JPWO2017033915A1 - エッチング液組成物及びエッチング方法 - Google Patents
エッチング液組成物及びエッチング方法 Download PDFInfo
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- C23F1/10—Etching compositions
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- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/18—Acidic compositions for etching copper or alloys thereof
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/44—Compositions for etching metallic material from a metallic material substrate of different composition
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53214—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being aluminium
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53257—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being a refractory metal
Abstract
Description
本発明で使用する基体は、当該エッチングの技術分野で一般に使用されているものを使用することができる。例えば、ガラス、シリコンなどが挙げられる。
表1に示す配合でエッチング液組成物を配合し、実施例組成物No.1〜11を得た。実施例組成物において、表1に示す(A)〜(D)成分を除き残部は水である。
表2に示す配合でエッチング液組成物を配合し、比較組成物1〜3を得た。比較例組成物において、表2に示す(A)〜(D)成分を除き残部は水である。
ガラス基板上にチタン(30nm)、銅(400nm)の順に積層した基体上にポジ型液状レジストを用いて線幅10μm、開口部100μmのレジストパターンを形成した基板を10mm×10mmに切断して小板片を複数枚用意し、これらをテストピースとした。このテストピースに対して銅を所定濃度溶解させた実施例組成物No.1〜13を使用して35℃の条件でディップ法によるパターンエッチングを行った。エッチング処理時間は、各々のエッチング液組成物において、配線間の銅残渣が無くなったことを目視にて確認できた時間だけ実施した。エッチング処理時間はいずれも3分以内であった。
実施例2と同様の方法を用いて、比較組成物1〜3を用いてパターンエッチングを行った。
実施例2及び比較例1によって得られたテストピースについて、該テストピースの上部を光学顕微鏡で確認することで細線が形成させているか確認し、さらにFE−SEMを用いて断面の形状を確認した。
評価に当たり、各エッチング液組成物中の銅濃度を所定濃度としたときにエッチング処理したテストピースを評価した。結果を表3〜5に示す。細線上部の幅よりも細線下部の幅が大きい断面形状となっている場合を○、細線上部の幅よりも細線下部の幅が小さい断面形状となっている場合を×とした。また、配線の片側の細り幅が1.0μm未満である場合を++、1.0μm以上〜2.0μm未満である場合を+、2.0μm以上である場合及び細線を形成できなかった場合を−−とした。
※2:エッチング速度を制御することができず、数秒で被エッチング材の全てが溶解してしまい、配線を形成することができなかった。
Claims (5)
- 基体上に位置し、少なくとも1種のチタン系層及び少なくとも1種の銅系層を含む積層体のチタン系層と銅系層を一括でエッチングするためのエッチング液組成物であって、
(A)過酸化水素0.1〜15質量%;
(B)フッ化物イオン供給源0.01〜1質量%;
(C)下記一般式(I)で表される有機スルホン酸化合物またはその塩を、有機スルホン酸換算で0.1〜20質量%;
(D)アゾール系化合物及び窒素原子を1つ以上含み3つの2重結合を有する複素6員環を構造中に有する化合物から選ばれる少なくとも1種の化合物0.01〜5質量%、及び
(E)水
を含むエッチング液組成物。
- 前記(C)が2−ヒドロキシエタンスルホン酸、ベンゼンスルホン酸及びこれらの塩からなる群から選ばれる少なくとも1種の化合物である、請求項1に記載のエッチング液組成物。
- 前記(D)が1,2,4−トリアゾール、3−アミノ−1H−トリアゾール、1H―テトラゾール、5―メチル−1H―テトラゾール及び5−アミノテトラゾールからなる群から選ばれる少なくとも1つの化合物である、請求項1または2に記載のエッチング液組成物。
- 基体上に位置し、少なくとも1種のチタン系層及び少なくとも1種の銅系層を含む積層体のチタン系層と銅系層を一括でエッチングするためのエッチング方法であって、請求項1〜3のいずれか1項に記載のエッチング液組成物を用いることを含むエッチング方法。
- 請求項1〜3のいずれか1項に記載のエッチング液組成物を用いて、基体上に位置し、少なくとも1種のチタン系層及び少なくとも1種の銅系層を含む積層体である被エッチング材のチタン系層と銅系層を一括でエッチングした後、該エッチング液組成物を再び用いて、別の被エッチング材を一括でエッチングすることを含む、エッチング方法。
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JP2015166964 | 2015-08-26 | ||
JP2015166964 | 2015-08-26 | ||
PCT/JP2016/074475 WO2017033915A1 (ja) | 2015-08-26 | 2016-08-23 | エッチング液組成物及びエッチング方法 |
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JPWO2017033915A1 true JPWO2017033915A1 (ja) | 2018-06-14 |
JP6807845B2 JP6807845B2 (ja) | 2021-01-06 |
