JPWO2018066315A1 - 電解処理治具及び電解処理方法 - Google Patents
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- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 15
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- 238000003825 pressing Methods 0.000 description 8
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- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 230000005684 electric field Effects 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
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- 238000005516 engineering process Methods 0.000 description 2
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- 230000004075 alteration Effects 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
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- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/007—Current directing devices
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- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
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- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/10—Agitating of electrolytes; Moving of racks
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- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
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- C25D3/00—Electroplating: Baths therefor
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Abstract
Description
本願は、2016年10月7日に日本国に出願された特願2016−198729号に基づき、優先権を主張し、その内容をここに援用する。
20 電解処理治具
21 基体
22 端子
23 直接電極
24 間接電極
30 直流電源
31 検知部
40 移動機構
46 荷重測定部
60 銅めっき
C 銅イオン
M めっき液
S 硫酸イオン
W ウェハ(半導体ウェハ)
Claims (11)
- 被処理基板に電解処理を行う電解処理治具であって、
平板状の基体と、
前記基体に設けられた電極と、
前記基体に3本以上設けられ、且つ弾性を有し、前記被処理基板の外周部に接触する端子と、
前記端子の少なくとも1本が前記被処理基板に接触したことを電気的に検知する検知部と、を有する、電解処理治具。 - 請求項1に記載の電解処理治具において、
前記検知部は、一の前記端子と他の前記端子の間の抵抗値を測定する。 - 請求項1に記載の電解処理治具において、
前記検知部は、前記端子を流れる電流の有無を検出する。 - 請求項1に記載の電解処理治具において、
前記端子にかかる荷重を測定する荷重測定部をさらに有する。 - 請求項1に記載の電解処理治具において、
前記検知部による検知結果に基づいて、前記被処理基板に対する前記端子の接触が不良であった場合に警告を発する警告部をさらに有する。 - 電解処理治具を用いて被処理基板に電解処理を行う電解処理方法であって、
前記電解処理治具は、
平板状の基体と、
前記基体に設けられた電極と、
前記基体に3本以上設けられ、且つ弾性を有し、前記被処理基板の外周部に接触する端子と、
前記端子の少なくとも1本が前記被処理基板に接触したことを電気的に検知する検知部と、を有し、
前記電解処理方法は、
前記電解処理治具と前記被処理基板を相対的に近づけるように移動させ、前記端子を前記被処理基板に接触させる第1の工程と、
その後、前記電極と前記被処理基板の間に処理液が供給された状態で、前記電極と前記被処理基板の間に電圧を印加して、当該被処理基板に電解処理を行う第2の工程と、を有し、
前記第1の工程において、前記検知部によって前記端子と前記被処理基板の接触を検知する。 - 請求項6に記載の電解処理方法において、
前記第1の工程において、前記検知部によって一の前記端子と他の前記端子の間の抵抗値を測定し、当該測定された抵抗値が所定の抵抗値である場合に、前記端子と前記被処理基板の接触が検知される。 - 請求項6に記載の電解処理方法において、
前記第1の工程において、前記検知部によって前記端子を流れる電流の有無を検出し、当該端子に電流が流れた場合に、前記端子と前記被処理基板の接触が検知される。 - 請求項6に記載の電解処理方法において、
前記電解処理治具は、前記端子にかかる荷重を測定する荷重測定部をさらに有し、
前記第1の工程において、前記荷重測定部によって前記端子にかかる荷重が測定された場合に、1本目の前記端子と前記被処理基板の接触が検知される。 - 請求項6に記載の電解処理方法において、
前記第1の工程において、所定数の前記端子を前記被処理基板に接触させた後、さらに前記電解処理治具と前記被処理基板を相対的に近づけるように所定距離移動させる。 - 請求項6に記載の電解処理方法において、
前記第1の工程において、前記検知部による検知結果に基づいて、前記被処理基板に対する前記端子の接触が不良であった場合に、警告部より警告を発する。
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PCT/JP2017/032675 WO2018066315A1 (ja) | 2016-10-07 | 2017-09-11 | 電解処理治具及び電解処理方法 |
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US6837978B1 (en) * | 1999-04-08 | 2005-01-04 | Applied Materials, Inc. | Deposition uniformity control for electroplating apparatus, and associated method |
US6494219B1 (en) * | 2000-03-22 | 2002-12-17 | Applied Materials, Inc. | Apparatus with etchant mixing assembly for removal of unwanted electroplating deposits |
JP4664320B2 (ja) * | 2000-03-17 | 2011-04-06 | 株式会社荏原製作所 | めっき方法 |
KR100804714B1 (ko) * | 2000-03-17 | 2008-02-18 | 가부시키가이샤 에바라 세이사꾸쇼 | 도금장치 및 방법 |
DE10229005B4 (de) | 2002-06-28 | 2007-03-01 | Advanced Micro Devices, Inc., Sunnyvale | Vorrichtung und Verfahren zur elektrochemischen Metallabscheidung |
JP2004250747A (ja) | 2003-02-20 | 2004-09-09 | Renesas Technology Corp | 半導体装置の製造方法 |
JP2010013680A (ja) * | 2008-07-01 | 2010-01-21 | Nec Electronics Corp | 電気めっき装置、及び電気めっき方法 |
JP2010287648A (ja) * | 2009-06-10 | 2010-12-24 | Seiko Epson Corp | 半導体装置の製造方法 |
JP2013166999A (ja) * | 2012-02-16 | 2013-08-29 | Seiko Epson Corp | 半導体装置の製造方法及び遮蔽板 |
US10234261B2 (en) * | 2013-06-12 | 2019-03-19 | Applied Materials, Inc. | Fast and continuous eddy-current metrology of a conductive film |
JP5826952B2 (ja) * | 2014-01-17 | 2015-12-02 | 株式会社荏原製作所 | めっき方法およびめっき装置 |
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