JPWO2016129138A1 - 撮像素子 - Google Patents
撮像素子 Download PDFInfo
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- JPWO2016129138A1 JPWO2016129138A1 JP2016545952A JP2016545952A JPWO2016129138A1 JP WO2016129138 A1 JPWO2016129138 A1 JP WO2016129138A1 JP 2016545952 A JP2016545952 A JP 2016545952A JP 2016545952 A JP2016545952 A JP 2016545952A JP WO2016129138 A1 JPWO2016129138 A1 JP WO2016129138A1
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- 238000012546 transfer Methods 0.000 claims abstract description 140
- 238000003384 imaging method Methods 0.000 claims abstract description 81
- 239000003990 capacitor Substances 0.000 claims abstract description 64
- 238000009792 diffusion process Methods 0.000 claims abstract description 48
- 238000000926 separation method Methods 0.000 claims description 6
- 239000011159 matrix material Substances 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 description 38
- 238000012545 processing Methods 0.000 description 25
- 230000005540 biological transmission Effects 0.000 description 20
- 238000012986 modification Methods 0.000 description 12
- 230000004048 modification Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 238000005070 sampling Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000000875 corresponding effect Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000001727 in vivo Methods 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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Abstract
Description
〔内視鏡システムの構成〕
図1は、本発明の実施の形態1に係る内視鏡システムの全体構成を模式的に示す図である。図1に示す内視鏡システム1は、内視鏡2と、伝送ケーブル3と、コネクタ部5と、プロセッサ6(処理装置)と、表示装置7と、光源装置8と、を備える。
次に、上述した第1チップ21の詳細な構成について説明する。図3は、図2に示す第1チップ21の詳細な構成を示すブロック図である。図4は、第1チップ21の構成を示す回路図である。
次に、本発明の実施の形態1の変形例1について説明する。図8は、本発明の実施の形態1の変形例1における転送容量を含む位置で切断した第1チップの断面図である。なお、本実施の形態1の変形例1において、上述した実施の形態1に係る内視鏡システム1と同一の構成には同一の符号を付して説明を省略する。
次に、本発明の実施の形態1の変形例2について説明する。図9は、本発明の実施の形態1の変形例2における転送容量を含む位置で切断した第1チップの断面図である。なお、本実施の形態1の変形例2において、上述した実施の形態1に係る内視鏡システム1と同一の構成には同一の符号を付して説明を省略する。
次に、本発明の実施の形態2について説明する。実施の形態2では、第1チップの構成が上述した実施の形態1に係る第1チップ21の構成と異なる。具体的には、本実施の形態2に係る第1チップとして積層型のイメージャチップを用いる。このため、以下においては、本実施の形態2に係る第1チップの構成について説明する。なお、上述した実施の形態1に係る内視鏡システム1と同一の構成には同一の符号を付して説明を省略する。
次に、本発明の実施の形態3について説明する。本実施の形態3では、第1チップとして裏面照射型のイメージャチップを用いる。このため、以下においては、本実施の形態3に係る第1チップの構成について説明する。なお、上述した実施の形態1に係る内視鏡システム1と同一の構成には同一の符号を付して説明を省略する。
2 内視鏡
3 伝送ケーブル
4 操作部
5 コネクタ部
6 プロセッサ
7 表示装置
8 光源装置
20 撮像部
21,21b,21c,21d,21e 第1チップ
22 第2チップ
23 受光部
24 読み出し部
25 タイミング生成部
26,27, バッファ
28 ヒステリシス回路
30 第1の拡散層
31 第2の拡散層
32 分離部材
40,40a 画素チップ
41,41a 回路チップ
42 接続部
43,252a,252d 第1の電極
51 AFE部
52 撮像信号処理部
61 電源部
62 画像信号処理部
230 単位画素
231,232 光電変換素子
233 電荷変換部
234,235 転送トランジスタ
236 電荷変換部リセット部
237 画素ソースフォロアトランジスタ
238 画素出力スイッチ
239 垂直転送線
241 垂直走査部
242,257 定電流源
243 ノイズ除去部
244 列ソースフォロアトランジスタ
