JPWO2020051131A5 - - Google Patents
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- Publication number
- JPWO2020051131A5 JPWO2020051131A5 JP2021505906A JP2021505906A JPWO2020051131A5 JP WO2020051131 A5 JPWO2020051131 A5 JP WO2020051131A5 JP 2021505906 A JP2021505906 A JP 2021505906A JP 2021505906 A JP2021505906 A JP 2021505906A JP WO2020051131 A5 JPWO2020051131 A5 JP WO2020051131A5
- Authority
- JP
- Japan
- Prior art keywords
- particles
- particle
- particle counter
- condensed
- energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims 61
- 239000000523 sample Substances 0.000 claims 32
- 238000000034 method Methods 0.000 claims 17
- 239000012530 fluid Substances 0.000 claims 11
- 238000005070 sampling Methods 0.000 claims 9
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims 8
- 239000000126 substance Substances 0.000 claims 7
- 239000007789 gas Substances 0.000 claims 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims 5
- 230000001939 inductive effect Effects 0.000 claims 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 4
- 239000001569 carbon dioxide Substances 0.000 claims 4
- 229910002092 carbon dioxide Inorganic materials 0.000 claims 4
- 238000001514 detection method Methods 0.000 claims 4
- 239000007788 liquid Substances 0.000 claims 4
- 230000003287 optical effect Effects 0.000 claims 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 claims 2
- 239000003570 air Substances 0.000 claims 2
- 229910052786 argon Inorganic materials 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000002105 nanoparticle Substances 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 claims 1
- 239000004094 surface-active agent Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024028419A JP2024059885A (ja) | 2018-09-04 | 2024-02-28 | 生産機器および表面上のナノ粒子の検出 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862726851P | 2018-09-04 | 2018-09-04 | |
| US62/726,851 | 2018-09-04 | ||
| PCT/US2019/049328 WO2020051131A1 (en) | 2018-09-04 | 2019-09-03 | Detecting nanoparticles on production equipment and surfaces |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024028419A Division JP2024059885A (ja) | 2018-09-04 | 2024-02-28 | 生産機器および表面上のナノ粒子の検出 |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2021536001A JP2021536001A (ja) | 2021-12-23 |
| JPWO2020051131A5 true JPWO2020051131A5 (https=) | 2022-06-15 |
| JP2021536001A5 JP2021536001A5 (https=) | 2022-06-15 |
| JP7504866B2 JP7504866B2 (ja) | 2024-06-24 |
Family
ID=69640603
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021505906A Active JP7504866B2 (ja) | 2018-09-04 | 2019-09-03 | 生産機器および表面上のナノ粒子の検出 |
| JP2024028419A Withdrawn JP2024059885A (ja) | 2018-09-04 | 2024-02-28 | 生産機器および表面上のナノ粒子の検出 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024028419A Withdrawn JP2024059885A (ja) | 2018-09-04 | 2024-02-28 | 生産機器および表面上のナノ粒子の検出 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US10928293B2 (https=) |
| JP (2) | JP7504866B2 (https=) |
| KR (1) | KR102920180B1 (https=) |
| CN (1) | CN112639444A (https=) |
| TW (1) | TWI728453B (https=) |
| WO (1) | WO2020051131A1 (https=) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150260628A1 (en) | 2011-12-01 | 2015-09-17 | P.M.L - Particles Monitoring Technologies Ltd. | Detection scheme for particle size and concentration measurement |
| ITRM20130128U1 (it) | 2013-07-23 | 2015-01-24 | Particle Measuring Systems S R L | Dispositivo per il campionamento microbico dell'aria |
| JP7326256B2 (ja) | 2017-10-26 | 2023-08-15 | パーティクル・メージャーリング・システムズ・インコーポレーテッド | 粒子計測システム及び方法 |
| US10928293B2 (en) | 2018-09-04 | 2021-02-23 | Particle Measuring Systems, Inc. | Detecting nanoparticles on production equipment and surfaces |
| WO2020055665A1 (en) * | 2018-09-12 | 2020-03-19 | Lam Research Corporation | Method and apparatus for measuring particles |