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US (1) | US20180237923A1 (ja) |
JP (1) | JP6807845B2 (ja) |
KR (1) | KR102500812B1 (ja) |
CN (1) | CN108028198B (ja) |
TW (1) | TWI700746B (ja) |
WO (1) | WO2017033915A1 (ja) |
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JP6746518B2 (ja) * | 2017-03-10 | 2020-08-26 | 株式会社Adeka | エッチング液組成物及びエッチング方法 |
KR20190027019A (ko) * | 2017-09-04 | 2019-03-14 | 삼성디스플레이 주식회사 | 식각액 조성물 및 이를 이용한 금속 패턴과 박막 트랜지스터 기판 제조 방법 |
SG11202103910PA (en) * | 2018-11-15 | 2021-05-28 | Entegris Inc | Silicon nitride etching composition and method |
CN111719157A (zh) * | 2019-03-20 | 2020-09-29 | 易安爱富科技有限公司 | 蚀刻组合物及利用其的蚀刻方法 |
JP2020202320A (ja) * | 2019-06-12 | 2020-12-17 | 関東化学株式会社 | 過酸化水素分解抑制剤 |
CN111718717A (zh) * | 2020-06-15 | 2020-09-29 | 江苏中德电子材料科技有限公司 | 有源矩阵有机发光二极体用氧化层缓冲蚀刻液的制备方法 |
CN115141629B (zh) * | 2022-06-15 | 2023-06-02 | 湖北兴福电子材料股份有限公司 | TiN去除液 |
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KR100839428B1 (ko) | 2007-05-17 | 2008-06-19 | 삼성에스디아이 주식회사 | 식각액, 및 이를 이용한 박막트랜지스터를 갖는 기판의제조 방법 |
KR101608873B1 (ko) | 2010-03-18 | 2016-04-05 | 삼성디스플레이 주식회사 | 금속 배선 식각액 및 이를 이용한 금속 배선 형성 방법 |
KR101825493B1 (ko) * | 2010-04-20 | 2018-02-06 | 삼성디스플레이 주식회사 | 금속 배선용 식각액 조성물 및 이를 이용한 박막 트랜지스터 표시판의 제조방법 |
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KR102048022B1 (ko) * | 2012-12-18 | 2019-12-02 | 주식회사 동진쎄미켐 | 금속막 식각액 조성물 및 이를 이용한 식각 방법 |
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EP3110982A4 (en) * | 2014-02-25 | 2017-11-22 | Entegris, Inc. | Wet based formulations for the selective removal of noble metals |
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- 2016-08-23 KR KR1020187003340A patent/KR102500812B1/ko active IP Right Grant
- 2016-08-23 US US15/754,020 patent/US20180237923A1/en not_active Abandoned
- 2016-08-23 JP JP2017536436A patent/JP6807845B2/ja active Active
- 2016-08-23 CN CN201680049206.0A patent/CN108028198B/zh active Active
- 2016-08-23 WO PCT/JP2016/074475 patent/WO2017033915A1/ja active Application Filing
- 2016-08-26 TW TW105127504A patent/TWI700746B/zh active
Patent Citations (3)
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JP2001059191A (ja) * | 1999-06-18 | 2001-03-06 | Furontekku:Kk | エッチング剤及びこれを用いた電子機器用基板の製造方法と電子機器 |
WO2010113744A1 (ja) * | 2009-03-30 | 2010-10-07 | 東レ株式会社 | 導電膜除去剤および導電膜除去方法 |
WO2011093445A1 (ja) * | 2010-01-28 | 2011-08-04 | 三菱瓦斯化学株式会社 | 銅/チタン系多層薄膜用エッチング液 |
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CN108028198B (zh) | 2022-10-18 |
US20180237923A1 (en) | 2018-08-23 |
KR102500812B1 (ko) | 2023-02-16 |
KR20180048595A (ko) | 2018-05-10 |
CN108028198A (zh) | 2018-05-11 |
TWI700746B (zh) | 2020-08-01 |
TW201724262A (zh) | 2017-07-01 |
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JP6807845B2 (ja) | 2021-01-06 |
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