JPWO2015194023A1 - パワーモジュール装置及び電力変換装置 - Google Patents
パワーモジュール装置及び電力変換装置 Download PDFInfo
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- JPWO2015194023A1 JPWO2015194023A1 JP2016528741A JP2016528741A JPWO2015194023A1 JP WO2015194023 A1 JPWO2015194023 A1 JP WO2015194023A1 JP 2016528741 A JP2016528741 A JP 2016528741A JP 2016528741 A JP2016528741 A JP 2016528741A JP WO2015194023 A1 JPWO2015194023 A1 JP WO2015194023A1
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 31
- 239000004065 semiconductor Substances 0.000 claims abstract description 248
- 238000001816 cooling Methods 0.000 claims abstract description 68
- 229910052782 aluminium Inorganic materials 0.000 claims description 17
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 17
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 14
- 229910052802 copper Inorganic materials 0.000 claims description 14
- 239000010949 copper Substances 0.000 claims description 14
- 239000003566 sealing material Substances 0.000 claims description 14
- 230000017525 heat dissipation Effects 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 9
- 238000005452 bending Methods 0.000 claims description 8
- 239000002826 coolant Substances 0.000 claims description 5
- 229920001296 polysiloxane Polymers 0.000 abstract description 22
- 239000007788 liquid Substances 0.000 abstract description 13
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 21
- 239000002184 metal Substances 0.000 description 21
- 238000004519 manufacturing process Methods 0.000 description 20
- 229920005989 resin Polymers 0.000 description 15
- 239000011347 resin Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 239000011810 insulating material Substances 0.000 description 8
- 239000004020 conductor Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 4
- 230000007935 neutral effect Effects 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000010485 coping Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4871—Bases, plates or heatsinks
- H01L21/4882—Assembly of heatsink parts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/10—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers
- H01L25/11—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/117—Stacked arrangements of devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
- H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
- H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/156—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
- H02M3/158—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators including plural semiconductor devices as final control devices for a single load
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2089—Modifications to facilitate cooling, ventilating, or heating for power electronics, e.g. for inverters for controlling motor
- H05K7/20927—Liquid coolant without phase change
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2089—Modifications to facilitate cooling, ventilating, or heating for power electronics, e.g. for inverters for controlling motor
- H05K7/20936—Liquid coolant with phase change
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
- H01L23/4012—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws for stacked arrangements of a plurality of semiconductor devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
Description
2 ・・・封止材
3 ・・・外部端子
4 ・・・端子ブロック
5 ・・・ヒートシンク
21 ・・・半導体素子
22 ・・・金属回路
23 ・・・絶縁材
24 ・・・放熱部材
25 ・・・モールド樹脂
26,26a,26b ・・・半導体素子を内蔵する半導体部品の端子
27 ・・・半導体素子を内蔵する半導体部品
28 ・・・内部端子
41 ・・・水路
71 ・・・ケース折り曲げ加工前の薄板
L1 ・・・薄板の折り曲げ寸法
L2 ・・・薄板の折り曲げ寸法
L3 ・・・薄板の折り曲げ寸法
L4 ・・・薄板の折り曲げ寸法
L5 ・・・薄板の折り曲げ寸法
L6 ・・・薄板の折り曲げ寸法
L7 ・・・薄板の折り曲げ寸法
121 ・・・加圧面
122 ・・・加圧力
131 ・・・実施例2のケース
132 ・・・実施例2のケース展開図
161 ・・・ヒートパイプ
171 ・・・ヒートパイプのケースとの接触部
172 ・・・ヒートパイプのパイプ部
173 ・・・ヒートパイプの冷却フィン部
Claims (8)
- 半導体部品と冷却部材を交互に配置することで前記半導体部品を前記冷却部材により両面側から冷却するように構成し、前記半導体部品は複数であり、前記半導体部品は、半導体素子と、前記半導体素子に接続される端子を含み、前記半導体素子の少なくとも一部はスイッチング動作をなすものであり、前記半導体部品と冷却部材を隔離するように板材が成型された一体的なケースを有し、前記ケースは、前記端子を封止材で封止するための延長部を有するものであって、さらに、前記冷却部材を互いに接続する冷却媒体路、あるいは、前記冷却部材に熱的に接続される冷却フィンを有することを特徴とするパワーモジュール装置。
- 請求項1において,前記ケースは、薄板を折り曲げ加工により成型されていることを特徴とするパワーモジュール装置。
