TWI728453B - 在生產儀器及表面上偵測奈米粒子 - Google Patents

在生產儀器及表面上偵測奈米粒子 Download PDF

Info

Publication number
TWI728453B
TWI728453B TW108131754A TW108131754A TWI728453B TW I728453 B TWI728453 B TW I728453B TW 108131754 A TW108131754 A TW 108131754A TW 108131754 A TW108131754 A TW 108131754A TW I728453 B TWI728453 B TW I728453B
Authority
TW
Taiwan
Prior art keywords
particles
particle
particle counter
optical
nanoparticles
Prior art date
Application number
TW108131754A
Other languages
English (en)
Chinese (zh)
Other versions
TW202028715A (zh
Inventor
布萊恩 Ａ 克諾倫貝格
丹尼爾 羅伯特 羅迪爾
Original Assignee
美商粒子監測系統有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商粒子監測系統有限公司 filed Critical 美商粒子監測系統有限公司
Publication of TW202028715A publication Critical patent/TW202028715A/zh
Application granted granted Critical
Publication of TWI728453B publication Critical patent/TWI728453B/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/065—Investigating concentration of particle suspensions using condensation nuclei counters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N2001/002—Devices for supplying or distributing samples to an analysing apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N2001/028—Sampling from a surface, swabbing, vaporising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0038—Investigating nanoparticles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
TW108131754A 2018-09-04 2019-09-03 在生產儀器及表面上偵測奈米粒子 TWI728453B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862726851P 2018-09-04 2018-09-04
US62/726,851 2018-09-04

Publications (2)

Publication Number Publication Date
TW202028715A TW202028715A (zh) 2020-08-01
TWI728453B true TWI728453B (zh) 2021-05-21

Family

ID=69640603

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108131754A TWI728453B (zh) 2018-09-04 2019-09-03 在生產儀器及表面上偵測奈米粒子

Country Status (6)

