WO2012108087A1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
WO2012108087A1
WO2012108087A1 PCT/JP2011/077208 JP2011077208W WO2012108087A1 WO 2012108087 A1 WO2012108087 A1 WO 2012108087A1 JP 2011077208 W JP2011077208 W JP 2011077208W WO 2012108087 A1 WO2012108087 A1 WO 2012108087A1
Authority
WO
WIPO (PCT)
Prior art keywords
temperature sensor
temperature
spacer
vacuum pump
support portion
Prior art date
Application number
PCT/JP2011/077208
Other languages
English (en)
Japanese (ja)
Inventor
野中　学
岡田　拓也
Original Assignee
エドワーズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エドワーズ株式会社 filed Critical エドワーズ株式会社
Priority to JP2012556753A priority Critical patent/JPWO2012108087A1/ja
Publication of WO2012108087A1 publication Critical patent/WO2012108087A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0246—Surge control by varying geometry within the pumps, e.g. by adjusting vanes

Definitions

  • the present invention relates to a vacuum pump, and more particularly to a vacuum pump provided with a temperature sensor for measuring the temperature of a rotor part in a non-contact manner.
  • Vacuum equipment that is kept in a vacuum by performing exhaust processing using a vacuum pump such as a turbo molecular pump or a thread groove pump, includes a chamber for semiconductor manufacturing equipment, a measurement chamber of an electron microscope, a surface analyzer, There are fine processing equipment.
  • a vacuum pump that realizes this high vacuum environment includes a casing that forms an exterior body having an intake port and an exhaust port. And the structure which makes the said vacuum pump exhibit an exhaust function is accommodated in the inside of this casing.
  • the structure that exhibits the exhaust function is roughly divided into a rotating part (rotor part) that is rotatably supported and a fixed part (stator part) fixed to the casing.
  • the rotating part is composed of a rotating shaft and a rotating body fixed to the rotating shaft, and rotor blades (moving blades) provided radially are arranged in multiple stages on the rotating body. .
  • stator blades stator blades
  • stator blades stator blades
  • a motor for rotating the rotating shaft at high speed is provided, and when the rotating shaft rotates at high speed by the action of this motor, gas is sucked from the intake port due to the interaction between the rotor blade and the stator blade, and from the exhaust port. It is supposed to be discharged.
  • a rotating part such as a rotating blade rotating at high speed is heated to a temperature higher than 100 ° C. and higher than 150 ° C. by exhausting process gas.
  • a temperature higher than 100 ° C. and higher than 150 ° C. by exhausting process gas.
  • the durability of the rotor due to creep phenomenon becomes a problem. Therefore, it is necessary to measure the temperature of the rotor part. Since the rotor rotates at a high speed, the temperature needs to be measured using a non-contact temperature sensor instead of a contact sensor.
  • Patent Document 1 As a method for measuring the temperature of the rotor in a non-contact manner, there is a method proposed in Patent Document 1 below.
  • Patent Document 1 in order to detect the temperature of a measurement object, a contact sensor is used as a non-contact sensor, and the temperature of the measurement object is predicted based on the correlation of the temperature difference between the two temperature sensors.
  • the temperature sensor unit in which the thermistor is fixed to the frame with a thin film is the target of temperature detection.
  • a technique has been proposed in which the rotor column is disposed on the stator column in a state of being opposed to the rotor.
  • Patent Document 1 in which the sensor unit is built in the fixed portion (stator) facing the rotor blade has the following problems.
  • Vacuum pump fixed part (stator column part) with or without a temperature sensor unit (sensor head) installed in a vacuum pump such as a turbo molecular pump or a thread groove pump It is necessary to make a separate.
  • the diameter (inner diameter) of the rotating body changes due to a specification change or the like, the dimension (gap) between the inner diameter of the rotating body to be measured (that is, the inner side of the rotor blade) and the temperature sensor head is accordingly accompanied. Dimensions) are also changed, resulting in a great difference in detection sensitivity.
  • the spacer is a unit that includes an electrical component such as a bearing and a motor, and remodeling to another type leads to a significant cost increase.
  • an object of the present invention is to provide a vacuum pump that does not require separate stator columns in the vacuum pump.
  • the exterior body in which the intake port and the exhaust port are formed, the fixing portion disposed on the inner side surface of the exterior body, and the interior of the exterior body are rotatably supported.
