JPWO2008075531A1 - 感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法 - Google Patents
感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法 Download PDFInfo
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- JPWO2008075531A1 JPWO2008075531A1 JP2008550073A JP2008550073A JPWO2008075531A1 JP WO2008075531 A1 JPWO2008075531 A1 JP WO2008075531A1 JP 2008550073 A JP2008550073 A JP 2008550073A JP 2008550073 A JP2008550073 A JP 2008550073A JP WO2008075531 A1 JPWO2008075531 A1 JP WO2008075531A1
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Images
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials For Photolithography (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Polymerisation Methods In General (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
Z1−Z2 (IV)
式(IV)中、Z1及びZ2はそれぞれ独立に下記一般式(V)又は(VI)で表される1価の基を示す。
CH2=C(R36)−COOR37 (VII)
以下の材料を配合し、実施例1〜4及び比較例1〜6の感光性樹脂組成物の溶液を調製した。
<バインダーポリマー>
バインダーポリマー溶液(固形成分:表2に示す固形成分と質量比、溶剤(質量比):メチルセロソルブ/トルエン(3/2)、ポリマー重量平均分子量:30000、固形分酸価:実施例1〜4、比較例1,2,6は196mgKOH/g、比較例3〜5は163mgKOH/g):113g(固形分54g)
なお、ポリマー重量平均分子量は、ゲルパーミエーションクロマトグラフィー(GPC)によって測定し、標準ポリスチレンの検量線を用いて換算することにより算出した。GPCの条件を以下に示す。
ポンプ:日立L−6000型((株)日立製作所製)
カラム:Gelpack GL−R420 + Gelpack GL−R430 + Gelpack GL−R440(計3本)(以上、日立化成工業(株)製、商品名)
溶離液:テトラヒドロフラン
測定温度:40℃
流量:2.05mL/分
検出器:日立L−3300型RI((株)日立製作所製)
<光重合性化合物>
2,2−ビス(4−(メタクリロキシペンタエトキシ)フェニル)プロパン(FA−321M、日立化成工業(株)製):31g
上記一般式(IX)で表される化合物であって、R38及びR39がそれぞれメチル基、m3=6(平均値)、n2+n3=12(平均値)であるビニル化合物(FA−024M、日立化成工業(株)製):15g
<光重合開始剤>
表2に示す光重合開始剤と質量比
(各光重合開始剤の組成は表3〜表5に示す。表3は、TCDM−HABIの組成を示し、表4は、CDM−HABIの組成を示し、表5は、B−CIM(Hampford社製、商品名)の組成を示す。)
<増感色素>
9,10−ジブトキシアントラセン(川崎化成工業(株)製、吸収極大を示す波長[λn]=368nm,388nm,410nm):0.8g
<発色剤>
ロイコクリスタルバイオレット(山田化学(株)製):0.25g
<染料>
マラカイトグリーン(大阪有機化学工業(株)製):0.03g
<溶剤>
アセトン9g
トルエン5g
メタノール5g
得られた各感光性樹脂組成物の溶液を、支持フィルムとなる16μm厚のポリエチレンテレフタレートフィルム(帝人デュポン(株)製、商品名:HTF−01)上に均一に塗布した。その後、70℃及び110℃の熱風対流式乾燥機を用いて乾燥して、乾燥後の膜厚が25μmの感光性樹脂組成物層を形成した。続いて、感光性樹脂組成物層上に保護フィルム(タマポリ(株)製、商品名:NF−15)をロール加圧により積層し、各実施例1〜4及び比較例1〜6に係る感光性エレメントを得た。
続いて、銅箔(厚さ35mm)を両面に積層したガラスエポキシ材である銅張積層板(日立化成工業(株)製、商品名MCL−E−67)の銅表面を#600相当のブラシを持つ研磨機(三啓(株)製)を用いて研磨し、水洗後、空気流で乾燥させ、銅張積層板(基板)を得た。その後、銅張積層板を80℃に加温した後、銅張積層板上に上記各感光性エレメントの保護フィルムを除去しながら、各感光性樹脂組成物層が銅張積層板の表面上に密着するようにして、120℃で4kgf/cm2の圧力下でラミネート(積層)し、試験片を作製した。
<光感度>
各感光性エレメントが積層された銅張積層板を冷却し23℃になった時点で、支持フィルムに、濃度領域0.00〜2.00、濃度ステップ0.05、タブレットの大きさ20mm×187mm、各ステップの大きさが3mm×12mmである41段ステップタブレットを有するフォトツールを密着させた。405nmの青紫色レーザダイオードを光源とする日立ビアメカニクス(株)製直描機DE−1AHを使用して、50mJ/cm2の露光量でフォトツール及び支持フィルムを介して感光性樹脂組成物層に露光(描画)した。なお、照度の測定は405nm対応プローブを適用した紫外線照度計(ウシオ電機(株)製、商品名:「UIT−150」)を用いて行った。