Country Link
US (2) US10928293B2 (https=)
JP (2) JP7504866B2 (https=)
KR (1) KR102920180B1 (https=)
CN (1) CN112639444A (https=)
TW (1) TWI728453B (https=)
WO (1) WO2020051131A1 (https=)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150260628A1 (en) 2011-12-01 2015-09-17 P.M.L - Particles Monitoring Technologies Ltd. Detection scheme for particle size and concentration measurement
ITRM20130128U1 (it) 2013-07-23 2015-01-24 Particle Measuring Systems S R L Dispositivo per il campionamento microbico dell'aria
JP7326256B2 (ja) 2017-10-26 2023-08-15 パーティクル・メージャーリング・システムズ・インコーポレーテッド 粒子計測システム及び方法
US10928293B2 (en) 2018-09-04 2021-02-23 Particle Measuring Systems, Inc. Detecting nanoparticles on production equipment and surfaces
WO2020055665A1 (en) * 2018-09-12 2020-03-19 Lam Research Corporation Method and apparatus for measuring particles
US11385161B2 (en) 2018-11-12 2022-07-12 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
WO2020102038A1 (en) 2018-11-12 2020-05-22 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
WO2020102032A1 (en) 2018-11-16 2020-05-22 Particle Measuring Systems, Inc. Particle sampling systems and methods for robotic controlled manufacturing barrier systems
TWI744716B (zh) 2018-11-16 2021-11-01 美商粒子監測系統有限公司 顆粉偵測系統及用於特徵化液體樣本之方法
CN113692529A (zh) 2019-04-25 2021-11-23 粒子监测系统有限公司 用于轴上粒子检测和/或差分检测的粒子检测系统和方法
US11441974B2 (en) 2019-08-01 2022-09-13 Applied Materials, Inc. Detection of surface particles on chamber components with carbon dioxide
WO2021041420A1 (en) 2019-08-26 2021-03-04 Particle Measuring Systems, Inc Triggered sampling systems and methods
CN114466704A (zh) 2019-10-07 2022-05-10 粒子监测系统有限公司 抗微生物颗粒检测器
US10997845B2 (en) 2019-10-07 2021-05-04 Particle Measuring Systems, Inc. Particle detectors with remote alarm monitoring and control
IT201900020248A1 (it) 2019-11-04 2021-05-04 Particle Measuring Systems S R L Dispositivo di monitoraggio mobile per aree a contaminazione controllata
US11988593B2 (en) 2019-11-22 2024-05-21 Particle Measuring Systems, Inc. Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions
CN114981636A (zh) 2020-01-21 2022-08-30 粒子监测系统有限公司 用于无菌处理的机器人控制
WO2021193218A1 (ja) * 2020-03-24 2021-09-30 ソニーグループ株式会社 粒子分析システム、情報処理方法、及びプログラム
CN117501087A (zh) 2021-06-15 2024-02-02 粒子监测系统有限公司 紧凑型智能气溶胶和流体歧管
US12130222B2 (en) * 2021-06-15 2024-10-29 Particle Measuring Systems, Inc. Condensation particle counters and methods of use
EP4356105A4 (en) 2021-06-15 2025-05-07 Particle Measuring Systems, Inc. MODULAR PARTICLE COUNTER WITH DOCKING STATION
KR20240135793A (ko) 2022-01-21 2024-09-12 파티클 머슈어링 시스템즈, 인크. 향상된 이중 통과 및 다중 통과 입자 검출
EP4257948A1 (en) 2022-04-04 2023-10-11 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Method and system for inspecting a surface
CN114965229B (zh) * 2022-04-28 2025-07-29 上海纬冉科技有限公司 进样仓测量方法、装置、计算机设备和存储介质
KR20260004363A (ko) * 2023-04-19 2026-01-08 스미스 디텍션-워트포드 리미티드 검출 디바이스용 통신 어댑터 및 검출 디바이스용 통신 방법
US12461010B2 (en) 2023-11-16 2025-11-04 Particle Measuring Systems, Inc. Systems and methods for reducing false positive particle detection events in a particle detector
US20250208018A1 (en) * 2023-12-20 2025-06-26 Kang-Ho Ahn Condensation particle counter and system including same
CN120971258A (zh) * 2025-10-21 2025-11-18 宁德时代新能源科技股份有限公司 极片剥离装置及其活性材料层中粘接剂上浮量测量方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170350801A1 (en) * 2016-06-03 2017-12-07 Particle Measuring Systems, Inc. Systems and methods for isolating condensate in a condensation particle counter
US20180224475A1 (en) * 2017-02-03 2018-08-09 Pentagon Technologies Group, Inc. Modulated Air Surface Particle Detector
TW201905465A (zh) * 2017-06-20 2019-02-01 美商五角科技集團股份有限公司 高解析度表面粒子檢測器