  • the temperature of the rotating body is estimated by using the second temperature detection means, a spacer having a plurality of temperature detection means, and the detected temperatures of the first temperature detection means and the second temperature detection means. And a temperature estimating means for performing a vacuum To provide a pump.
  • the first temperature detection means includes a first temperature sensor and a first temperature sensor support portion that supports the first temperature sensor by including the first temperature sensor.
  • the temperature detecting means is a second temperature sensor disposed on the surface or the inner surface of the spacer, and the temperature estimating means uses the detected temperatures of the first temperature sensor and the second temperature sensor, respectively.
  • the vacuum pump according to claim 1, wherein the temperature of the rotating body is estimated.
  • the first temperature detection means includes a first temperature sensor and a first temperature sensor support portion that supports the first temperature sensor by including the first temperature sensor.
  • the temperature detecting means includes a second temperature sensor and a second temperature sensor support portion that supports the second temperature sensor by including the second temperature sensor, and the temperature estimating means includes the first temperature sensor and the second temperature sensor.
  • the invention according to claim 4 is characterized in that the first temperature sensor support part is made of a material having lower thermal conductivity than the second temperature sensor support part. Provide a vacuum pump.
  • the first temperature sensor support portion has a metal layer formed on a surface thereof.
  • the vacuum pump described in 1. is provided.
  • at least one of the first temperature sensor support part or the second temperature sensor support part is sealed with a sealant after the temperature sensor is inserted.
  • a vacuum pump according to claim 2, claim 3, claim 4, or claim 5 is provided.
  • FIGS. Details of Embodiments Hereinafter, preferred embodiments of the present invention will be described in detail with reference to FIGS.
  • a vacuum pump a so-called composite turbo molecular pump including a turbo molecular pump unit and a thread groove type pump unit will be described.
  • the present embodiment may be applied to a vacuum pump having only one of a turbo molecular pump unit or a thread groove type pump unit, or a vacuum pump in which a thread groove is provided on the rotating body side.
  • FIG. 1 is a diagram showing a schematic configuration example of a turbo molecular pump 1 including a temperature sensor-equipped spacer 100 according to a first embodiment of the present invention.
  • 1 shows a cross-sectional view of the turbo molecular pump 1 in the axial direction.
  • a casing 2 that forms an exterior body of the turbo molecular pump 1 has a substantially cylindrical shape, and constitutes a casing of the turbo molecular pump 1 together with a base 3 provided at a lower portion (exhaust port 6 side) of the casing 2. is doing.
  • the gas transfer mechanism which is a structure which makes the turbo molecular pump 1 exhibit an exhaust function is accommodated.
  • This gas transfer mechanism is roughly divided into a rotating part that is rotatably supported and a fixed part that is fixed to the casing. Further, a control device 80 for controlling the operation of the turbo molecular pump 1 is connected to the outside of the exterior body of the turbo molecular pump 1 through a dedicated line.
  • An inlet 4 for introducing gas into the turbo molecular pump 1 is formed at the end of the casing 2.
  • a flange portion 5 is formed on the end surface of the casing 2 on the intake port 4 side so as to project to the outer peripheral side.
  • the base 3 is formed with an exhaust port 6 for exhausting gas from the turbo molecular pump 1.
  • the rotating part is provided on the shaft 7 which is a rotating shaft, the rotor 8 disposed on the shaft 7, a plurality of rotor blades 9a provided on the rotor 8, and the exhaust port 6 side (screw groove type pump part).
  • the rotor blade cylindrical portion 9b is used.
  • the shaft 7 and the rotor 8 constitute a rotor part.
  • Each rotor blade 9a is composed of blades extending radially from the shaft 7 at a predetermined angle from a plane perpendicular to the axis of the shaft 7.
  • the rotor blade cylindrical portion 9 b is formed of a cylindrical member having a cylindrical shape concentric with the rotation axis of the rotor 8.
  • a motor unit 20 for rotating the shaft 7 at a high speed is provided in the middle of the shaft 7 in the axial direction, and is included in the stator column 10. Further, radial magnetic bearing devices 30 and 31 for supporting the shaft 7 in a radial direction (radial direction) in a non-contact manner on the intake port 4 side and the exhaust port 6 side with respect to the motor portion 20 of the shaft 7. An axial magnetic bearing device 40 is provided at the lower end of the shaft 7 to support the shaft 7 in the axial direction (axial direction) in a non-contact manner.
