JPWO2008004397A1 - 反射鏡の製造装置及びその製造方法 - Google Patents
反射鏡の製造装置及びその製造方法 Download PDFInfo
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- JPWO2008004397A1 JPWO2008004397A1 JP2008523626A JP2008523626A JPWO2008004397A1 JP WO2008004397 A1 JPWO2008004397 A1 JP WO2008004397A1 JP 2008523626 A JP2008523626 A JP 2008523626A JP 2008523626 A JP2008523626 A JP 2008523626A JP WO2008004397 A1 JPWO2008004397 A1 JP WO2008004397A1
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- Prior art keywords
- film
- film forming
- reflecting mirror
- processing chamber
- protective film
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims abstract description 21
- 230000001681 protective effect Effects 0.000 claims abstract description 32
- 238000006116 polymerization reaction Methods 0.000 claims abstract description 21
- 230000008020 evaporation Effects 0.000 claims abstract description 19
- 238000001704 evaporation Methods 0.000 claims abstract description 19
- 238000001883 metal evaporation Methods 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims description 55
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 230000008569 process Effects 0.000 abstract description 10
- 238000004904 shortening Methods 0.000 abstract 1
- 238000009489 vacuum treatment Methods 0.000 abstract 1
- 239000002585 base Substances 0.000 description 21
- 239000007789 gas Substances 0.000 description 17
- 239000000463 material Substances 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 239000000178 monomer Substances 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 239000003570 air Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000004040 coloring Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60Q—ARRANGEMENT OF SIGNALLING OR LIGHTING DEVICES, THE MOUNTING OR SUPPORTING THEREOF OR CIRCUITS THEREFOR, FOR VEHICLES IN GENERAL
- B60Q1/00—Arrangement of optical signalling or lighting devices, the mounting or supporting thereof or circuits therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0808—Mirrors having a single reflecting layer
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Physical Vapour Deposition (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
2 真空槽
4 基体ホルダ
5 真空処理室
6 真空ポンプ
7 ガス源
9 台車
10 基体
12 回転駆動源
13 シール部材
14 蓋体
15 灯具
16 ランプ
17 反射鏡
18 下地膜
19 反射膜
20 着色膜
21 保護膜
22 金属蒸発源
23 色素蒸発源
24 プラズマ重合用電極
Claims (6)
- 基体表面に反射膜、着色膜及び保護膜が所定の順序で成膜されてなる反射鏡の製造装置において、
反射膜成膜用の金属膜形成手段と、
着色膜成膜用の色素膜形成手段と、
保護膜成膜用の保護膜形成手段とが、
ひとつの真空処理室内に配置されていることを特徴とする反射鏡の製造装置。 - 前記金属膜形成手段は金属蒸発源であり、前記色素膜形成手段は色素蒸発源であり、前記保護膜形成手段はプラズマ重合源であることを特徴とする請求の範囲第1項に記載の反射鏡の製造装置。
- 前記真空処理室の内部には、前記金属膜形成手段と、前記色素膜形成手段と、前記保護膜形成手段とを同時に収容するドラム状の基体ホルダが回転可能に設置されており、
前記基体は、前記基体ホルダの内周面に複数支持されていることを特徴とする請求の範囲第1項に記載の反射鏡の製造装置。 - 前記基体ホルダは、前記真空処理室に対して着脱自在に構成されていることを特徴とする請求の範囲第3項に記載の反射鏡の製造装置。
- 基体表面に反射膜、着色膜及び保護膜が所定の順序で成膜されてなる反射鏡の製造方法において、
前記反射膜の形成工程と、前記着色膜の形成工程と、前記保護膜の形成工程とを、共通の真空処理室内で行うことを特徴とする反射鏡の製造方法。 - 前記反射膜の形成工程、前記着色膜の形成工程及び前記保護膜の形成工程では、前記基体を前記真空処理室内で公転させながら複数の基体に同時に成膜することを特徴とする請求の範囲第5項に記載の反射鏡の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008523626A JP5039697B2 (ja) | 2006-07-04 | 2007-06-07 | 反射鏡の製造装置及びその製造方法 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006184018 | 2006-07-04 | ||
JP2006184018 | 2006-07-04 | ||
PCT/JP2007/061528 WO2008004397A1 (fr) | 2006-07-04 | 2007-06-07 | Appareil et procédé pour produire un miroir réfléchissant |
JP2008523626A JP5039697B2 (ja) | 2006-07-04 | 2007-06-07 | 反射鏡の製造装置及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2008004397A1 true JPWO2008004397A1 (ja) | 2009-12-03 |