Family Cites Families (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4594715A (en) 1983-11-17 1986-06-10 Particle Measuring Systems, Inc. Laser with stabilized external passive cavity
US4728190A (en) 1985-10-15 1988-03-01 Particle Measuring Systems, Inc. Device and method for optically detecting particles in a fluid
US4798465B2 (en) 1986-04-14 1994-08-30 Particle Measuring Syst Particle size detection device having high sensitivity in high molecular scattering environment
US4987767A (en) * 1989-06-09 1991-01-29 Research Corporation Technologies, Inc. Exposive detection screening system
US5039349A (en) 1990-05-18 1991-08-13 Veriflo Corporation Method and apparatus for cleaning surfaces to absolute or near-absolute cleanliness
US5283199A (en) 1990-06-01 1994-02-01 Environmental Technologies Group, Inc. Chlorine dioxide monitor based on ion mobility spectrometry with selective dopant chemistry
US5282151A (en) 1991-02-28 1994-01-25 Particle Measuring Systems, Inc. Submicron diameter particle detection utilizing high density array
US5751422A (en) 1996-02-26 1998-05-12 Particle Measuring Systems, Inc. In-situ particle detection utilizing optical coupling
US5726753A (en) 1996-02-26 1998-03-10 Research Electro-Optics, Inc. Intracavity particle detection using optically pumped laser media
US5671046A (en) 1996-07-01 1997-09-23 Particle Measuring Systems, Inc. Device and method for optically detecting particles in a free liquid stream
US5805281A (en) 1997-04-21 1998-09-08 Particle Measuring Systems Noise reduction utilizing signal multiplication
US5861950A (en) 1997-07-10 1999-01-19 Particle Measuring Systems, Inc. Particle detection system utilizing an inviscid flow-producing nozzle
US5903338A (en) 1998-02-11 1999-05-11 Particle Measuring Systems, Inc. Condensation nucleus counter using mixing and cooling
US6246474B1 (en) 1998-04-29 2001-06-12 Particle Measuring Systems, Inc. Method and apparatus for measurement of particle size distribution in substantially opaque slurries
US6269703B1 (en) * 1998-09-11 2001-08-07 Femtometrics, Inc. Pulsed air sampler
US6887710B2 (en) 1998-11-13 2005-05-03 Mesosystems Technology, Inc. Robust system for screening mail for biological agents
US6167107A (en) 1999-07-16 2000-12-26 Particle Measuring Systems, Inc. Air pump for particle sensing using regenerative fan, and associated methods
US20020029956A1 (en) * 2000-07-24 2002-03-14 Allen Susan Davis Method and apparatus for removing minute particles from a surface
US6615679B1 (en) 2000-08-15 2003-09-09 Particle Measuring Systems, Inc. Ensemble manifold, system and method for monitoring particles in clean environments
US7010991B2 (en) 2000-09-13 2006-03-14 Pentagon Technologies Group, Inc. Surface particle detector
KR100383547B1 (ko) * 2000-09-25 2003-05-12 학교법인 한양학원 초미세입자 응축핵계수기
JP2003035652A (ja) 2001-07-23 2003-02-07 Matsushita Electric Ind Co Ltd パーティクルカウンタ
US20030015045A1 (en) * 2001-07-23 2003-01-23 Takehito Yoshida Particle counting method and particle counter
US6709311B2 (en) 2001-08-13 2004-03-23 Particle Measuring Systems, Inc. Spectroscopic measurement of the chemical constituents of a CMP slurry
US7208123B2 (en) 2002-06-24 2007-04-24 Particle Measuring Systems, Inc. Molecular contamination monitoring system and method
US6945090B2 (en) 2002-06-24 2005-09-20 Particle Measuring Systems, Inc. Method and apparatus for monitoring molecular contamination of critical surfaces using coated SAWS
US6859277B2 (en) 2002-08-27 2005-02-22 Particle Measuring Systems, Inc. Particle counter with strip laser diode
US7576857B2 (en) 2002-08-27 2009-08-18 Particle Measuring Systems, Inc. Particle counter with laser diode
US6903818B2 (en) 2002-10-28 2005-06-07 Particle Measuring Systems, Inc. Low noise intracavity laser particle counter
US7235214B2 (en) 2003-04-23 2007-06-26 Particle Measuring Systems, Inc. System and method for measuring molecular analytes in a measurement fluid
IL156856A (en) 2003-07-09 2011-11-30 Joseph Shamir Method for particle size and concentration measurement
US20050028593A1 (en) 2003-08-04 2005-02-10 Particle Measuring Systems, Inc. Method and apparatus for high sensitivity monitoring of molecular contamination
US7088446B2 (en) 2003-12-31 2006-08-08 Particle Measuring Systems, Inc. Optical measurement of the chemical constituents of an opaque slurry
US7030980B1 (en) 2004-12-29 2006-04-18 Particle Measuring Systems, Inc. Diode pumped intracavity laser particle counter with improved reliability and reduced noise
US7088447B1 (en) 2005-03-01 2006-08-08 Particle Measuring Systems, Inc. Particle counter with self-concealing aperture assembly
US7528386B2 (en) * 2005-04-21 2009-05-05 Board Of Trustees Of University Of Illinois Submicron particle removal
