JPWO2006109383A1 - 配線基板を有する電子デバイス、その製造方法、および前記電子デバイスに用いられる配線基板 - Google Patents
配線基板を有する電子デバイス、その製造方法、および前記電子デバイスに用いられる配線基板 Download PDFInfo
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- JPWO2006109383A1 JPWO2006109383A1 JP2007512417A JP2007512417A JPWO2006109383A1 JP WO2006109383 A1 JPWO2006109383 A1 JP WO2006109383A1 JP 2007512417 A JP2007512417 A JP 2007512417A JP 2007512417 A JP2007512417 A JP 2007512417A JP WO2006109383 A1 JPWO2006109383 A1 JP WO2006109383A1
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Abstract
Description
2 配線基板
3a 第1の樹脂層
3b 第2の樹脂層
4、4a、4b 配線
4g、7 グランドパターン
5 半導体チップ
6 バンプ
8 ビアホール
9 ソルダーレジスト
本例では、第1の樹脂層3aとして、融点が250℃の非結晶性の熱可塑性樹脂であるPEIを用いるとともに、第2の樹脂層3bとして、融点が350℃程度の結晶性の熱可塑性樹脂であるLCPを用いた配線基板2に、前述した手順に従って半導体チップ5を搭載した。第2の樹脂層3bを構成するLCPとしては、PEIの融点近傍の温度である250℃における弾性率が0.7GPaのものと1.0GPaのものの2種類用いた。
本例では、第1の樹脂層3aとして、組み合わせ例1で用いたPEIを用いるとともに、第2の樹脂層3bとして、三菱樹脂株式会社製のPEEK系熱可塑性銅張フィルムである「IBUKI」(登録商標)を用いた。「IBUKI」は、結晶性のPEEK材料をベースとしているが、非結晶性樹脂との複合材料とすることで、高温時でも弾性率が低下しにくいという非結晶性樹脂の特性を有し、かつフィラーを含有することにより線膨張係数を低く抑えている。そもそも、ベースとなるPEEK系材料は、融点が300℃を超える高耐熱特性を有している。第1の樹脂層3aに用いたPEIは、「IBUKI」よりも融点が50℃程度低い。そして、PEIの融点においては、「IBUKI」の弾性率は、1GPaよりも高い。
本例では、第1の樹脂層3aとして、熱可塑性樹脂を主成分とし、熱硬化性樹脂を微量添加した樹脂材料である住友ベークライト株式会社製の“IBF−3021”を用いるとともに、第2の樹脂層3bとして、LCPを用いた。“IBF−3021”の実装温度域である200℃〜250℃で“IBF−3021”は溶融し、この温度域において、LCPの弾性率は1GPaよりも高い。
本例では、第1の樹脂層3aとして、組み合わせ例3で用いたのと同じ“IBF−3021”を用いるとともに、第2の樹脂層3bとして、フレキシブル配線基板として広く使用されているポリイミドを用いた。ポリイミドは、非結晶性の熱可塑性樹脂である。“IBF−3021”の実装温度域である200℃〜250℃で“IBF−3021”は溶融し、この温度域において、ポリイミドの弾性率は、1GPaよりも高い。
本発明を適用した電子デバイスとしては、特にデバイスの種類によらず全ての電子デバイス、例えばCPU、ロジック、メモリなどの半導体チップへの適用が可能である。個々の半導体チップを本発明の構造で構成した半導体パッケージとすることにより、従来の半導体パッケージに比べ、前述のとおり、高歩留まり、高信頼性、低コストの小型・薄型パッケージを実現できる。
Claims (40)
- 配線を介して互いに積層された第1の樹脂層と第2の樹脂層とを有する配線基板と、
片面に突起電極が形成された少なくとも一つのチップ部品と、
を有し、
前記チップ部品は、前記第1の樹脂層内に進入し前記突起電極が前記配線と接触することで、前記配線と接続されており、
前記第1の樹脂層は少なくとも1種の熱可塑性樹脂を含み、前記第1の樹脂層の融点での前記第2の樹脂層の弾性率が1GPa以上である電子デバイス。 - 前記第1の樹脂層は、非結晶性樹脂または結晶性樹脂と非結晶性樹脂との複合材料を含む、請求項1に記載の電子デバイス。