  • a fixing portion is formed on the inner peripheral side of the housing.
  • the fixed portion includes a plurality of fixed blades 50 provided on the intake port 4 side (turbo molecular pump portion), a thread groove spacer 60 provided on the inner peripheral surface of the casing 2, and the like.
  • Each fixed wing 50 is composed of a blade that is inclined by a predetermined angle from a plane perpendicular to the axis of the shaft 7 and extends from the inner peripheral surface of the housing toward the shaft 7.
  • the fixed wings 50 at each stage are separated and fixed by a spacer 70 having a cylindrical shape.
  • the fixed blades 50 and the rotary blades 9a are alternately arranged and formed in a plurality of stages in the axial direction.
  • a spiral groove is formed on the surface facing the rotor blade cylindrical portion 9b.
  • the thread groove spacer 60 faces the outer peripheral surface of the rotor blade cylindrical portion 9b with a predetermined clearance therebetween.
  • the gas compressed by the turbo molecular pump 1 is transferred to the rotor blade cylindrical portion. It is sent out to the exhaust port 6 side while being guided by a screw groove (spiral groove) with the rotation of 9b. That is, the thread groove is a flow path for transporting gas.
  • the screw groove spacer 60 and the rotor blade cylindrical portion 9b face each other with a predetermined clearance to constitute a gas transfer mechanism that transfers gas through the screw groove.
  • the direction of the spiral groove formed in the thread groove spacer 60 is the direction toward the exhaust port 6 when the gas is transported in the spiral groove in the rotational direction of the rotor 8. Further, the depth of the spiral groove becomes shallower as it approaches the exhaust port 6, and the gas transported through the spiral groove is compressed as it approaches the exhaust port 6. As described above, the gas sucked from the intake port 4 is compressed by the turbo molecular pump unit, and further compressed by the thread groove type pump unit, and discharged from the exhaust port 6.
  • the turbo molecular pump 1 when used for semiconductor manufacturing, there are many processes in which various process gases are applied to a semiconductor substrate in the semiconductor manufacturing process. In addition to evacuating the interior, these process gases are used to evacuate the chamber. Due to the exhaust of these process gases, a rotating part (rotor part) such as a rotating blade rotating at a high speed may become as high as about 150 ° C. exceeding 100 ° C. In the first embodiment, in order to prevent this state, the first temperature sensor head 101 and the second temperature sensor 112 enclosing the first temperature sensor 111 in the spacer 100 with temperature sensor disposed for temperature measurement.
  • the temperature of the rotating part (rotor part) can be measured in a non-contact manner based on signals from the temperature sensors (111, 112).
  • the first temperature sensor head 101 and the second temperature sensor 112 will be described later.
  • the turbo molecular pump 1 configured as described above performs a vacuum evacuation process in a vacuum chamber (not shown) provided in the turbo molecular pump 1.
  • FIG. 2 is a cross-sectional view of the cut surface taken along the line AA in FIG. 1 as viewed from the base 3 side.
  • the temperature sensor-equipped spacer 100 includes a first temperature sensor head 101 (FIG. 4) enclosing a first temperature sensor 111, and a compensation temperature.
  • the spacer is provided with a second temperature sensor 112 as a sensor, and is made of aluminum alloy or stainless steel.
  • the rotor part (rotary blade cylindrical part 9b) and the spacer column 10 in the turbo molecular pump 1 in a state where the rotor part (rotary blade cylindrical part 9b) to be temperature-detected faces (opposite) with a predetermined clearance.
  • the temperature sensor 111 is enclosed, and the temperature sensor-equipped spacer 100 On the outer peripheral surface side, it is opposed to the rotating blade cylindrical portion 9b that is a temperature measurement target (object to be measured) of the temperature sensor 111 in a non-contact manner (that is, with a predetermined clearance), and on the inner peripheral surface side.
  • a temperature sensor head 101 including a temperature sensor support portion 150 that is partially enclosed in a spacer 100 with a temperature sensor and fixes and supports the temperature sensor 111 is disposed.
  • the clearance between the rotor blade cylindrical portion 9b and the temperature sensor support portion 150 is desirably 0.5 mm to 2 mm.
  • the clearance is 1 mm as an example. ing.
