TWI367349B - Manufacturing apparatus of reflective mirror and manufacturing method thereof - Google Patents

Manufacturing apparatus of reflective mirror and manufacturing method thereof

Info

Publication number
TWI367349B
TWI367349B TW096121107A TW96121107A TWI367349B TW I367349 B TWI367349 B TW I367349B TW 096121107 A TW096121107 A TW 096121107A TW 96121107 A TW96121107 A TW 96121107A TW I367349 B TWI367349 B TW I367349B
Authority
TW
Taiwan
Prior art keywords
manufacturing
reflective mirror
manufacturing apparatus
reflective
mirror
Prior art date
Application number
TW096121107A
Other languages
English (en)
Other versions
TW200807036A (en
Inventor
Masayuki Iijima
Yosuke Kobayashi
Kouji Hirayama
Yusuke Hashimoto
Ryuji Hamada
Ken Momono
Atsushi Nakatsuka
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of TW200807036A publication Critical patent/TW200807036A/zh
Application granted granted Critical
Publication of TWI367349B publication Critical patent/TWI367349B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60Q—ARRANGEMENT OF SIGNALLING OR LIGHTING DEVICES, THE MOUNTING OR SUPPORTING THEREOF OR CIRCUITS THEREFOR, FOR VEHICLES IN GENERAL
    • B60Q1/00—Arrangement of optical signalling or lighting devices, the mounting or supporting thereof or circuits therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0808—Mirrors having a single reflecting layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Elements Other Than Lenses (AREA)
TW096121107A 2006-07-04 2007-06-12 Manufacturing apparatus of reflective mirror and manufacturing method thereof TWI367349B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006184018 2006-07-04

Publications (2)

Publication Number Publication Date
TW200807036A TW200807036A (en) 2008-02-01
TWI367349B true TWI367349B (en) 2012-07-01

Family

ID=38894370

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096121107A TWI367349B (en) 2006-07-04 2007-06-12 Manufacturing apparatus of reflective mirror and manufacturing method thereof

Country Status (7)

Country Link
US (1) US8221551B2 (zh)
EP (1) EP2040098A4 (zh)
JP (1) JP5039697B2 (zh)
KR (1) KR101044358B1 (zh)
CN (1) CN101484830B (zh)
TW (1) TWI367349B (zh)
WO (1) WO2008004397A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102016106A (zh) * 2008-04-25 2011-04-13 株式会社爱发科 成膜方法和成膜装置
KR101262872B1 (ko) * 2012-04-17 2013-05-09 (주)알텍테크놀로지스 리플렉터 제작 방법
US11118061B2 (en) * 2018-12-17 2021-09-14 Viavi Solutions Inc. Article including at least one metal portion
US11740532B2 (en) 2018-12-17 2023-08-29 Viavi Solutions Inc. Article including light valves
US11898248B2 (en) * 2019-12-18 2024-02-13 Jiangsu Favored Nanotechnology Co., Ltd. Coating apparatus and coating method

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4565157A (en) * 1983-03-29 1986-01-21 Genus, Inc. Method and apparatus for deposition of tungsten silicides
US5409782A (en) * 1988-05-02 1995-04-25 Orient Watch Company Composite film
EP0716160B1 (en) * 1989-11-13 2000-01-26 Optical Coating Laboratory, Inc. Geometries and configurations for magnetron sputtering apparatus
US5215832A (en) 1990-04-25 1993-06-01 Cardinal Ic Company Lead-free mirrors and environmentally safe manufacture thereof
JPH05132770A (ja) * 1991-11-11 1993-05-28 Canon Inc スパツタ装置
JP3773320B2 (ja) * 1997-01-09 2006-05-10 新明和工業株式会社 成膜装置及び成膜方法
JP2000017457A (ja) * 1998-07-03 2000-01-18 Shincron:Kk 薄膜形成装置および薄膜形成方法
DE69913982T2 (de) * 1998-10-23 2004-12-09 Avery Dennison Corp., Pasadena Verfahren zur herstellung von metallplättchen
US6520650B2 (en) 1999-02-08 2003-02-18 Valeo Sylvania L.C.C. Lamp reflector with a barrier coating of a plasma polymer
JP2000275422A (ja) * 1999-03-23 2000-10-06 Toray Ind Inc 液晶表示装置用基板およびこれを用いた液晶表示装置
JP2002363733A (ja) * 2001-06-04 2002-12-18 Nippon Sheet Glass Co Ltd 被膜の形成方法
JP3908036B2 (ja) 2002-01-10 2007-04-25 株式会社小糸製作所 反射鏡製造方法及び反射鏡製造装置
JP4580636B2 (ja) * 2003-12-11 2010-11-17 大日本印刷株式会社 成膜装置および成膜方法
JP2005310386A (ja) 2004-04-16 2005-11-04 Stanley Electric Co Ltd 車両用灯具の反射鏡
KR100927561B1 (ko) * 2004-08-30 2009-11-23 가부시키가이샤 알박 성막 장치

Also Published As

Publication number Publication date
EP2040098A4 (en) 2011-03-23
WO2008004397A1 (fr) 2008-01-10
TW200807036A (en) 2008-02-01
EP2040098A1 (en) 2009-03-25
KR20090009983A (ko) 2009-01-23
CN101484830A (zh) 2009-07-15
CN101484830B (zh) 2010-12-01
JP5039697B2 (ja) 2012-10-03
KR101044358B1 (ko) 2011-06-29
JPWO2008004397A1 (ja) 2009-12-03
US8221551B2 (en) 2012-07-17
US20090208664A1 (en) 2009-08-20

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees