JPWO2020110271A1 - 接合体及び半導体装置の製造方法、並びに接合用銅ペースト - Google Patents
接合体及び半導体装置の製造方法、並びに接合用銅ペースト Download PDFInfo
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- JPWO2020110271A1 JPWO2020110271A1 JP2020557492A JP2020557492A JPWO2020110271A1 JP WO2020110271 A1 JPWO2020110271 A1 JP WO2020110271A1 JP 2020557492 A JP2020557492 A JP 2020557492A JP 2020557492 A JP2020557492 A JP 2020557492A JP WO2020110271 A1 JPWO2020110271 A1 JP WO2020110271A1
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- metal particles
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/492—Bases or plates or solder therefor
- H01L23/4924—Bases or plates or solder therefor characterised by the materials
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/05—Metallic powder characterised by the size or surface area of the particles
- B22F1/054—Nanosized particles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/05—Metallic powder characterised by the size or surface area of the particles
- B22F1/054—Nanosized particles
- B22F1/056—Submicron particles having a size above 100 nm up to 300 nm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/10—Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
- B22F7/06—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
- B22F7/062—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts
- B22F7/064—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts using an intermediate powder layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/023—Thermo-compression bonding
- B23K20/026—Thermo-compression bonding with diffusion of soldering material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/16—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating with interposition of special material to facilitate connection of the parts, e.g. material for absorbing or producing gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/22—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded
- B23K20/233—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded without ferrous layer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0244—Powders, particles or spheres; Preforms made therefrom
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
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Abstract
Description
図1は、一実施形態に係る接合体の製造方法を示す模式断面図である。一実施形態に係る接合体の製造方法は、第一の部材、接合用銅ペースト、及び第二の部材がこの順に積層されている積層体を用意する工程(用意工程)と、接合用銅ペーストを、0.1〜1MPaの圧力を受けた状態で焼結する工程(焼結工程)と、を備える。
用意工程は、一実施形態において、積層体を作製する工程であってよい。用意工程では、まず、図1(a)に示すように、第一の部材2、及び第二の部材3を用意する。
第一の部材2及び第二の部材3としては、例えば、IGBT、ダイオード、ショットキーバリヤダイオード、MOS−FET、サイリスタ、ロジック、センサー、アナログ集積回路、LED、半導体レーザー、発信器等の半導体素子、リードフレーム、金属板貼付セラミックス基板(例えばDBC)、LEDパッケージ等の半導体素子搭載用基材、銅リボン、金属ブロック、端子等の給電用部材、放熱板、水冷板等が挙げられる。
接合用銅ペースト1は、金属粒子及び分散媒を含有する。
続いて、図1(d)に示すように、積層体4における接合用銅ペースト1を、0.1〜1MPaの圧力を受けた状態で焼結する。
次に、半導体装置の製造方法を説明する。上述した接合体100の製造方法において、第一の部材及び第二の部材の少なくとも一方が半導体素子である場合、上述した接合体の製造方法により、半導体装置を製造することができる。すなわち、一実施形態に係る半導体装置の製造方法は、上述した接合体の製造方法において、第一の部材及び/又は第二の部材を半導体素子に読み替えたものであり、第一の部材、接合用銅ペースト、及び第二の部材がこの順に積層されている積層体を用意する工程と、接合用銅ペーストを、0.1〜1MPaの圧力を受けた状態で焼結する工程と、を備え、第一の部材及び前記第二の部材の少なくとも一方は半導体素子であり、接合用銅ペーストは、金属粒子及び分散媒を含有し、金属粒子の含有量が、前記接合用銅ペーストの全質量を基準として、50質量%以上であり、金属粒子が、前記金属粒子の全質量を基準として、95質量%以上のサブマイクロ銅粒子を含有する。
分散媒としてジエチレングリコールモノブチルエーテル(和光純薬工業株式会社製)0.9gと、サブマイクロ銅粒子としてCH−0200(三井金属鉱業株式会社製)9.1gとを、メノウ乳鉢で乾燥粉がなくなるまで混練し、得られた混合液をポリ瓶に移した。密栓をしたポリ瓶を、自転公転型撹拌装置(Planetary Vacuum Mixer ARV−310、株式会社シンキー製)を用いて、2000min−1(2000回転/分)で2分間撹拌した。この混合液を接合用銅ペースト1とした。