  • FIG. 4A is an enlarged view of the portion B in FIG. 1 and shows the appearance of the temperature sensor support portion 150 that constitutes the temperature sensor head 101. Further, FIG.
  • FIG. 4B shows a cross-sectional view taken along the line CC shown in FIG.
  • a temperature sensor 111 is enclosed at the end of the temperature sensor support 150 that faces the rotating blade cylinder 9b, which is the object to be measured.
  • Two lead wires 81 are connected.
  • the lead wire 81 is connected to the signal processing circuit (not shown) of the control device 80 described above.
  • a thermistor element, a thermocouple, a resistance temperature detector, or the like is used for the temperature sensor 111.
  • the temperature sensor head 101 according to the first embodiment is configured so as to be opposed to the rotary blade cylindrical portion 9b, which is an object to be measured.
  • the temperature sensor support 150 is for fixing the temperature sensor 111 to the spacer 100 with temperature sensor, and one end of the temperature sensor support 150 is opposed to the rotating blade cylindrical portion 9b, which is the object to be measured, and The other end is partly enclosed in the spacer 100 with temperature sensor, and is configured to be fixed to the spacer 100 with temperature sensor.
  • the material used for the temperature sensor support 150 according to the first embodiment of the present invention is a material having low thermal conductivity (for example, resin, epoxy resin, PPS (polyphenylene sulfide resin), PEEK (polyether ether ketone). Resin), fluororesin and the like.
  • the temperature sensor support 150 in the first embodiment is cylindrical, but may have other shapes, for example, a square or an ellipse, as long as the above-described configuration can be achieved.
  • the second temperature sensor 112 is attached so as to be in close contact with the spacer 100 with temperature sensor, for example, by adhesion.
  • the size of the spacer 100 with the temperature sensor is changed by the spacer 100 with the temperature sensor that can be retrofitted and encloses the temperature sensor 111 (replacement).
  • FIG. 3 shows a cross-sectional view of the cut surface taken along the line AA in FIG. 1 as seen from the base 3 side, similarly to FIG. 2 described above.
  • the temperature sensor-equipped spacer 100 includes a first temperature sensor head 101 and a second temperature sensor head 102 as a compensation temperature sensor. It is arranged.
  • the second temperature sensor 113 for compensation is not arranged as the sensor (temperature sensor 112) as shown in the first embodiment, It is included in a second temperature sensor head 102 formed in the same shape as the temperature sensor head 101, and is disposed point-symmetrically on the spacer 100 with temperature sensor.
  • the first embodiment it is possible to solve the problem that the adhesion between the second temperature sensor 102 and the temperature sensor-equipped spacer 100 is not stable, and thus the manufacturing process is stabilized. And since it can be simplified, manufacturing cost can be reduced.
  • the first temperature sensor head 101 has a low thermal conductivity as described above for the temperature sensor support 150 (for example, less than 0.5 [w / mK] thermal conductivity).
  • the second sensor head 102 is made of a material having a high thermal conductivity (for example, a thermal conductivity of 15 to 250 [w / mK]).
  • a high thermal conductivity for example, a thermal conductivity of 15 to 250 [w / mK]
  • an aluminum alloy is used as the material having high thermal conductivity.
  • both temperature sensor heads can be manufactured in the same process. The manufacturing process can be simplified.
  • FIG. 5 is a cross-sectional view showing Modification Example 1 of the temperature sensor head 101 and the temperature sensor head 102 according to the first and second embodiments of the present invention.
  • the temperature sensor support unit 150 includes the temperature sensor 111 and the temperature sensor 113. After insertion, it is configured to be sealed with a sealant (filler) 200.
  • a sealant 200 for example, a resin or the like can be used.
  • the periphery of the temperature sensor 111 and the temperature sensor 113 may be hardened with the sealant 200 first, and the hardened temperature sensor 111 and the temperature sensor 113 may be inserted into the temperature sensor support 150.
  • the sealing agent 200 is injected, if the shape of the case used in the first temperature sensor head 101 and the second temperature sensor head 102 is the same, both temperature sensor heads are processed in the same process. Since it can be manufactured, the manufacturing process can be simplified, and as a result, the cost can be reduced.
  • Temperature sensor head modification 2 Next, a configuration in which a metal layer is formed on the first temperature sensor head 101 described above will be described.
