JPWO2016185544A1 - 半導体装置および電力変換装置 - Google Patents
半導体装置および電力変換装置 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 52
- 238000006243 chemical reaction Methods 0.000 title description 11
- 210000000746 body region Anatomy 0.000 claims abstract description 54
- 239000010410 layer Substances 0.000 claims description 49
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 37
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 37
- 239000012535 impurity Substances 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 15
- 239000011229 interlayer Substances 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 description 20
- 230000015556 catabolic process Effects 0.000 description 8
- 230000004048 modification Effects 0.000 description 7
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- 239000002184 metal Substances 0.000 description 6
- 229910021332 silicide Inorganic materials 0.000 description 5
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
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- 230000009467 reduction Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
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- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Abstract
Description
上記した以外の課題、構成および効果は、以下の実施の形態の説明により明らかにされる。
次に、本実施例1によるSiC−MOSFETの構造の特徴および効果について説明する。
≪電力変換装置(インバータ)≫
例えば、本発明は、SiC−IGBT構造のパワー半導体装置にも適用可能である。
2 n型ドリフト層
4 p型ボディ領域(ウエル領域)
4A p型領域
5 n+型ソース領域
5A n+型ソース領域
5B n−型ソース領域
6 p+型電位固定領域
7 JFET領域(ドーピング領域)
8 チャネル領域
10 ゲート絶縁膜
11 ゲート電極
12 層間絶縁膜
13 接続孔
14 金属シリサイド層
15 ソース配線用電極
16 金属シリサイド層
17 ドレイン配線用電極
21 制御回路
22 パワーモジュール
23,24,25,26,27,28,29 端子
30 3相モータ
31 SiC−MOSFET
32 外付けの還流ダイオード
33 ボディダイオード
EPI n型エピタキシャル層
GO 開口部
UC 単位セル
Claims (13)
- 炭化珪素からなる第1導電型の基板と、
前記基板の主面上に形成された炭化珪素からなる前記第1導電型のエピタキシャル層と、
第1方向に延在し、前記第1方向と直交する第2方向に互いに離間して、前記エピタキシャル層の上面から前記エピタキシャル層内に形成された、前記第1導電型とは異なる第2導電型の複数のボディ領域と、
前記第1方向に延在し、前記第2方向に互いに隣り合う前記ボディ領域の間に形成された前記第1導電型のJFET領域と、
前記第1方向に延在し、前記ボディ領域の前記第2方向の端部側面と離間して、前記エピタキシャル層の上面から前記ボディ領域内に形成された前記第1導電型のソース領域と、
前記第1方向に延在し、前記ボディ領域の前記第2方向の端部側面と前記ソース領域の前記第2方向の端部側面との間の前記ボディ領域の上層部に形成されたチャネル領域と、
前記チャネル領域に接して形成されたゲート絶縁膜と、
前記ゲート絶縁膜に接して形成されたゲート電極と、
前記ゲート電極を覆うように前記エピタキシャル層の上面上に形成された層間絶縁膜と、
平面視において前記ボディ領域内に位置し、前記第1方向に互いに離間して前記層間絶縁膜に形成された複数の接続孔と、
を有し、
前記第1方向に互いに隣り合う第1の接続孔の底面と第2の接続孔の底面とは、前記ソース領域によって繋がっている、半導体装置。 - 請求項1記載の半導体装置において、
平面視において前記第1の接続孔と前記第2の接続孔との間に前記ゲート電極が形成されている、半導体装置 - 請求項1記載の半導体装置において、
前記エピタキシャル層の上面から前記ボディ領域内に形成された前記第2導電型の電位固定領域、
をさらに有し、
前記電位固定領域は、平面視において前記第1の接続孔の内側および前記第2の接続孔の内側に形成されている、半導体装置。 - 請求項3記載の半導体装置において、
平面視において前記電位固定領域と前記ゲート電極とは重ならない、半導体装置。 - 請求項3記載の半導体装置において、
前記エピタキシャル層の上面から前記ボディ領域内に形成された前記第2導電型の第1領域、
をさらに有し、
前記第1領域は、平面視において前記第1の接続孔と前記第2の接続孔との間に形成されている、半導体装置。 - 請求項5記載の半導体装置において、
前記第1領域の不純物濃度は、前記ボディ領域の不純物濃度と同じである、半導体装置。 - 請求項6記載の半導体装置において、
前記ソース領域は、第1のソース領域と第2のソース領域とから構成され、
前記第1のソース領域は、前記チャネル領域に接して前記第1方向に延在し、前記第2のソース領域は、前記複数の接続孔の底面に露出する、半導体装置。 - 請求項7記載の半導体装置において、