| US11385161B2 (en) | 2018-11-12 | 2022-07-12 | Particle Measuring Systems, Inc. | Calibration verification for optical particle analyzers |
| WO2020102038A1 (en) | 2018-11-12 | 2020-05-22 | Particle Measuring Systems, Inc. | Calibration verification for optical particle analyzers |
| WO2020102032A1 (en) | 2018-11-16 | 2020-05-22 | Particle Measuring Systems, Inc. | Particle sampling systems and methods for robotic controlled manufacturing barrier systems |
| TWI744716B (zh) | 2018-11-16 | 2021-11-01 | 美商粒子監測系統有限公司 | 顆粉偵測系統及用於特徵化液體樣本之方法 |
| CN113692529A (zh) | 2019-04-25 | 2021-11-23 | 粒子监测系统有限公司 | 用于轴上粒子检测和/或差分检测的粒子检测系统和方法 |
| US11441974B2 (en) | 2019-08-01 | 2022-09-13 | Applied Materials, Inc. | Detection of surface particles on chamber components with carbon dioxide |
| WO2021041420A1 (en) | 2019-08-26 | 2021-03-04 | Particle Measuring Systems, Inc | Triggered sampling systems and methods |
| CN114466704A (zh) | 2019-10-07 | 2022-05-10 | 粒子监测系统有限公司 | 抗微生物颗粒检测器 |
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| US11988593B2 (en) | 2019-11-22 | 2024-05-21 | Particle Measuring Systems, Inc. | Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions |
| CN114981636A (zh) | 2020-01-21 | 2022-08-30 | 粒子监测系统有限公司 | 用于无菌处理的机器人控制 |
| WO2021193218A1 (ja) * | 2020-03-24 | 2021-09-30 | ソニーグループ株式会社 | 粒子分析システム、情報処理方法、及びプログラム |
| CN117501087A (zh) | 2021-06-15 | 2024-02-02 | 粒子监测系统有限公司 | 紧凑型智能气溶胶和流体歧管 |
| US12130222B2 (en) * | 2021-06-15 | 2024-10-29 | Particle Measuring Systems, Inc. | Condensation particle counters and methods of use |
| EP4356105A4 (en) | 2021-06-15 | 2025-05-07 | Particle Measuring Systems, Inc. | MODULAR PARTICLE COUNTER WITH DOCKING STATION |
| KR20240135793A (ko) | 2022-01-21 | 2024-09-12 | 파티클 머슈어링 시스템즈, 인크. | 향상된 이중 통과 및 다중 통과 입자 검출 |
| EP4257948A1 (en) | 2022-04-04 | 2023-10-11 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO | Method and system for inspecting a surface |
| CN114965229B (zh) * | 2022-04-28 | 2025-07-29 | 上海纬冉科技有限公司 | 进样仓测量方法、装置、计算机设备和存储介质 |
| KR20260004363A (ko) * | 2023-04-19 | 2026-01-08 | 스미스 디텍션-워트포드 리미티드 | 검출 디바이스용 통신 어댑터 및 검출 디바이스용 통신 방법 |
| US12461010B2 (en) | 2023-11-16 | 2025-11-04 | Particle Measuring Systems, Inc. | Systems and methods for reducing false positive particle detection events in a particle detector |
| US20250208018A1 (en) * | 2023-12-20 | 2025-06-26 | Kang-Ho Ahn | Condensation particle counter and system including same |
| CN120971258A (zh) * | 2025-10-21 | 2025-11-18 | 宁德时代新能源科技股份有限公司 | 极片剥离装置及其活性材料层中粘接剂上浮量测量方法 |
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| JP2021535999A (ja) | 2018-08-31 | 2021-12-23 | パーティクル・メージャーリング・システムズ・インコーポレーテッド | 流体屈折率最適化粒子計数器 |
| US10928293B2 (en) | 2018-09-04 | 2021-02-23 | Particle Measuring Systems, Inc. | Detecting nanoparticles on production equipment and surfaces |
| WO2020102038A1 (en) | 2018-11-12 | 2020-05-22 | Particle Measuring Systems, Inc. | Calibration verification for optical particle analyzers |
| WO2020102032A1 (en) | 2018-11-16 | 2020-05-22 | Particle Measuring Systems, Inc. | Particle sampling systems and methods for robotic controlled manufacturing barrier systems |
| TWI744716B (zh) | 2018-11-16 | 2021-11-01 | 美商粒子監測系統有限公司 | 顆粉偵測系統及用於特徵化液體樣本之方法 |
| CN113692529A (zh) | 2019-04-25 | 2021-11-23 | 粒子监测系统有限公司 | 用于轴上粒子检测和/或差分检测的粒子检测系统和方法 |
-
2019
- 2019-09-03 US US16/559,074 patent/US10928293B2/en active Active
- 2019-09-03 WO PCT/US2019/049328 patent/WO2020051131A1/en not_active Ceased
- 2019-09-03 TW TW108131754A patent/TWI728453B/zh active
- 2019-09-03 CN CN201980057666.1A patent/CN112639444A/zh active Pending
- 2019-09-03 KR KR1020217009340A patent/KR102920180B1/ko active Active
- 2019-09-03 JP JP2021505906A patent/JP7504866B2/ja active Active
-
2021
- 2021-01-20 US US17/153,573 patent/US11428619B2/en active Active
-
2024
- 2024-02-28 JP JP2024028419A patent/JP2024059885A/ja not_active Withdrawn
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