JPWO2010103805A1 - 多層配線基板の製造方法及びそれにより得られる多層配線基板 - Google Patents
多層配線基板の製造方法及びそれにより得られる多層配線基板Info
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- Y10T29/00—Metal working
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T29/49117—Conductor or circuit manufacturing
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Abstract
Description
表1に示した厚さ約100μmのプリプレグ(パナソニック電工(株)製R−1551又は三菱ガス化学(株)製GHPL−830)をそれぞれ用い、実施例1〜3,比較例3では下記の通り予備加熱し、比較例1,2では予備加熱を行わなかった。これらのプリプレグにCO2レーザーを用いて、φ100μm、φ150μmの孔を設け、印刷法により表1に示した導電性ペーストを充填した後、真空プレス機を用いて次の条件でプレスを行った。
温度:30℃→130℃(昇温17分、保持10分)→180℃(昇温24分、保持46分)→30℃(冷却23分)
合金型:タツタ システム・エレクトロニクス(株)製、メタライズペースト(MPシリーズ)
粉体接触型:タツタ システム・エレクトロニクス(株)製、AE1840
上記により得られた多層基板につき、以下の評価を行った。
完成基板の断面を光学顕微鏡で観察し、図6に示す膨れ量(s)を測定し、5μm未満を○、5μm以上を×とした。
φ0.15mmの初期導電性については、200孔、400孔、600孔、800孔連結パターンを作製し、抵抗値を測定した。それらを各孔数で除算し、1孔当たりの抵抗値を求め、その平均値を算出した。200孔、400孔、600孔連結パターン作製はN=6で行い、800孔連結パターン作製はN=2で行った。
作製した任意の連結パターンにおいて試験前に測定した抵抗値をa、試験後に測定した抵抗値をbとして、導電性変化率を次式により求め、導電性変化率が±20%以内であった場合を○、−20%未満又は20%を越えた場合を×とした。
(b−a)×100/a
半田ディップ試験:260℃の半田に10秒間浸漬した後常温大気で冷却するサイクルを3サイクル繰り返した。
プレッシャークッカーテスト(PCT):121℃、湿度100%、2気圧の雰囲気に24時間暴露した。
ヒートサイクル試験:−65℃で30分間保持した後、125℃で30分間保持するサイクルを1000サイクル繰り返す雰囲気に暴露した。
耐熱性試験:100℃の雰囲気で1000時間暴露した。
耐湿性試験:温度85℃、湿度85%の雰囲気で1000時間暴露した。
φ150μmの孔に導電性ペーストを充填し、孔ピッチが0.6mm、0.8mm、1.0mmの3種のピッチとなるように櫛形パターンを作製した。そのパターンに直流電流50Vを印加し、温度85℃、湿度85%で1000時間暴露後、試験雰囲気のまま抵抗値を測定し、その抵抗値が106Ω以上の場合を○、106Ω未満の場合を×とした。
10……コア基板、11……銅箔層、12……スルーホールメッキ
13……導電性ペースト、14……蓋メッキ、15……樹脂層、16……銅箔
Claims (6)
- プリプレグにレーザー加工にてビアホールを設ける穿孔工程と、そのビアホールに樹脂構成成分と金属粉とを含有する導電性ペーストを充填する工程と、その充填された導電性ペーストの上下に銅箔又はパターニングされた基材の銅箔部分を配してプレスする工程とを含む多層基板の製造方法であって、
前記導電性ペーストとして前記金属粉の少なくとも一部が溶融して隣接する金属粉同士が合金化する合金型ペーストを用い、
前記プリプレグとして、60℃から200℃へ昇温する温度プロファイルにおいて貯蔵弾性率が増加から減少に変化する変曲点における貯蔵弾性率をA、減少から増加に変わる変曲点における貯蔵弾性率をBとした場合の比率A/Bが予備加熱前に10以上であるものを用い、
該プリプレグを前記穿孔工程前に予備加熱することにより前記比率A/Bを10未満にする
ことを特徴とする多層配線基板の製造方法。 - 前記プリプレグとして、フェノキシ樹脂、エポキシ樹脂及びビスマレイドトリアジン樹脂のうちの少なくとも1種を含有してなるものを用いることを特徴とする、請求項1に記載の多層配線基板の製造方法。
- 前記予備加熱を80〜140℃で30〜120分間行うことを特徴とする、請求項1又は2に記載の多層配線基板の製造方法。
- 前記導電性ペーストとして以下の組成を有するものを使用することを特徴とする、請求項1〜3のいずれか1項に記載の多層配線基板の製造方法;
(A)アクリレート樹脂モノマー及びエポキシ樹脂プレポリマーを含む樹脂構成成分100重量部に対し、
(B)インジウム単独、又は錫、鉛、ビスマス及びインジウムからなる群から選択された2種以上の合金である融点180℃以下の低融点金属少なくとも1種と、金、銀、銅、及びニッケルからなる群から選択された少なくとも1種の金属及び/又はこの群から選択された2種以上の金属の合金である融点800℃以上の高融点金属とを含む金属粉200〜2200重量部、
(C)フェノール系硬化剤0.3〜35重量部を含む硬化剤0.5〜40重量部、及び
(D)フラックス0.3〜80重量部。 - 請求項1〜4のいずれか1項に記載の製造方法により製造された多層配線基板。
- プリプレグにビアホールを設け、このビアホールに導電性ペーストを充填して、その充填された導電性ペーストの上下に銅箔又はパターニングされた基材の銅箔部分を配してなる多層配線基板であって、
前記プリプレグとして、60℃から200℃へ昇温する温度プロファイルにおいて貯蔵弾性率が増加から減少に変化する変曲点における貯蔵弾性率をA、減少から増加に変わる変曲点における貯蔵弾性率をBとした場合の比率A/Bが10未満であるものを用い、
前記導電性ペーストとして、加熱により相互に合金化する2種以上の金属からなる金属粉を含むものを用いた
ことを特徴とする多層配線基板。
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JP2010525547A JP4778114B2 (ja) | 2009-03-12 | 2010-03-09 | 多層配線基板の製造方法及びそれにより得られる多層配線基板 |
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JP2009059375 | 2009-03-12 | ||
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JP2009171229 | 2009-07-22 | ||
JP2010525547A JP4778114B2 (ja) | 2009-03-12 | 2010-03-09 | 多層配線基板の製造方法及びそれにより得られる多層配線基板 |
PCT/JP2010/001656 WO2010103805A1 (ja) | 2009-03-12 | 2010-03-09 | 多層配線基板の製造方法及びそれにより得られる多層配線基板 |
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JP4778114B2 JP4778114B2 (ja) | 2011-09-21 |