接合用銅ペースト1〜17の25℃における粘度を、粘弾性測定装置(MCR102、アントンパール社製)を用いて測定した。測定条件としては、ギャップを0.2mm、ひずみ2%、周波数0.5Hzとした。測定開始から5分後の接合用銅ペーストの粘度を表1〜3に示す。
接合用銅ペースト1〜17を用いて、以下の方法に従って接合体を製造した。接合体のダイシェア強度は、後述する方法により測定した。
19mm×25mmの銅板(厚み:3mm)上に3mm×3mm正方形の開口を有するステンレス製のメタルマスク(厚さ:200μm)を載せ、メタルスキージを用いたステンシル印刷により接合用銅ペーストを塗布した。これを90℃に設定したホットプレート上で、大気中、30分間加熱し、3mm×3mmの被着面がチタン(50nm)、ニッケル(100nm)の順でスパッタされたシリコンチップ(厚み:400μm)を載せ、ピンセットで軽く押さえた。このサンプルを、バッチ式真空半田付炉(新港精機株式会社製)にセットし、0.5MPaで加圧した状態で、水素100%雰囲気下、30分間昇温した。昇温後、最高到達温度300℃、最高到達温度保持時間60分間の条件で焼結処理して、銅板とニッケルスパッタされたシリコンチップとを接合した接合体を得た。焼結後、50℃以下で接合体を空気中に取り出した。
[ダイシェア強度]
接合体の接合強度は、ダイシェア強度により評価した。作製した接合体について、ロードセル(SMS−200K−24200, Royce Instruments社製)を装着したユニバーサルボンドテスタ(Royce 650, Royce Instruments社製)を用い、測定スピード5mm/min、測定高さ50μmで銅ブロックを水平方向に押し、接合体のダイシェア強度を測定した。8個の接合体を測定した値の平均値をダイシェア強度とした。評価指標は下記のとおりとした。評価がS又はAであれば、ダイシェア強度に優れているといえる。
評価指標:
S:30MPa以上
A:20MPa以上30MPa未満
B:10MPa以上20MPa未満
C:10MPa未満
10mm×10mm正方形の開口を有するステンレス製のメタルマスク(厚さ:200μm)を用いて、接合用銅ペーストを塗布することにより、接合用銅ペーストの塗布性を評価した。評価指標は下記のとおりとした。評価がS又はAであれば、塗布性に優れているといえる。
評価指標:
S:かすれずに塗布することができ、ペーストが開口部から流れはみ出さない
A:わずかにかすれが起こるが、ペーストが開口部からはみ出さない。もしくは、かすれずに塗布することができるが、わずかにペーストが開口部から流れはみ出す。
B:かすれが起こるが、ペーストが開口部からはみ出さない。もしくは、かすれずに塗布することができるが、ペーストが開口部から流れはみ出す。
C:著しくかすれが起こるが、ペーストが開口部からはみ出さない。もしくは、かすれずに塗布することができるが、著しくペーストが開口部から流れはみ出す。
接合体をカップ内にサンプルクリップ(Samplklip I、Buehler社製)で固定し、周囲にエポキシ注形樹脂(エポマウント、リファインテック株式会社製)をサンプル全体が埋まるまで流し込み、真空デシケータ内に静置し、1分間減圧して脱泡した。その後、室温(25℃)下10時間放置してエポキシ注形樹脂を硬化した。ダイヤモンド切断ホイール(11−304、リファインテック株式会社製)をつけたリファインソー・ロー(RCA−005、リファインテック株式会社製)を用い、注形した接合体の観察したい断面付近で切断した。耐水研磨紙(カーボマックペーパー、リファインテック株式会社製)をつけた研磨装置(Refine Polisher Hv、リファインテック株式会社製)で断面を削りシリコンチップにクラックの無い断面を出し、さらに余分な注形樹脂を削りCP(クロスセクションポリッシャ)加工機にかけられるサイズに仕上げた。切削加工したサンプルをCP加工機(IM4000、株式会社日立製作所製)で加速電圧6kV、アルゴンガス流量0.07〜0.1cm3/min、処理時間2時間の条件でクロスセクションポリッシングを行って断面加工を行った。断面にスパッタ装置(ION SPUTTER、株式会社日立ハイテクノロジーズ製)を用いて白金を10nmの厚みでスパッタしてSEM観察用のサンプルとした。このSEM用サンプルをSEM装置(ESEM XL30、Philips社製)により、接合体の断面を印加電圧10kVで観察した。
Claims (7)
- 第一の部材、接合用銅ペースト、及び第二の部材がこの順に積層されている積層体を用意する工程と、
前記接合用銅ペーストを、0.1〜1MPaの圧力を受けた状態で焼結する工程と、を備え、
前記接合用銅ペーストは、金属粒子及び分散媒を含有し、
前記金属粒子の含有量が、前記接合用銅ペーストの全質量を基準として、50質量%以上であり、
前記金属粒子が、前記金属粒子の全質量を基準として、95質量%以上のサブマイクロ銅粒子を含有する、接合体の製造方法。 - 第一の部材、接合用銅ペースト、及び第二の部材がこの順に積層されている積層体を用意する工程と、
前記接合用銅ペーストを、0.1〜1MPaの圧力を受けた状態で焼結する工程と、を備え、
前記第一の部材及び前記第二の部材の少なくとも一方は半導体素子であり、
前記接合用銅ペーストは、金属粒子及び分散媒を含有し、
前記金属粒子の含有量が、前記接合用銅ペーストの全質量を基準として、50質量%以上であり、
前記金属粒子が、前記金属粒子の全質量を基準として、95質量%以上のサブマイクロ銅粒子を含有する、半導体装置の製造方法。 - 金属粒子及び分散媒を含有し、
前記金属粒子の含有量が、接合用銅ペーストの全質量を基準として、50質量%以上であり、
前記金属粒子が、前記金属粒子の全量を基準として、95質量%以上のサブマイクロ銅粒子を含有する、接合用銅ペースト。 - 前記金属粒子が、前記金属粒子の全質量を基準として、5質量%以下のマイクロ銅粒子を含有する、請求項3に記載の接合用銅ペースト。
- 前記接合用銅ペーストの25℃における粘度が0.8〜40000Pa・sである、請求項3又は4に記載の接合用銅ペースト。
- 前記分散媒が、アルコール類及びエーテル類からなる群より選ばれる少なくとも1種である、請求項3〜5のいずれか一項に記載の接合用銅ペースト。
- 前記サブマイクロ銅粒子のアスペクト比が5以下である、請求項3〜6のいずれか一項に記載の接合用銅ペースト。
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JP2024010136A (ja) | 2024-01-23 |
EP3889317A4 (en) | 2021-11-24 |
CN113166945A (zh) | 2021-07-23 |
US11890681B2 (en) | 2024-02-06 |
KR20210096147A (ko) | 2021-08-04 |
TW202019583A (zh) | 2020-06-01 |
WO2020110271A1 (ja) | 2020-06-04 |
US20220028824A1 (en) | 2022-01-27 |
JP7468358B2 (ja) | 2024-04-16 |
EP3889317A1 (en) | 2021-10-06 |
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CN113166945B (zh) | 2024-01-02 |
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