US20070030492A1 (en) 2005-05-04 2007-02-08 Lukas Novotny Apparatus and method for sizing nanoparticles based on optical forces and interferometric field detection
US7456960B2 (en) 2005-06-06 2008-11-25 Particle Measuring Systems, Inc. Particle counter with improved image sensor array
GB0513358D0 (en) 2005-06-29 2005-08-03 Gorbounon Boris Portable nanoparticle size classifier
US20090323061A1 (en) 2006-02-28 2009-12-31 Lukas Novotny Multi-color hetereodyne interferometric apparatus and method for sizing nanoparticles
US7667839B2 (en) 2006-03-30 2010-02-23 Particle Measuring Systems, Inc. Aerosol particle sensor with axial fan
JP4866749B2 (ja) 2007-01-26 2012-02-01 公立大学法人大阪府立大学 表面分析装置
US7796255B2 (en) 2007-03-23 2010-09-14 Particle Measuring Systems, Inc. Optical particle sensor with exhaust-cooled optical source
WO2009018305A1 (en) 2007-07-30 2009-02-05 Particle Measuring Systems, Inc. Detection of analytes using ion mobility spectrometry
WO2009073259A2 (en) * 2007-09-14 2009-06-11 University Of Rochester Common-path interferometer rendering amplitude and phase of scattered light
US7973929B2 (en) 2007-11-16 2011-07-05 Particle Measuring Systems, Inc. System and method for calibration verification of an optical particle counter
EP2232229B1 (en) 2007-12-04 2021-02-17 Particle Measuring Systems, Inc. Two-dimensional optical imaging methods for particle detection
GB0808385D0 (en) 2008-05-08 2008-06-18 Naneum Ltd A condensation apparatus
WO2010114976A1 (en) 2009-04-01 2010-10-07 Prosolia, Inc. Method and system for surface sampling
US8561486B2 (en) 2009-07-13 2013-10-22 Enertechnix, Inc Particle interrogation devices and methods
US8307723B2 (en) 2009-07-13 2012-11-13 Enertechnix, Inc. Particle interrogation devices and methods
JP5574250B2 (ja) 2009-08-24 2014-08-20 パーティクル・メージャーリング・システムズ・インコーポレーテッド 流量がモニタリングされる粒子センサ
US20150260628A1 (en) 2011-12-01 2015-09-17 P.M.L - Particles Monitoring Technologies Ltd. Detection scheme for particle size and concentration measurement
JP2014125494A (ja) * 2012-12-25 2014-07-07 Toray Ind Inc エポキシ樹脂硬化物微粒子の金属酸化物含有水分散液及びその製造方法
GB201310355D0 (en) 2013-06-11 2013-07-24 Particle Measuring System Inc Apparatus for charging or adjusting the charge of aerosol apparatus
GB2515285A (en) 2013-06-17 2014-12-24 Particle Measuring System Inc A method for obtaining aerosol particle size distributions
GB201311097D0 (en) 2013-06-21 2013-08-07 Particle Measuring Syst A method and apparatus for dilution of aerosols
ITRM20130128U1 (it) 2013-07-23 2015-01-24 Particle Measuring Systems S R L Dispositivo per il campionamento microbico dell'aria
US9810558B2 (en) 2014-03-14 2017-11-07 Particle Measuring Systems, Inc. Pressure-based airflow sensing in particle impactor systems
US11416123B2 (en) 2014-03-14 2022-08-16 Particle Measuring Systems, Inc. Firmware design for facility navigation, and area and location data management of particle sampling and analysis instruments
WO2015138681A1 (en) 2014-03-14 2015-09-17 Particle Measuring Systems, Inc. Firmware design for biological air sampling method
WO2015138677A1 (en) 2014-03-14 2015-09-17 Particle Measuring Systems, Inc. Particle impactor with selective height adjustment
WO2015138695A2 (en) 2014-03-14 2015-09-17 Particle Measuring Systems, Inc. Filter and blower geometry for particle sampler
US9682345B2 (en) 2014-07-08 2017-06-20 Particle Measuring Systems, Inc. Method of treating a cleanroom enclosure
US9799490B2 (en) 2015-03-31 2017-10-24 Fei Company Charged particle beam processing using process gas and cooled surface
US9989462B2 (en) 2015-04-02 2018-06-05 Particle Measuring Systems, Inc. Laser noise detection and mitigation in particle counting instruments
KR102373164B1 (ko) 2016-05-20 2022-03-10 파티클 머슈어링 시스템즈, 인크. 유동 및 버블 검출 시스템을 가지는 자동 전력 제어 액체 입자 계수기
JP7326256B2 (ja) 2017-10-26 2023-08-15 パーティクル・メージャーリング・システムズ・インコーポレーテッド 粒子計測システム及び方法
JP2021535999A (ja) 2018-08-31 2021-12-23 パーティクル・メージャーリング・システムズ・インコーポレーテッド 流体屈折率最適化粒子計数器
US10928293B2 (en) 2018-09-04 2021-02-23 Particle Measuring Systems, Inc. Detecting nanoparticles on production equipment and surfaces
WO2020102038A1 (en) 2018-11-12 2020-05-22 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
WO2020102032A1 (en) 2018-11-16 2020-05-22 Particle Measuring Systems, Inc. Particle sampling systems and methods for robotic controlled manufacturing barrier systems
TWI744716B (zh) 2018-11-16 2021-11-01 美商粒子監測系統有限公司 顆粉偵測系統及用於特徵化液體樣本之方法
CN113692529A (zh) 2019-04-25 2021-11-23 粒子监测系统有限公司 用于轴上粒子检测和/或差分检测的粒子检测系统和方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170350801A1 (en) * 2016-06-03 2017-12-07 Particle Measuring Systems, Inc. Systems and methods for isolating condensate in a condensation particle counter
US20180224475A1 (en) * 2017-02-03 2018-08-09 Pentagon Technologies Group, Inc. Modulated Air Surface Particle Detector
TW201905465A (zh) * 2017-06-20 2019-02-01 美商五角科技集團股份有限公司 高解析度表面粒子檢測器