前記複数の接続孔の前記第2方向の両側にそれぞれ形成された前記第1ソース領域は、前記第2ソース領域によって繋がっている、半導体装置。 - 請求項5記載の半導体装置において、
前記第1領域の不純物濃度は、前記電位固定領域の不純物濃度と同じであり、前記第1方向に前記第1領域と前記電位固定領域とが繋がっている、半導体装置。 - 請求項9記載の半導体装置において、
前記ソース領域は、第1のソース領域と第2のソース領域とから構成され、
前記第1のソース領域は、前記チャネル領域に接して前記第1方向に延在し、前記第2のソース領域は、前記複数の接続孔の底面に露出する、半導体装置。 - 請求項10記載の半導体装置において、
前記複数の接続孔の前記第2方向の両側にそれぞれ形成された前記第1ソース領域は、前記第2ソース領域によって繋がっている、半導体装置。 - 請求項10記載の半導体装置において、
前記第2のソース領域の不純物濃度が前記第1のソース領域の不純物濃度よりも高い、半導体装置。 - 請求項1記載の半導体装置を備える、電力変換装置。
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JP (1) | JP6295012B2 (ja) |
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US10269955B2 (en) * | 2017-01-17 | 2019-04-23 | Cree, Inc. | Vertical FET structure |
IT201700073767A1 (it) | 2017-07-05 | 2019-01-05 | St Microelectronics Srl | Dispositivo mosfet di carburo di silicio avente un diodo integrato e relativo processo di fabbricazione |
CN111682069B (zh) * | 2020-06-05 | 2021-04-09 | 南京晟芯半导体有限公司 | 一种SiC金属氧化物半导体场效应晶体管芯片 |
CN117747671A (zh) * | 2024-02-20 | 2024-03-22 | 深圳市威兆半导体股份有限公司 | Sgt mosfet器件及其制备方法 |
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JPH03105978A (ja) * | 1989-09-20 | 1991-05-02 | Hitachi Ltd | 半導体装置 |
JPH08228002A (ja) * | 1994-11-21 | 1996-09-03 | Fuji Electric Co Ltd | Mos型半導体装置およびその製造方法 |
JP2002368215A (ja) * | 2001-06-12 | 2002-12-20 | Fuji Electric Co Ltd | 半導体装置 |
JP2009105110A (ja) * | 2007-10-22 | 2009-05-14 | Toshiba Corp | 半導体素子 |
JP2009158717A (ja) * | 2007-12-26 | 2009-07-16 | Nec Electronics Corp | 縦型電界効果トランジスタ及びその製造方法 |
JP2013239554A (ja) * | 2012-05-15 | 2013-11-28 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
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US5723890A (en) | 1994-01-07 | 1998-03-03 | Fuji Electric Co., Ltd. | MOS type semiconductor device |
DE112010000882B4 (de) | 2009-02-24 | 2015-03-19 | Mitsubishi Electric Corporation | Siliziumkarbid-Halbleitervorrichtung |
JP5481605B2 (ja) * | 2012-03-23 | 2014-04-23 | パナソニック株式会社 | 半導体素子 |
WO2016013182A1 (ja) * | 2014-07-24 | 2016-01-28 | パナソニックIpマネジメント株式会社 | 炭化珪素半導体素子およびその製造方法 |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH03105978A (ja) * | 1989-09-20 | 1991-05-02 | Hitachi Ltd | 半導体装置 |
JPH08228002A (ja) * | 1994-11-21 | 1996-09-03 | Fuji Electric Co Ltd | Mos型半導体装置およびその製造方法 |
JP2002368215A (ja) * | 2001-06-12 | 2002-12-20 | Fuji Electric Co Ltd | 半導体装置 |
JP2009105110A (ja) * | 2007-10-22 | 2009-05-14 | Toshiba Corp | 半導体素子 |
JP2009158717A (ja) * | 2007-12-26 | 2009-07-16 | Nec Electronics Corp | 縦型電界効果トランジスタ及びその製造方法 |
JP2013239554A (ja) * | 2012-05-15 | 2013-11-28 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
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JP6295012B2 (ja) | 2018-03-14 |
US20180090574A1 (en) | 2018-03-29 |
WO2016185544A1 (ja) | 2016-11-24 |
DE112015005384T5 (de) | 2017-10-05 |
US10229974B2 (en) | 2019-03-12 |
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