP7410951B2 (https=) |
| KR (4) | KR102841149B1 (https=) |
| CN (4) | CN113227859B (https=) |
| TW (5) | TWI730548B (https=) |
| WO (4) | WO2020131843A1 (https=) |
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| KR102650642B1 (ko) * | 2018-06-28 | 2024-03-21 | 어플라이드 머티어리얼스, 인코포레이티드 | 회절 격자들의 제조 |
| KR102628931B1 (ko) * | 2018-11-07 | 2024-01-23 | 어플라이드 머티어리얼스, 인코포레이티드 | 경사 격자들의 형성 |
| US10991547B2 (en) * | 2019-09-25 | 2021-04-27 | Applied Materials, Inc. | Method and device for a carrier proximity mask |
| WO2022108986A1 (en) | 2020-11-17 | 2022-05-27 | Applied Materials, Inc. | An optical device having structural and refractive index gradation, and method of fabricating the same |
| US12027426B2 (en) | 2021-01-29 | 2024-07-02 | Applied Materials, Inc. | Image-based digital control of plasma processing |
| KR20240073158A (ko) * | 2021-10-15 | 2024-05-24 | 어플라이드 머티어리얼스, 인코포레이티드 | 고성능 도파관 인커플러로서의 부분적으로 금속화된 격자 |
| WO2023122426A1 (en) * | 2021-12-22 | 2023-06-29 | Applied Materials, Inc. | Method for forming multi-depth optical devices |
| EP4578037A2 (en) * | 2022-08-26 | 2025-07-02 | Plazer IP, LLC | Improved plasma products and methods for producing same by using multiple simultaneous electrical discharges |
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-
2019
- 2019-12-17 TW TW108146250A patent/TWI730548B/zh active
- 2019-12-17 TW TW108146252A patent/TWI708082B/zh active
- 2019-12-17 EP EP19898594.7A patent/EP3899614A4/en active Pending
- 2019-12-17 TW TW108146266A patent/TWI755663B/zh active
- 2019-12-17 WO PCT/US2019/066797 patent/WO2020131843A1/en not_active Ceased
- 2019-12-17 US US16/716,965 patent/US11462386B2/en active Active
- 2019-12-17 JP JP2021533791A patent/JP7410951B2/ja active Active
- 2019-12-17 CN CN201980083890.8A patent/CN113227859B/zh active Active
- 2019-12-17 TW TW108146247A patent/TWI729629B/zh active
- 2019-12-17 WO PCT/US2019/066789 patent/WO2020131839A1/en not_active Ceased
- 2019-12-17 TW TW111101227A patent/TWI826899B/zh active
- 2019-12-17 KR KR1020217022389A patent/KR102841149B1/ko active Active
- 2019-12-17 JP JP2021533442A patent/JP7447118B2/ja active Active
- 2019-12-17 KR KR1020217022379A patent/KR20210094117A/ko active Pending
- 2019-12-17 WO PCT/US2019/066806 patent/WO2020131848A1/en not_active Ceased
- 2019-12-17 EP EP19900535.6A patent/EP3899617B1/en active Active
- 2019-12-17 CN CN201980083897.XA patent/CN113242989A/zh active Pending
- 2019-12-17 US US16/717,400 patent/US11640898B2/en active Active
- 2019-12-17 US US16/717,211 patent/US11810755B2/en active Active
- 2019-12-17 JP JP2021533444A patent/JP7555340B2/ja active Active
- 2019-12-17 CN CN201980083747.9A patent/CN113196442B/zh active Active
- 2019-12-17 KR KR1020217022376A patent/KR20210094116A/ko active Pending
- 2019-12-17 US US16/716,954 patent/US10818472B2/en active Active
- 2019-12-17 CN CN201980083749.8A patent/CN113196123B/zh active Active
- 2019-12-17 EP EP19900534.9A patent/EP3899615A4/en active Pending
- 2019-12-17 EP EP19901270.9A patent/EP3900008A4/en active Pending
- 2019-12-17 KR KR1020217022375A patent/KR102842144B1/ko active Active
- 2019-12-17 JP JP2021533786A patent/JP7447119B2/ja active Active
- 2019-12-17 WO PCT/US2019/066780 patent/WO2020131831A1/en not_active Ceased
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2020
- 2020-10-26 US US17/080,802 patent/US11430634B2/en active Active
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