JPWO2010021307A1 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JPWO2010021307A1
JPWO2010021307A1 JP2010525686A JP2010525686A JPWO2010021307A1 JP WO2010021307 A1 JPWO2010021307 A1 JP WO2010021307A1 JP 2010525686 A JP2010525686 A JP 2010525686A JP 2010525686 A JP2010525686 A JP 2010525686A JP WO2010021307 A1 JPWO2010021307 A1 JP WO2010021307A1
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JP
Japan
Prior art keywords
temperature
rotor
temperature sensor
sensor
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010525686A
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English (en)
Japanese (ja)
Inventor
野中　学
学 野中
坂口　祐幸
祐幸 坂口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EDWARDSJAPAN LIMITED
Original Assignee
EDWARDSJAPAN LIMITED
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EDWARDSJAPAN LIMITED filed Critical EDWARDSJAPAN LIMITED
Publication of JPWO2010021307A1 publication Critical patent/JPWO2010021307A1/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/04—Thermometers specially adapted for specific purposes for measuring temperature of moving solid bodies
    • G01K13/08—Thermometers specially adapted for specific purposes for measuring temperature of moving solid bodies in rotary movement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/42—Circuits effecting compensation of thermal inertia; Circuits for predicting the stationary value of a temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2010525686A 2008-08-19 2009-08-17 真空ポンプ Pending JPWO2010021307A1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008211017 2008-08-19
JP2008211017 2008-08-19
PCT/JP2009/064393 WO2010021307A1 (fr) 2008-08-19 2009-08-17 Pompe à vide

Publications (1)

Publication Number Publication Date
JPWO2010021307A1 true JPWO2010021307A1 (ja) 2012-01-26

Family

ID=41707185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010525686A Pending JPWO2010021307A1 (ja) 2008-08-19 2009-08-17 真空ポンプ

Country Status (5)

Country Link
US (1) US20110200460A1 (fr)
EP (1) EP2317148A4 (fr)
JP (1) JPWO2010021307A1 (fr)
KR (1) KR20110044170A (fr)
WO (1) WO2010021307A1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012108087A1 (fr) * 2011-02-10 2012-08-16 エドワーズ株式会社 Pompe à vide
US10342442B2 (en) 2012-08-03 2019-07-09 Volcano Corporation Devices, systems, and methods for assessing a vessel
EP2846043B1 (fr) * 2013-09-09 2020-01-22 Leybold GmbH Calcul de la température du rotor d'une pompe à vide à l'aide du courant ou de la puissance du moteur
US20160144329A1 (en) 2014-11-24 2016-05-26 The Procter & Gamble Company Systems for Encapsulation of Actives within Droplets and other Compartments
US10141815B2 (en) * 2015-01-21 2018-11-27 Siemens Energy, Inc. Variable performance electric generator
JP6583122B2 (ja) * 2016-04-22 2019-10-02 株式会社島津製作所 監視装置および真空ポンプ
GB2553374B (en) 2016-09-06 2021-05-12 Edwards Ltd Temperature sensor for a high speed rotating machine
CN109789253B (zh) * 2016-09-23 2021-08-27 心脏器械股份有限公司 传感器位于壳体表面上的血泵
JP7025844B2 (ja) * 2017-03-10 2022-02-25 エドワーズ株式会社 真空ポンプの排気システム、真空ポンプの排気システムに備わる真空ポンプ、パージガス供給装置、温度センサユニット、および真空ポンプの排気方法
JP6967954B2 (ja) * 2017-12-05 2021-11-17 東京エレクトロン株式会社 排気装置、処理装置及び排気方法
JP7187186B2 (ja) * 2018-06-27 2022-12-12 エドワーズ株式会社 真空ポンプ、ステータコラム、ベースおよび真空ポンプの排気システム
JP7242321B2 (ja) 2019-02-01 2023-03-20 エドワーズ株式会社 真空ポンプ及び真空ポンプの制御装置
JP7336392B2 (ja) * 2020-01-24 2023-08-31 エドワーズ株式会社 真空ポンプおよびステータコラム
JP7463150B2 (ja) * 2020-03-19 2024-04-08 エドワーズ株式会社 真空ポンプ及び真空ポンプ用部品

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
JPH10266991A (ja) * 1997-01-22 1998-10-06 Seiko Seiki Co Ltd ターボ分子ポンプ
JPH1137087A (ja) * 1997-07-24 1999-02-09 Osaka Shinku Kiki Seisakusho:Kk 分子ポンプ
JPH11132186A (ja) * 1997-10-29 1999-05-18 Shimadzu Corp ターボ分子ポンプ
JP2004116319A (ja) * 2002-09-24 2004-04-15 Boc Edwards Technologies Ltd 真空ポンプ

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6419198U (fr) * 1987-07-24 1989-01-31
US5216625A (en) * 1989-11-01 1993-06-01 Luxtron Corporation Autocalibrating dual sensor non-contact temperature measuring device
DE4421065A1 (de) * 1994-06-16 1995-12-21 Raytek Sensorik Gmbh Vorrichtung zur Temperaturmessung
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
JP3125207B2 (ja) * 1995-07-07 2001-01-15 東京エレクトロン株式会社 真空処理装置
JP3767052B2 (ja) * 1996-11-30 2006-04-19 アイシン精機株式会社 多段式真空ポンプ
US6123522A (en) * 1997-07-22 2000-09-26 Koyo Seiko Co., Ltd. Turbo molecular pump
DE19857453B4 (de) * 1998-12-12 2008-03-20 Pfeiffer Vacuum Gmbh Temperaturüberwachung an Rotoren von Vakuumpumpen
US6257001B1 (en) * 1999-08-24 2001-07-10 Lucent Technologies, Inc. Cryogenic vacuum pump temperature sensor
JP2002048088A (ja) * 2000-07-31 2002-02-15 Seiko Instruments Inc 真空ポンプ
DE10151682A1 (de) * 2001-10-19 2003-04-30 Leybold Vakuum Gmbh Verfahren zur Bestimmung eines Wartungsintervalls einer Turbo-Vakuumpumpe
JP4156830B2 (ja) * 2001-12-13 2008-09-24 エドワーズ株式会社 真空ポンプ
JP2003287463A (ja) * 2002-03-28 2003-10-10 Boc Edwards Technologies Ltd 放射温度測定装置及び該放射温度測定装置を搭載したターボ分子ポンプ
US6739840B2 (en) * 2002-05-22 2004-05-25 Applied Materials Inc Speed control of variable speed pump
JP2005320905A (ja) * 2004-05-10 2005-11-17 Boc Edwards Kk 真空ポンプ
JP5045894B2 (ja) * 2006-05-09 2012-10-10 株式会社島津製作所 磁気軸受装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
JPH10266991A (ja) * 1997-01-22 1998-10-06 Seiko Seiki Co Ltd ターボ分子ポンプ
JPH1137087A (ja) * 1997-07-24 1999-02-09 Osaka Shinku Kiki Seisakusho:Kk 分子ポンプ
JPH11132186A (ja) * 1997-10-29 1999-05-18 Shimadzu Corp ターボ分子ポンプ
JP2004116319A (ja) * 2002-09-24 2004-04-15 Boc Edwards Technologies Ltd 真空ポンプ

Also Published As

Publication number Publication date
EP2317148A4 (fr) 2015-03-25
KR20110044170A (ko) 2011-04-28
EP2317148A1 (fr) 2011-05-04
US20110200460A1 (en) 2011-08-18
WO2010021307A1 (fr) 2010-02-25

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