JP5039697B2 JP5039697B2 (ja) | 2012-10-03 |
Family
ID=38894370
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008523626A Active JP5039697B2 (ja) | 2006-07-04 | 2007-06-07 | 反射鏡の製造装置及びその製造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8221551B2 (ja) |
EP (1) | EP2040098A4 (ja) |
JP (1) | JP5039697B2 (ja) |
KR (1) | KR101044358B1 (ja) |
CN (1) | CN101484830B (ja) |
TW (1) | TWI367349B (ja) |
WO (1) | WO2008004397A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102016106A (zh) * | 2008-04-25 | 2011-04-13 | 株式会社爱发科 | 成膜方法和成膜装置 |
KR101262872B1 (ko) * | 2012-04-17 | 2013-05-09 | (주)알텍테크놀로지스 | 리플렉터 제작 방법 |
US11740532B2 (en) | 2018-12-17 | 2023-08-29 | Viavi Solutions Inc. | Article including light valves |
US11118061B2 (en) * | 2018-12-17 | 2021-09-14 | Viavi Solutions Inc. | Article including at least one metal portion |
US11898248B2 (en) * | 2019-12-18 | 2024-02-13 | Jiangsu Favored Nanotechnology Co., Ltd. | Coating apparatus and coating method |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4565157A (en) * | 1983-03-29 | 1986-01-21 | Genus, Inc. | Method and apparatus for deposition of tungsten silicides |
US5409782A (en) | 1988-05-02 | 1995-04-25 | Orient Watch Company | Composite film |
EP0428358B1 (en) * | 1989-11-13 | 1996-05-15 | Optical Coating Laboratory, Inc. | Geometries and configurations for magnetron sputtering apparatus |
US5215832A (en) * | 1990-04-25 | 1993-06-01 | Cardinal Ic Company | Lead-free mirrors and environmentally safe manufacture thereof |
JPH05132770A (ja) * | 1991-11-11 | 1993-05-28 | Canon Inc | スパツタ装置 |
JP3773320B2 (ja) * | 1997-01-09 | 2006-05-10 | 新明和工業株式会社 | 成膜装置及び成膜方法 |
JP2000017457A (ja) * | 1998-07-03 | 2000-01-18 | Shincron:Kk | 薄膜形成装置および薄膜形成方法 |
JP4704566B2 (ja) * | 1998-10-23 | 2011-06-15 | アベリー・デニソン・コーポレイション | 金属フレークの製造方法 |
US6520650B2 (en) * | 1999-02-08 | 2003-02-18 | Valeo Sylvania L.C.C. | Lamp reflector with a barrier coating of a plasma polymer |
JP2000275422A (ja) * | 1999-03-23 | 2000-10-06 | Toray Ind Inc | 液晶表示装置用基板およびこれを用いた液晶表示装置 |
JP2002363733A (ja) * | 2001-06-04 | 2002-12-18 | Nippon Sheet Glass Co Ltd | 被膜の形成方法 |
JP3908036B2 (ja) | 2002-01-10 | 2007-04-25 | 株式会社小糸製作所 | 反射鏡製造方法及び反射鏡製造装置 |
JP4580636B2 (ja) * | 2003-12-11 | 2010-11-17 | 大日本印刷株式会社 | 成膜装置および成膜方法 |
JP2005310386A (ja) * | 2004-04-16 | 2005-11-04 | Stanley Electric Co Ltd | 車両用灯具の反射鏡 |
CN101027423B (zh) * | 2004-08-30 | 2010-12-01 | 株式会社爱发科 | 成膜装置 |
-
2007
- 2007-06-07 CN CN2007800248166A patent/CN101484830B/zh not_active Expired - Fee Related
- 2007-06-07 WO PCT/JP2007/061528 patent/WO2008004397A1/ja active Application Filing
- 2007-06-07 JP JP2008523626A patent/JP5039697B2/ja active Active
- 2007-06-07 EP EP07744858A patent/EP2040098A4/en not_active Withdrawn
- 2007-06-07 US US12/307,312 patent/US8221551B2/en not_active Expired - Fee Related
- 2007-06-07 KR KR1020087030582A patent/KR101044358B1/ko active IP Right Grant
- 2007-06-12 TW TW096121107A patent/TWI367349B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP2040098A4 (en) | 2011-03-23 |
CN101484830A (zh) | 2009-07-15 |
KR20090009983A (ko) | 2009-01-23 |
WO2008004397A1 (fr) | 2008-01-10 |
KR101044358B1 (ko) | 2011-06-29 |
US20090208664A1 (en) | 2009-08-20 |
CN101484830B (zh) | 2010-12-01 |
TW200807036A (en) | 2008-02-01 |
JP5039697B2 (ja) | 2012-10-03 |
US8221551B2 (en) | 2012-07-17 |
EP2040098A1 (en) | 2009-03-25 |
TWI367349B (en) | 2012-07-01 |
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