JPWO2006048931A1 - カラム吸着ヘッドおよびカラム搭載方法 - Google Patents
カラム吸着ヘッドおよびカラム搭載方法 Download PDFInfo
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- 238000001179 sorption measurement Methods 0.000 title claims description 29
- 238000000034 method Methods 0.000 title claims description 16
- 239000000919 ceramic Substances 0.000 claims abstract description 57
- 239000000758 substrate Substances 0.000 claims abstract description 52
- 229910000679 solder Inorganic materials 0.000 description 22
- 230000007547 defect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- SEEZIOZEUUMJME-FOWTUZBSSA-N cannabigerolic acid Chemical compound CCCCCC1=CC(O)=C(C\C=C(/C)CCC=C(C)C)C(O)=C1C(O)=O SEEZIOZEUUMJME-FOWTUZBSSA-N 0.000 description 1
- SEEZIOZEUUMJME-UHFFFAOYSA-N cannabinerolic acid Natural products CCCCCC1=CC(O)=C(CC=C(C)CCC=C(C)C)C(O)=C1C(O)=O SEEZIOZEUUMJME-UHFFFAOYSA-N 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4853—Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67138—Apparatus for wiring semiconductor or solid state device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/303—Surface mounted components, e.g. affixing before soldering, aligning means, spacing means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
- H01R43/20—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for assembling or disassembling contact members with insulating base, case or sleeve
- H01R43/205—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for assembling or disassembling contact members with insulating base, case or sleeve with a panel or printed circuit board
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10227—Other objects, e.g. metallic pieces
- H05K2201/1031—Surface mounted metallic connector elements
- H05K2201/10318—Surface mounted metallic pins
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10227—Other objects, e.g. metallic pieces
- H05K2201/10424—Frame holders
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/08—Treatments involving gases
- H05K2203/082—Suction, e.g. for holding solder balls or components
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Manipulator (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Glass Compositions (AREA)
- Ceramic Products (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
A.セラミック・カラム・グリッド・アレイのセラミック基板の電極と同一位置にある整列穴にカラムが挿入された整列治具を準備する工程:
B.セラミック・カラム・グリッド・アレイのセラミック基板の電極と同一位置に長穴が穿設され、しかも該長穴は底部から吸引可能となっているカラム吸着ヘッドを、前記整列治具の整列穴と長穴とが一致するようにして重ねる工程;
C.カラム吸着ヘッドの長穴底部から吸引して、整列治具の整列穴に挿入されているカラムをカラム吸着ヘッドの長穴に吸込むことにより長穴に挿入する工程;
D.全ての長穴にカラムが挿入されたカラム吸着ヘッドを整列治具から離す工程;
E.全ての長穴にカラムが搭載されたカラム吸着ヘッドを、セラミック基板上に置かれた搭載治具の搭載穴と一致させる工程;
F.カラム吸着ヘッドの吸引を解いてカラムをセラミック基板の電極上に搭載する工程
からなることを特徴とするカラムの搭載方法である。
整列治具10の整列穴11・・・にカラムC・・・を挿入させておく。整列治具へのカラムの挿入は、前述のように整列装置で行う。このようにしてカラムがセラミック基板の電極と一致した状態で縦方に整列された整列治具を準備する。
前述カラム吸着ヘッド1の長穴2・・・と整列治具10の整列穴11とを一致させてカラム吸着ヘッド1を整列治具10の上に重ねる。
カラム吸着ヘッド1を整列治具10上に重ねたならば、吸引パイプ7から吸引室6内の吸引(矢印)を行う。すると吸引室6と連通した各吸引穴5・・・から長穴2・・・内を吸引するため、長穴2・・・と一致した整列治具10の整列穴11・・・内に整列挿入されていたカラムC・・・がカラム吸着ヘッド1の長穴2・・・内に吸込まれる。
カラム吸着ヘッド1の全ての長穴2・・・内にカラムC・・・が吸込まれたならば、カラム吸着ヘッド1を上昇させて整列治具10から離す。
