KR102920180B1 - 생산 장비 및 표면에서 나노입자 검출 - Google Patents

생산 장비 및 표면에서 나노입자 검출

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Publication number
KR102920180B1
KR102920180B1 KR1020217009340A KR20217009340A KR102920180B1 KR 102920180 B1 KR102920180 B1 KR 102920180B1 KR 1020217009340 A KR1020217009340 A KR 1020217009340A KR 20217009340 A KR20217009340 A KR 20217009340A KR 102920180 B1 KR102920180 B1 KR 102920180B1
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KR
South Korea
Prior art keywords
particles
particle
optical
particle counter
energy
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Application number
KR1020217009340A
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English (en)
Korean (ko)
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KR20210052506A (ko
Inventor
브라이언 에이. 놀렌버그
다니엘 로버트 로디에
Original Assignee
파티클 머슈어링 시스템즈, 인크.
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Publication of KR20210052506A publication Critical patent/KR20210052506A/ko
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Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/065—Investigating concentration of particle suspensions using condensation nuclei counters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N2001/002—Devices for supplying or distributing samples to an analysing apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N2001/028—Sampling from a surface, swabbing, vaporising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0038—Investigating nanoparticles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
KR1020217009340A 2018-09-04 2019-09-03 생산 장비 및 표면에서 나노입자 검출 Active KR102920180B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862726851P 2018-09-04 2018-09-04
US62/726,851 2018-09-04
PCT/US2019/049328 WO2020051131A1 (en) 2018-09-04 2019-09-03 Detecting nanoparticles on production equipment and surfaces

Publications (2)

Publication Number Publication Date
KR20210052506A KR20210052506A (ko) 2021-05-10
KR102920180B1 true KR102920180B1 (ko) 2026-01-29

Family

ID=69640603

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217009340A Active KR102920180B1 (ko) 2018-09-04 2019-09-03 생산 장비 및 표면에서 나노입자 검출

Country Status (6)

Country Link
US (2) US10928293B2 (https=)
JP (2) JP7504866B2 (https=)
KR (1) KR102920180B1 (https=)
CN (1) CN112639444A (https=)
TW (1) TWI728453B (https=)
WO (1) WO2020051131A1 (https=)

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TWI744716B (zh) 2018-11-16 2021-11-01 美商粒子監測系統有限公司 顆粉偵測系統及用於特徵化液體樣本之方法
CN113692529A (zh) 2019-04-25 2021-11-23 粒子监测系统有限公司 用于轴上粒子检测和/或差分检测的粒子检测系统和方法
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WO2021193218A1 (ja) * 2020-03-24 2021-09-30 ソニーグループ株式会社 粒子分析システム、情報処理方法、及びプログラム
CN117501087A (zh) 2021-06-15 2024-02-02 粒子监测系统有限公司 紧凑型智能气溶胶和流体歧管
US12130222B2 (en) * 2021-06-15 2024-10-29 Particle Measuring Systems, Inc. Condensation particle counters and methods of use
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KR20240135793A (ko) 2022-01-21 2024-09-12 파티클 머슈어링 시스템즈, 인크. 향상된 이중 통과 및 다중 통과 입자 검출
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KR20260004363A (ko) * 2023-04-19 2026-01-08 스미스 디텍션-워트포드 리미티드 검출 디바이스용 통신 어댑터 및 검출 디바이스용 통신 방법
US12461010B2 (en) 2023-11-16 2025-11-04 Particle Measuring Systems, Inc. Systems and methods for reducing false positive particle detection events in a particle detector
US20250208018A1 (en) * 2023-12-20 2025-06-26 Kang-Ho Ahn Condensation particle counter and system including same
CN120971258A (zh) * 2025-10-21 2025-11-18 宁德时代新能源科技股份有限公司 极片剥离装置及其活性材料层中粘接剂上浮量测量方法

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Also Published As

Publication number Publication date
JP7504866B2 (ja) 2024-06-24
TW202028715A (zh) 2020-08-01
JP2024059885A (ja) 2024-05-01
CN112639444A (zh) 2021-04-09
TWI728453B (zh) 2021-05-21
WO2020051131A1 (en) 2020-03-12
US20210140867A1 (en) 2021-05-13
JP2021536001A (ja) 2021-12-23
US20200072724A1 (en) 2020-03-05
US10928293B2 (en) 2021-02-23
US11428619B2 (en) 2022-08-30
KR20210052506A (ko) 2021-05-10

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