  • thermal radiation or radiation, radiation, absorption
  • the rotating body rotary blade cylindrical portion 9b
  • Thermal energy that reaches the object surface in the form of electromagnetic waves from other objects is distributed to a part that transmits the object, a part that is absorbed by the object, and a part that reflects the object.
  • the surface of the temperature sensor support that receives radiation from the rotating body has a low radiation (absorption) rate ( About 0.1) Aluminum alloy and resin with high radiation (absorption) rate (about 0.8). If there is a difference in radiation (absorption) rate in this way, the amount of heat received will be different, resulting in an error in measurement temperature. Will occur. Therefore, in Modification 2 of the first embodiment and the second embodiment of the present invention, a metal layer is formed on the surface of the first temperature sensor head 101 made of a material having low thermal conductivity (such as resin) as described above. . As an example of the method for forming the metal layer, a sputtering method, an electroless nickel plating method, or an electrolytic nickel plating method is effective.
  • metal plating is applied to the surface of the first temperature sensor head 101 manufactured with a material having low thermal conductivity.
  • the first temperature sensor head 101 and the second temperature sensor head 102 are mounted (arranged) on the spacer 100 with the temperature sensor as described above. It is not limited to. For example, the following configuration is also possible.
  • the attachment positions of the first temperature sensor head 101 and the second temperature sensor head 102 do not need to be point-symmetric.
  • the first temperature sensor head 101 and the second temperature sensor head 102 are close to each other. You may make it the structure which each arrange
  • the first temperature sensor head 101 and the second temperature sensor head 102 may be anywhere inside the rotary body of the vacuum pump (turbo molecular pump 1).
  • the inlet 4 in the spacer 100 with temperature sensor It may be mounted (arranged) at a position close to the side.
  • the rotor blade cylindrical portion 9b, the first temperature sensor head 101, and the second temperature sensor head 102 are Although the clearance is set to 1 mm as an example, the clearance does not necessarily need to be 1 mm, and the optimum value (range of optimum value) of the clearance varies depending on the type of the vacuum device provided in the vacuum pump. It is desirable to determine the amount and the pressure range necessary for the vacuum device process.
  • the combination of the first temperature sensor head 101 and the second temperature sensor head 102 disposed in the temperature sensor spacer 100 is not necessarily one by one.
  • the vacuum pump it is possible to cope with a change in the size of the rotor blade by changing the size of the spacer with the temperature sensor.
  • the vacuum pump can be provided, and it is possible to suppress the production of parts, in particular, the increase in the number of parts of the stator column.
  • it is possible to add (retrofit) the function by simply replacing the spacer for various sizes (inner diameters) or types of rotating bodies. As a result, it is possible to add functions to an existing vacuum pump while minimizing component changes and component additions.
  • the second temperature sensor head can make the temperature difference between the sensor element (temperature sensor) and the spacer extremely small by manufacturing the temperature sensor support portion with a material having high thermal conductivity. It can be used as a compensation sensor for measuring the temperature of the attached spacer. Furthermore, if the shape of the temperature sensor support part of the second temperature sensor head is the same as the shape of the temperature sensor support part of the temperature sensor (first temperature sensor head) facing the rotor blade, both temperature sensor heads Can be manufactured by the same process, so that the manufacturing process can be simplified.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

La présente invention concerne une pompe à vide caractérisée en ce qu'il n'est pas nécessaire qu'une colonne de stator soit fabriquée individuellement. Une entretoise, munie d'une première tête à capteur de température comprenant un capteur de température servant à détecter la température de rotors dans une partie porteuse de capteurs de température constituée d'un matériau présentant une faible conductivité thermique et un autre capteur de température servant à détecter la température de l'entretoise, est ensuite disposée entre une colonne de stator et les rotors faisant l'objet d'une mesure de température. Le capteur de température servant à détecter la température de l'entretoise peut être configuré sous la forme d'une deuxième tête à capteur de température comprenant un capteur de température dans une partie porteuse de capteurs de température constituée d'un matériau présentant une conductivité thermique élevée. En outre, la partie porteuse de capteurs de température peut être isolée à l'aide d'un enduit (mastic) après que le capteur de température a été inséré, ou la périphérie de la tête à capteur de température peut être auparavant durcie en présence d'enduit, puis le capteur de température peut être inséré dans la partie porteuse de capteurs de température. De plus, une surface de la première tête à capteur de température constituée du matériau présentant une faible conductivité thermique peut être plaquée.