解像度は、解像度評価用ネガとしてライン幅/スペース幅6/6〜30/30(単位:mm)の配線パターンを有するフォトツールを使用し露光した。ここで、解像度は、露光後の現像によって形成されたレジストパターンにおいて、未露光部がきれいに除去された部分におけるライン幅間のスペース幅のうち最も小さい値(単位:μm)を解像度の指標とした。解像度の評価は数値が小さいほど良好な値である。得られた結果を表2に示す。
密着性は、密着性評価用ネガとしてライン幅/スペース幅が6/6〜30/30(単位:μm)の配線パターンを有するフォトツールを使用し露光した。ここで、密着性は、露光後の現像処理によって未露光部をきれいに除去することができ、なおかつラインが蛇行、カケを生じることなく生成されたなどライン幅/スペース幅の最も小さい値(単位:μm)を密着性の指標とした。密着性の評価は数値が小さいほど良好な値である。得られた結果を表2に示す。
現像後のレジスト形状は、走査型電子顕微鏡(商品名:日立走査型電子顕微鏡S−500A)を用いて観察した。レジスト形状は矩形に近いことが望ましい。
スラッジ除去性は、以下の方法で評価した。まず、各感光性エレメントにおける保護フィルムを取り除いた感光性樹脂組成物層0.6m2を1Lの1%Na2CO3水溶液に溶解させ、小型現像スプレー循環器で90分攪拌する。そして、攪拌した溶液をポリ瓶に移して1週間放置した後、ポリ瓶の振とう前後で底にあるスラッジ(堆積物)の流れ具合を比較し、表1に示すように4段階で除去性を判定した。スラッジ除去性は、数値が高いほど除去性が良く、4は完全に除去されたことを意味する。
現像残渣は、現像後のレジストパターン表面を走査型電子顕微鏡(商品名:日立走査型電子顕微鏡S−500A)を用いて、下記のように判定した。現像残渣がほとんどないことが望ましい。
A:小片物が付着したような現像残渣がほとんどない
B:小片物が付着したような現像残渣が若干あり
C:小片物が付着したような現像残渣が多数あり
表2に示されるように、実施例1〜4に係る感光性樹脂組成物は、ステップ段数感度、密着性、解像性、スラッジ除去性及びレジスト形状の全ての評価において良好な結果が得られた。一方で、比較例1〜6に係る感光性樹脂組成物は、ステップ段数感度、密着性、解像性、スラッジ除去性及びレジスト形状の評価うち少なくとも一つの評価において、実施例に比して劣る結果となった。
Claims (7)
- (A)下記一般式(I)で表される2価の基と、下記一般式(II)で表される2価の基と、下記一般式(III)で表される2価の基とを有するバインダーポリマー、
(B)光重合性化合物、及び
(C)炭素数が1〜5のアルコキシ基を一つ以上有するヘキサアリールビイミダゾール化合物を含む光重合開始剤、
を含有する感光性樹脂組成物。
- (D)増感色素をさらに含有する請求項1又は2に記載の感光性樹脂組成物。
- (E)アミン系化合物をさらに含有する請求項1〜3のいずれか一項に記載の感光性樹脂組成物。
- 支持フィルム及び当該支持フィルム上に形成された請求項1〜4のいずれか一項に記載の感光性樹脂組成物を含有する感光性樹脂組成物層を備える感光性エレメント。
- 回路形成用基板上に、請求項1〜4のいずれか一項に記載の感光性樹脂組成物を含有する感光性樹脂組成物層を積層する積層工程、前記感光性樹脂組成物層の所定部分に活性光線を照射して露光部を光硬化する露光工程、及び前記感光性樹脂組成物層が積層された回路形成用基板から前記感光性樹脂組成物層の前記露光部以外の部分を除去する現像工程を有するレジストパターンの形成方法。
- 請求項6記載のレジストパターンの形成方法によりレジストパターンが形成された回路形成用基板をエッチング又はめっきして導体パターンを形成する工程を有するプリント配線板の製造方法。
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CN106918991A (zh) * | 2010-07-13 | 2017-07-04 | 日立化成工业株式会社 | 感光性元件、抗蚀图案的形成方法、印刷电路布线板的制造方法及印刷电路布线板 |
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WO2012014580A1 (ja) * | 2010-07-30 | 2012-02-02 | 日立化成工業株式会社 | 感光性樹脂組成物、並びに、これを用いた感光性エレメント、レジストパターン製造方法、リードフレームの製造方法、プリント配線板、及びプリント配線板の製造方法 |
JP5777461B2 (ja) * | 2011-09-14 | 2015-09-09 | 旭化成イーマテリアルズ株式会社 | 感光性樹脂組成物 |
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WO2008075531A1 (ja) | 2008-06-26 |
KR20120068988A (ko) | 2012-06-27 |
CN101558356A (zh) | 2009-10-14 |
KR20130049836A (ko) | 2013-05-14 |
KR101289569B1 (ko) | 2013-07-24 |
CN101558356B (zh) | 2013-09-25 |
TW200848930A (en) | 2008-12-16 |
KR20090084941A (ko) | 2009-08-05 |
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