- 請求項2において,前記ケースはアルミまたは銅を主成分とすることを特徴とするパワーモジュール装置。
- 請求項1乃至3のいずれかにおいて,前記半導体部品の少なくともいずれかが,前記半導体素子の両主面に放熱部材が配置されることを特徴とするパワーモジュール装置。
- 請求項1から4のいずれかにおいて,前記冷却部材の数が前記半導体部品の数よりも1つ多いことを特徴とするパワーモジュール装置。
- 請求項1乃至5のいずれかにおいて,前記冷却部材がヒートパイプを含むことを特徴とするパワーモジュール装置。
- 請求項1から6のいずれかにおいて,前記前記半導体部品は、前記ケースに形成された窪み部分に配置されることを特徴とするパワーモジュール装置。
- 半導体部品と冷却部材を交互に配置することで前記半導体部品を前記冷却部材により両面側から冷却するように構成し、前記半導体部品は複数であり、前記半導体部品は、半導体素子と、前記半導体素子に接続される端子を含み、前記半導体素子の少なくとも一部はスイッチング動作をなすものであり、前記半導体部品と冷却部材を隔離するように板材が成型された一体的なケースを有し、前記ケースは、前記端子を封止材で封止するための延長部を有するものであって、前記冷却部材を互いに接続する冷却媒体路、あるいは、前記冷却部材に熱的に接続される冷却フィンを有し、前記スイッチング動作を制御することで電力変換することを特徴とする電力変換装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2014/066368 WO2015194023A1 (ja) | 2014-06-20 | 2014-06-20 | パワーモジュール装置及び電力変換装置 |
Publications (2)
Publication Number | Publication Date |
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JPWO2015194023A1 true JPWO2015194023A1 (ja) | 2017-04-20 |
JP6286541B2 JP6286541B2 (ja) | 2018-02-28 |
Family
ID=54935052
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JP2016528741A Active JP6286541B2 (ja) | 2014-06-20 | 2014-06-20 | パワーモジュール装置及び電力変換装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20170084515A1 (ja) |
JP (1) | JP6286541B2 (ja) |
DE (1) | DE112014006604T5 (ja) |
WO (1) | WO2015194023A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6233257B2 (ja) * | 2014-04-15 | 2017-11-22 | トヨタ自動車株式会社 | 電力変換器 |
WO2016189674A1 (ja) * | 2015-05-27 | 2016-12-01 | 株式会社日立製作所 | 電力変換装置 |
JP6635901B2 (ja) * | 2016-09-21 | 2020-01-29 | 本田技研工業株式会社 | 電力変換装置 |
KR101922991B1 (ko) * | 2016-12-23 | 2018-11-28 | 효성중공업 주식회사 | 전력변환장치용 전력소자 냉각장치 |
WO2023250351A2 (en) * | 2022-06-21 | 2023-12-28 | Psemi Corporation | Three-dimensional (3d) packages and methods for 3d packaging |
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JPS60195956A (ja) * | 1984-03-17 | 1985-10-04 | Mitsubishi Electric Corp | 半導体冷却装置 |
JPH0531248U (ja) * | 1991-09-30 | 1993-04-23 | シヤープ株式会社 | 樹脂封止型電力半導体装置 |
US5823249A (en) * | 1997-09-03 | 1998-10-20 | Batchelder; John Samual | Manifold for controlling interdigitated counterstreaming fluid flows |
JP2005026627A (ja) * | 2003-07-03 | 2005-01-27 | Denso Corp | 冷却装置及びこれを備えた電力変換装置 |
JP2005237141A (ja) * | 2004-02-20 | 2005-09-02 | Toyota Motor Corp | インバータおよびインバータの製造方法 |
JP2008271770A (ja) * | 2007-03-27 | 2008-11-06 | Denso Corp | 冷却器及びこれを備えた電力変換装置 |
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JPS5698532A (en) * | 1979-12-31 | 1981-08-08 | Takao Muto | Two-piston engine |
AU640069B2 (en) * | 1991-01-30 | 1993-08-12 | Atofina Chemicals, Inc. | Paint strippers |
JP4193749B2 (ja) * | 2004-04-21 | 2008-12-10 | 株式会社村田製作所 | 巻線型コイル製造方法 |
US8421214B2 (en) * | 2007-10-10 | 2013-04-16 | Vishay General Semiconductor Llc | Semiconductor device and method for manufacturing a semiconductor device |
JP5035626B2 (ja) * | 2008-03-05 | 2012-09-26 | 株式会社デンソー | 電力変換装置 |
JP2011103395A (ja) * | 2009-11-11 | 2011-05-26 | Sumitomo Electric Ind Ltd | 発熱部品の放熱構造及びこの放熱構造を有している回路装置 |
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2014
- 2014-06-20 US US15/312,053 patent/US20170084515A1/en not_active Abandoned
- 2014-06-20 DE DE112014006604.4T patent/DE112014006604T5/de active Pending
- 2014-06-20 WO PCT/JP2014/066368 patent/WO2015194023A1/ja active Application Filing
- 2014-06-20 JP JP2016528741A patent/JP6286541B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60195956A (ja) * | 1984-03-17 | 1985-10-04 | Mitsubishi Electric Corp | 半導体冷却装置 |
JPH0531248U (ja) * | 1991-09-30 | 1993-04-23 | シヤープ株式会社 | 樹脂封止型電力半導体装置 |
US5823249A (en) * | 1997-09-03 | 1998-10-20 | Batchelder; John Samual | Manifold for controlling interdigitated counterstreaming fluid flows |
JP2005026627A (ja) * | 2003-07-03 | 2005-01-27 | Denso Corp | 冷却装置及びこれを備えた電力変換装置 |
JP2005237141A (ja) * | 2004-02-20 | 2005-09-02 | Toyota Motor Corp | インバータおよびインバータの製造方法 |
JP2008271770A (ja) * | 2007-03-27 | 2008-11-06 | Denso Corp | 冷却器及びこれを備えた電力変換装置 |
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JP6286541B2 (ja) | 2018-02-28 |
US20170084515A1 (en) | 2017-03-23 |
DE112014006604T5 (de) | 2017-01-12 |
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