PCT/JP2011/077208 2011-02-10 2011-11-25 Pompe à vide WO2012108087A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012556753A JPWO2012108087A1 (ja) 2011-02-10 2011-11-25 真空ポンプ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-027045 2011-02-10
JP2011027045 2011-02-10

Publications (1)

Publication Number Publication Date
WO2012108087A1 true WO2012108087A1 (fr) 2012-08-16

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018050548A (ja) * 2016-09-29 2018-04-05 住友ゴム工業株式会社 がん細胞捕捉方法
JP2019129836A (ja) * 2019-03-27 2019-08-08 住友ゴム工業株式会社 がん細胞捕捉方法
KR20190120236A (ko) * 2017-03-10 2019-10-23 에드워즈 가부시키가이샤 진공 펌프의 배기 시스템, 진공 펌프의 배기 시스템에 구비되는 진공 펌프, 퍼지 가스 공급 장치, 온도 센서 유닛, 및 진공 펌프의 배기 방법
US11226330B2 (en) 2018-02-14 2022-01-18 Sumitomo Rubber Industries, Ltd. Method for capturing specific cells
US11360078B2 (en) 2016-09-29 2022-06-14 Sumitomo Rubber Industries, Ltd. Medical analysis device and cell analysis method
US11573232B2 (en) 2018-02-14 2023-02-07 Sumitomo Rubber Industries, Ltd. Method for capturing specific cells
US11614440B2 (en) 2019-01-24 2023-03-28 Sumitomo Rubber Industries, Ltd. Specific cell fractionating and capturing methods

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0577738U (ja) * 1991-01-17 1993-10-22 株式会社芝浦電子製作所 サーミスタ温度センサ
WO2010021307A1 (fr) * 2008-08-19 2010-02-25 エドワーズ株式会社 Pompe à vide

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0577738U (ja) * 1991-01-17 1993-10-22 株式会社芝浦電子製作所 サーミスタ温度センサ
WO2010021307A1 (fr) * 2008-08-19 2010-02-25 エドワーズ株式会社 Pompe à vide

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018050548A (ja) * 2016-09-29 2018-04-05 住友ゴム工業株式会社 がん細胞捕捉方法
US10620186B2 (en) 2016-09-29 2020-04-14 Sumitomo Rubber Industries, Ltd. Method for capturing cancer cells
US11360078B2 (en) 2016-09-29 2022-06-14 Sumitomo Rubber Industries, Ltd. Medical analysis device and cell analysis method
KR20190120236A (ko) * 2017-03-10 2019-10-23 에드워즈 가부시키가이샤 진공 펌프의 배기 시스템, 진공 펌프의 배기 시스템에 구비되는 진공 펌프, 퍼지 가스 공급 장치, 온도 센서 유닛, 및 진공 펌프의 배기 방법
EP3594504A4 (fr) * 2017-03-10 2020-12-16 Edwards Japan Limited Système d'échappement de pompe à vide, pompe à vide devant être fournie à un système d'échappement de pompe à vide, dispositif d'alimentation en gaz de purge, unité de capteur de température et procédé d'échappement de pompe à vide
US11391283B2 (en) 2017-03-10 2022-07-19 Edwards Japan Limited Vacuum pump exhaust system, vacuum pump provided for vacuum pump exhaust system, purge gas supply unit, temperature sensor unit, and exhausting method of vacuum pump
KR102530772B1 (ko) * 2017-03-10 2023-05-10 에드워즈 가부시키가이샤 진공 펌프의 배기 시스템, 진공 펌프의 배기 시스템에 구비되는 진공 펌프, 퍼지 가스 공급 장치, 온도 센서 유닛, 및 진공 펌프의 배기 방법
US11226330B2 (en) 2018-02-14 2022-01-18 Sumitomo Rubber Industries, Ltd. Method for capturing specific cells
US11573232B2 (en) 2018-02-14 2023-02-07 Sumitomo Rubber Industries, Ltd. Method for capturing specific cells
US11614440B2 (en) 2019-01-24 2023-03-28 Sumitomo Rubber Industries, Ltd. Specific cell fractionating and capturing methods
JP2019129836A (ja) * 2019-03-27 2019-08-08 住友ゴム工業株式会社 がん細胞捕捉方法

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