- 前記第1の樹脂層は、線膨張係数が前記チップ部品の線膨張係数と前記第2の樹脂層の線膨張係数との間の範囲にある、請求項1に記載の電子デバイス。
- 前記第1の樹脂層の線膨張係数は、前記チップ部品の線膨張係数と前記第2の樹脂層の線膨張係数との中間の値よりも前記チップ部品の線膨張係数に近い、請求項1に記載の電子デバイス。
- 前記第1の樹脂層はフィラーを含有している、請求項1に記載の電子デバイス。
- 前記第1の樹脂層の、前記突起電極が接触している配線がある側の面と反対側の面に、さらに導体パターンが形成されている、請求項1に記載の電子デバイス。
- 前記導体パターンは、前記配線とは別の配線である、請求項6に記載の電子デバイス。
- 前記導体パターンは、グランドパターンである、請求項6に記載の電子デバイス。
- 前記配線基板は、前記第1の樹脂層上にさらに前記配線とは別の配線を介して積層された、熱可塑性樹脂を含む第3の樹脂層を有し、
前記第1の樹脂層は、前記第3の樹脂層の融点で1GPa以上の弾性率を有し、
前記チップ部品とは別の、片面に突起電極が形成されたチップ部品が、前記第3の樹脂層内に進入し前記突起電極が前記別の配線と接触することで前記別の配線と接続されている、請求項1に記載の電子デバイス。 - 前記配線基板は、複数の前記第1の樹脂層を有する、請求項1に記載の電子デバイス。
- 複数の前記第1の樹脂層は互いに接して積層され、前記チップ部品は、前記突起電極が複数の前記第1の樹脂層を貫通した状態で、複数の前記第1の樹脂層に保持されている、請求項10に記載の電子デバイス。
- 2つの前記第1の樹脂層が前記配線基板の表面側および裏面側に形成され、各前記第1の樹脂層に前記チップ部品が保持されている、請求項10に記載の電子デバイス。
- 前記チップ部品を覆う付加的な絶縁層が形成されている、請求項1に記載の電子デバイス。
- 前記絶縁層は、前記配線基板の表面に形成されたコーティング層である、請求項13に記載の電子デバイス。
- 前記第1の樹脂層上に、前記チップ部品が搭載された領域に開口部を有する少なくとも1層の絶縁層が形成されている、請求項1に記載の電子デバイス。
- 前記開口部を有する複数の前記絶縁層が、前記配線とは別の配線を介して積層されている、請求項15に記載の電子デバイス。
- 前記第1の樹脂に保持されたチップ部品と重なる位置にさらに電子部品が搭載されている、請求項1に記載の電子デバイス。
- 前記電子部品はチップ部品またはリード付き部品であり、前記第1の樹脂層上に搭載され、前記第1の樹脂層の上に形成された配線と接続されている、請求項17に記載の電子デバイス。
- 前記電子部品はチップ部品であり、その端子が形成された面を前記第1の樹脂層に保持されたチップ部品の反対側に向け、前記端子が、ボンディングワイヤによって、前記第1の樹脂層上に形成された電極パッドと接続されている、請求項17に記載の電子デバイス。
- 前記第1の樹脂層に複数の前記チップ部品が保持されており、前記第1の樹脂層と前記第2の樹脂層との間の前記配線の一部は、複数の前記チップ部品同士を直接接続している、請求項1に記載の電子デバイス。
- 請求項1に記載の電子デバイスを有する機能モジュール。
- 請求項21に記載の機能モジュールを有する電子機器。
- 請求項1に記載の電子デバイスを有する半導体パッケージであって、前記チップ部品は半導体チップであり、前記電子デバイスと他のデバイスとの電気的接続のための外部接続端子をさらに有する半導体パッケージ。
- 請求項23に記載の半導体パッケージを有する電子機器。
- チップ部品が配線基板に搭載された電子デバイスの製造方法であって、
片面に突起電極が形成されたチップ部品と、配線を介して互いに積層された第1の樹脂層と第2の樹脂層とを有する配線基板であって、前記第1の樹脂層は少なくとも1種の熱可塑性樹脂を含み、前記第1の樹脂層の融点での前記第2の樹脂層の弾性率が1GPa以上である配線基板を用意する工程と、
前記第1の樹脂層の前記チップ部品が搭載される領域を前記第1の樹脂層の融点以上に加熱する工程と、
前記第1の樹脂層の加熱された領域で、前記突起電極が形成された面を前記第1の樹脂層に向けて、前記チップ部品を前記第1の樹脂層に押し込む工程と、