JPWO2010103805A1 true JPWO2010103805A1 (ja) | 2012-09-13 |
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US (2) | US8756805B2 (ja) |
EP (1) | EP2408285B1 (ja) |
JP (1) | JP4778114B2 (ja) |
KR (1) | KR101114058B1 (ja) |
CN (1) | CN102369791B (ja) |
HK (1) | HK1167776A1 (ja) |
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JP5693940B2 (ja) | 2010-12-13 | 2015-04-01 | 株式会社トクヤマ | セラミックスビア基板、メタライズドセラミックスビア基板、これらの製造方法 |
JP4795488B1 (ja) * | 2011-01-18 | 2011-10-19 | パナソニック株式会社 | 配線基板、配線基板の製造方法、及びビアペースト |
KR20130066929A (ko) * | 2011-12-13 | 2013-06-21 | 한국전자통신연구원 | 패턴 형성 조성물 및 이를 이용한 패턴 형성 방법 |
EP2796018A4 (en) * | 2011-12-21 | 2015-08-12 | Satinderpall S Pannu | METHOD FOR PRODUCING ELECTRICAL FEEDING BY EXTRUDED METAL DELIVERIES |
JP6464341B2 (ja) * | 2014-10-30 | 2019-02-06 | 国立研究開発法人産業技術総合研究所 | レーザ照射による金属粉末を用いた金属造形物作成法、そのための形成材料、及び作成された構造体 |
US10263320B2 (en) * | 2015-07-17 | 2019-04-16 | Ohio State Innovation Foundation | Methods of making stretchable and flexible electronics |
WO2018123480A1 (ja) * | 2016-12-28 | 2018-07-05 | タツタ電線株式会社 | 放熱基板、放熱回路構成体、及びその製造方法 |
CN111491458A (zh) * | 2019-01-25 | 2020-08-04 | 鹏鼎控股(深圳)股份有限公司 | 电路板及其制作方法 |
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US4544801A (en) * | 1982-06-28 | 1985-10-01 | International Business Machines Corporation | Circuit board including multiple wire photosensitive adhesive |
JPH04191678A (ja) | 1990-11-27 | 1992-07-09 | Toshiba Corp | 集積回路検査装置 |
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JP2603053B2 (ja) | 1993-10-29 | 1997-04-23 | 松下電器産業株式会社 | ビアホール充填用導体ペースト組成物並びにそれを用いた両面及び多層プリント基板とその製造方法 |
CA2196024A1 (en) * | 1996-02-28 | 1997-08-28 | Craig N. Ernsberger | Multilayer electronic assembly utilizing a sinterable composition and related method of forming |
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JP2002232147A (ja) * | 2001-01-31 | 2002-08-16 | Purintekku:Kk | 多層配線板およびその製造方法 |
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JP2004158651A (ja) * | 2002-11-06 | 2004-06-03 | Murata Mfg Co Ltd | 樹脂基板の製造方法、樹脂多層基板の製造方法、および樹脂基板 |
JP4747707B2 (ja) * | 2004-11-09 | 2011-08-17 | ソニー株式会社 | 多層配線基板及び基板製造方法 |
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WO2006118059A1 (ja) * | 2005-04-27 | 2006-11-09 | Hitachi Chemical Company, Ltd. | 複合体、プリプレグ、金属箔張積層板、回路基板接続材、並びに、多層プリント配線板及びその製造方法 |
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JP5109283B2 (ja) * | 2006-04-20 | 2012-12-26 | パナソニック株式会社 | 回路基板の製造方法 |
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JP2008205111A (ja) * | 2007-02-19 | 2008-09-04 | Fujitsu Ltd | 配線基板および半導体装置、配線基板の製造方法 |
JP4787195B2 (ja) * | 2007-03-26 | 2011-10-05 | 三菱樹脂株式会社 | ビアホール充填用導電性ペースト組成物とそれを用いた多層配線基板 |
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US20120037409A1 (en) | 2012-02-16 |
WO2010103805A1 (ja) | 2010-09-16 |
US8756805B2 (en) | 2014-06-24 |
EP2408285A4 (en) | 2017-11-22 |
KR20110112877A (ko) | 2011-10-13 |
CN102369791B (zh) | 2013-11-13 |
TW201043109A (en) | 2010-12-01 |
JP4778114B2 (ja) | 2011-09-21 |
EP2408285A1 (en) | 2012-01-18 |
CN102369791A (zh) | 2012-03-07 |
HK1167776A1 (en) | 2012-12-07 |
US9420706B2 (en) | 2016-08-16 |
US20140138126A1 (en) | 2014-05-22 |
KR101114058B1 (ko) | 2012-03-13 |
EP2408285B1 (en) | 2018-11-14 |
TWI419633B (zh) | 2013-12-11 |
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