Also Published As

Publication number Publication date
JP7504866B2 (ja) 2024-06-24
TW202028715A (zh) 2020-08-01
JP2024059885A (ja) 2024-05-01
CN112639444A (zh) 2021-04-09
WO2020051131A1 (en) 2020-03-12
KR102920180B1 (ko) 2026-01-29
US20210140867A1 (en) 2021-05-13
JP2021536001A (ja) 2021-12-23
US20200072724A1 (en) 2020-03-05
US10928293B2 (en) 2021-02-23
US11428619B2 (en) 2022-08-30
KR20210052506A (ko) 2021-05-10

Similar Documents

Publication Publication Date Title
TWI728453B (zh) 在生產儀器及表面上偵測奈米粒子
JP7591031B2 (ja) トリガされるサンプリングシステム及び方法
US9696288B2 (en) Attached matter testing device and testing method
EP2450689B1 (en) Sample collecting method and sample collecting apparatus
EP3150994B1 (en) Measurement device and measurement method
EP3150993B1 (en) Measurement device and measurement method
JP6031372B2 (ja) 粒子検出システム及び粒子検出方法
EP1517129A3 (en) Analyzing apparatus and fine particle collecting apparatus
JP2004301749A (ja) 特定薬物の探知方法及び探知装置
US9448155B2 (en) System for sampling and/or analysis of particles in a gaseous environment
US9354153B2 (en) Hand-held trace particle sampling system and method of operating the same
JP6076680B2 (ja) 不溶性不純物判別方法及びその装置
US9744490B1 (en) Trapped vortex particle-to-vapor converter
CN115004007A (zh) 用于成像质谱流式细胞术的等离子体和采样几何结构
JP5993704B2 (ja) 気中液中粒子判別方法及びその装置
WO2014141994A1 (ja) 粒子分析方法及び粒子分析装置
JP2015206669A (ja) 捕集装置、検出装置、清浄装置、捕集方法、検出方法、および、清浄方法
US20250224325A1 (en) Method and system for inspecting a surface
US20180128726A1 (en) Analysis apparatus