前記チップ部品の突起電極を、前記第1の樹脂層を貫通させて前記配線と接触させる工程と、
前記突起電極と前記配線との接触状態を、前記第1の樹脂層が硬化するまで保持する工程と、
を有する電子デバイスの製造方法。 - 前記第1の樹脂層の前記チップ部品が搭載される領域を加熱する工程は、前記チップ部品を加熱することを含む、請求項25に記載の電子デバイスの製造方法。
- 前記チップ部品および前記配線基板を用意する工程の後に、前記第1の樹脂層の前記チップ部品が搭載される領域にプラズマ処理または紫外線照射処理を行う工程をさらに有し、この工程の後に、前記チップ部品を前記第1の樹脂層に押し込む工程を行う、請求項25に記載の電子デバイスの製造方法。
- 片面に突起電極が形成された少なくとも一つのチップ部品が搭載される配線基板であって、
第1の樹脂層と、
前記第1の樹脂層内に進入した前記チップ部品の前記突起電極が接触する配線を介して前記第1の樹脂層に積層された第2の樹脂層と、
を有し、
前記第1の樹脂層は少なくとも1種の熱可塑性樹脂を含み、前記第1の樹脂層の融点での前記第2の樹脂層の弾性率が1GPa以上である配線基板。 - 前記第1の樹脂層は、非結晶性樹脂または結晶性樹脂と非結晶性樹脂との複合材料を含む、請求項28に記載の配線基板。
- 前記第1の樹脂層は、線膨張係数が前記チップ部品の線膨張係数と前記第2の樹脂層の線膨張係数との間の範囲にある、請求項28に記載の配線基板。
- 前記第1の樹脂層の線膨張係数は、前記チップ部品の線膨張係数と前記第2の樹脂層の線膨張係数との中間の値よりも前記チップ部品の線膨張係数に近い、請求項30に記載の配線基板。
- 前記第1の樹脂層はフィラーを含有している、請求項28に記載の配線基板。
- 前記第1の樹脂層の、前記突起電極が接触する配線がある側の面と反対側の面に、さらに導体パターンが形成されている、請求項28に記載の配線基板。
- 前記導電パターンは、前記配線とは別の配線である、請求項33に記載の配線基板。
- 複数の前記第1の樹脂層を有する、請求項28に記載の配線基板。
- 複数の前記第1の樹脂層は互いに接して積層されている、請求項35に記載の配線基板。
- 複数の前記第1の樹脂層は、前記配線とは別の配線を介して互いに接して積層されている、請求項36に記載の配線基板。
- 2つの前記第1の樹脂層を表面側および裏面側に有する、請求項35に記載の配線基板。
- 前記第1の樹脂層上に、前記チップ部品が搭載される領域に開口部を有する少なくとも1層の絶縁層が形成されている、請求項28に記載の配線基板。
- 前記開口部を有する複数の前記絶縁層が、前記配線とは別の配線を介して積層されている、請求項39に記載の配線基板。
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JP2005108823 | 2005-04-05 | ||
JP2005108823 | 2005-04-05 | ||
PCT/JP2006/304974 WO2006109383A1 (ja) | 2005-04-05 | 2006-03-14 | 配線基板を有する電子デバイス、その製造方法、および前記電子デバイスに用いられる配線基板 |
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US (1) | US20090020870A1 (ja) |
JP (1) | JPWO2006109383A1 (ja) |
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WO (1) | WO2006109383A1 (ja) |
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US20090020870A1 (en) | 2009-01-22 |
CN101567357B (zh) | 2011-05-11 |
WO2006109383A1 (ja) | 2006-10-19 |
CN101567357A (zh) | 2009-10-28 |
CN101156237A (zh) | 2008-04-02 |
CN101156237B (zh) | 2011-01-19 |
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