245 水平走査部
246 基準電圧生成部
252 転送容量
252b トレンチ
252c 誘電膜
252e 第2の電極
252f 電極
253 クランプスイッチ
254 列選択スイッチ
255 サンプルホールド部
256 水平リセットトランジスタ
258 水平転送線
260 マルチプレクサ
262 サンプルホールドスイッチ
263,294 サンプル容量
264 オペアンプ
291,292 抵抗
293 スイッチ
C100 コンデンサ
Claims (6)
- 二次元マトリクス状に配置され、外部から光を受光し、受光量に応じた撮像信号を生成して出力する複数の画素と、
前記複数の画素の配置における縦ライン毎に設けられ、前記複数の画素の各々から出力される前記撮像信号を転送する複数の第1の転送線と、
前記複数の第1の転送線の各々に設けられ、第1の拡散層に形成された第1の電極を有するトレンチ構造をなす複数のキャパシタと、
前記第1の電極にゲートが接続され、前記撮像信号を増幅する第1のトランジスタと、前記第1の電極にソースが接続され、前記キャパシタを所定の電位にリセットする第2のトランジスタと、を有し、前記複数の第1の転送線の各々に設けられ、第2の拡散層によって前記キャパシタから分離された複数のカラム読み出し回路と、
前記キャパシタを介して前記第1の転送線に接続され、前記第1のトランジスタを介して前記第1の転送線から前記撮像信号を出力させる第3のトランジスタを有し、前記複数のカラム読み出し回路の各々に設けられた複数のカラム走査回路と、
前記第3のトランジスタに接続され、前記第1のトランジスタを介して前記撮像信号を転送する第2の転送線と、
前記第2の転送線に接続され、前記複数の第1の転送線の各々から前記撮像信号を前記第2の転送線へ出力させる定電流源と、
を備えたことを特徴とする撮像素子。 - 前記キャパシタは、
前記第1の拡散層に形成されたトレンチと、
前記トレンチの中に形成された誘電膜と、
を有し、
前記第1の電極は、前記誘電膜の内側に設けられ、
前記第1の転送線は、前記第1の拡散層に接続されていることを特徴とする請求項1に記載の撮像素子。 - 前記キャパシタは、
前記第2の拡散層に形成されたトレンチと、
前記トレンチの中に形成された第2の電極と、
前記第2の電極の中に形成された誘電膜と、
を有し、
前記第1の電極は、前記誘電膜の内側に設けられるとともに、前記誘電膜を挟んで前記第2の電極と対向する位置に設けられ、
前記第1の拡散層は、前記第2の電極および前記第1の転送線それぞれに接続されていることを特徴とする請求項1に記載の撮像素子。 - 前記第1の拡散層と前記第2の拡散層とを分離する分離部材をさらに備えたことを特徴とする請求項1〜3のいずれか一つに記載の撮像素子。
- 前記複数のカラム読み出し回路、前記複数のカラム走査回路、前記第2の転送線および前記定電流源を配置した回路チップと、
前記回路チップに積層され、前記複数の画素、前記複数の第1の転送線および前記複数のキャパシタを配置した画素チップと、
前記第1の電極と前記第1のトランジスタとを接続する接続部と、
を備え、
前記キャパシタは、
前記第1の拡散層に形成されたトレンチと、
前記トレンチの中に形成された誘電膜と、
を有し、
前記第1の電極は、前記誘電膜の内側に設けられるとともに、前記第1の転送線に接続されていることを特徴とする請求項1に記載の撮像素子。 - 前記複数の画素、前記複数の第1の転送線および前記複数のキャパシタを配置した画素チップと、
前記画素チップに積層され、前記複数のカラム読み出し回路、前記複数のカラム走査回路、前記第2の転送線および前記定電流源を配置した回路チップと、
前記第1の電極と前記第1のトランジスタとを接続する接続部と、
を備え、
前記キャパシタは、
前記第1の拡散層に形成されたトレンチと、
前記トレンチの中に形成された誘電膜と、
を有し、
前記第1の電極は、前記誘電膜の内側に形成され、
前記第1の転送線は、前記第1の拡散層に接続されていることを特徴とする請求項1に記載の撮像素子。
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WO2012105259A1 (ja) * | 2011-02-04 | 2012-08-09 | パナソニック株式会社 | 固体撮像装置およびその駆動方法 |
US9213079B2 (en) * | 2012-02-09 | 2015-12-15 | Jdsu Uk Limited | Method and apparatus for geolocating a wireless communication unit |
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JPH04101428A (ja) * | 1990-08-21 | 1992-04-02 | Toshiba Corp | 半導体装置およびその製造方法 |
JPH07161830A (ja) * | 1993-12-03 | 1995-06-23 | Toshiba Corp | 半導体記憶装置及びその製造方法 |
JP5140235B2 (ja) * | 2003-03-19 | 2013-02-06 | 富士通セミコンダクター株式会社 | 半導体装置 |
JP2012054495A (ja) * | 2010-09-03 | 2012-03-15 | Sony Corp | 半導体集積回路、電子機器、固体撮像装置、撮像装置 |
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JP5596888B1 (ja) * | 2013-01-23 | 2014-09-24 | オリンパスメディカルシステムズ株式会社 | 撮像装置、内視鏡システム及びノイズ除去方法 |
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JP6324516B2 (ja) | 2018-05-16 |
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CN107251226A (zh) | 2017-10-13 |
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