カラムC・・・が長穴2・・・に吸込まれたカラム吸着ヘッド1を図示しない移動装置により搭載治具15上に移動させ、その後、カラム吸着ヘッド1を下降させる。このときカラムはカラム吸着ヘッドから少し突出しているため、該突出部が搭載治具15の搭載穴18・・・内に挿入されるようになる。
カラム吸着ヘッド1の吸引パイプ7からの吸引を解くと、搭載穴18・・・内に挿入されたカラムC・・・は自重で落下し、セラミック基板16上に置かれた搭載治具15の搭載穴18からセラミック基板16上に搭載される。このとき吸引パイプから圧縮空気を送るようにすると、圧縮空気が長穴内にあるカラムを押し出すようになり、カラムの落下をさらに確実にすることもできる。セラミック基板16の電極17・・・上には予めソルダペースト19が塗布されているため、カラムが搭載されたセラミック基板は、リフロー炉のような加熱装置で加熱されると、ソルダペーストが溶融し、カラムCと電極17がはんだ付けされる。
[図2]カラム吸着ヘッドの部分拡大断面図
[図3]カラムを整列穴に整列させた整列治具の説明図
[図4]吸着ヘッドを整列治具に重ねる説明図
[図5]カラムをカラム吸着ヘッドの長穴に吸込む説明図
[図6]カラム吸着ヘッドを整列治具から離す説明図
[図7]カラムを搭載治具の搭載穴に挿入する説明図
[図8]カラムをセラミック基板上に搭載する説明図
[図9]本発明のカラム搭載方法に使用するカラム整列治具の平面図
2 長穴
3 テーパー
4 長穴の底部
5 吸引穴
6 吸引室
7 吸引パイプ
Claims (3)
- セラミック・カラム・グリッド・アレイのセラミック基板電極と同一位置にカラムを挿入することができる長穴が穿設されており、該長穴は底部に長穴の直径よりも小径の吸引穴が穿設されているとともに、該吸引穴は吸引室と連通していて、しかも吸引室には外部と連通した吸引パイプが設置されていることを特徴とするカラム吸着ヘッド。
- 前記長穴の深さは、カラムよりも短くなっていることを特徴とする請求項1記載のカラム吸着ヘッド。
- A.セラミック・カラム・グリッド・アレイのセラミック基板の電極と同一位置にある整列穴にカラムが挿入された整列治具を準備する工程;
B.セラミック・カラム・グリッド・アレイのセラミック基板の電極と同一位置に長穴が穿設され、しかも該長穴は底部から吸引可能となっているカラム吸着ヘッドを、前記整列治具の整列穴と長穴とが一致するようにして重ねる工程;
C.カラム吸着ヘッドの長穴底部から吸引して、整列治具の整列穴に挿入されているカラムをカラム吸着ヘッドの長穴に吸込むことにより長穴に挿入する工程;
D.全ての長穴にカラムが挿入されたカラム吸着ヘッドを整列治具から離す工程;
E.全ての長穴にカラムが搭載されたカラム吸着ヘッドを、セラミック基板上に置かれた搭載治具の搭載穴と一致させる工程;
F.カラム吸着ヘッドの吸引を解いてカラムをセラミック基板の電極上に搭載する工程:
からなることを特徴とするカラムの搭載方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2004/016321 WO2006048931A1 (ja) | 2004-11-04 | 2004-11-04 | カラム吸着ヘッドおよびカラム搭載方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP4059514B2 JP4059514B2 (ja) | 2008-03-12 |
JPWO2006048931A1 true JPWO2006048931A1 (ja) | 2009-05-07 |
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JP2005512258A Active JP4059514B2 (ja) | 2004-11-04 | 2004-11-04 | カラム吸着ヘッドおよびカラム搭載方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US7810772B2 (ja) |
EP (1) | EP1688992B1 (ja) |
JP (1) | JP4059514B2 (ja) |
KR (1) | KR100932144B1 (ja) |
CN (1) | CN100499087C (ja) |
AT (1) | ATE495543T1 (ja) |
DE (1) | DE602004031042D1 (ja) |
TW (1) | TWI371235B (ja) |
WO (1) | WO2006048931A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013051393A (ja) * | 2011-07-29 | 2013-03-14 | Ngk Spark Plug Co Ltd | 部品付き配線基板の製造方法 |
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CA2451951A1 (en) * | 2003-12-03 | 2005-06-03 | Ibm Canada Limited-Ibm Canada Limitee | Apparatus for mounting columns for grid array electronic packages |
KR20100072181A (ko) * | 2007-09-14 | 2010-06-30 | 고쿠리츠 다이가쿠 호진 도호쿠 다이가쿠 | 음극체 및 그것을 사용한 형광관 |
US9283686B2 (en) | 2010-01-22 | 2016-03-15 | Senju Metal Industry Co., Ltd. | Method for manufacturing solder column, apparatus for manufacturing solder column, and solder column |
US8550525B2 (en) * | 2011-06-30 | 2013-10-08 | J.L. Souser & Associates, Inc. | Tool and process for handling pliant comestibles |
CN102569108B (zh) * | 2011-12-27 | 2014-06-18 | 三星半导体(中国)研究开发有限公司 | 焊球贴装工具 |
JP6217101B2 (ja) | 2013-03-22 | 2017-10-25 | 富士電機株式会社 | 半導体装置の製造方法及び取り付け治具 |
US10405434B2 (en) | 2013-03-22 | 2019-09-03 | Fuji Electric Co., Ltd. | Mounting jig for semiconductor device |
CN103258748B (zh) * | 2013-05-16 | 2015-11-04 | 无锡中微高科电子有限公司 | 柱栅阵列陶瓷封装用焊柱的组装方法 |
CN103394842B (zh) * | 2013-07-23 | 2015-05-20 | 中国电子科技集团公司第五十八研究所 | Ccga封装焊柱焊针排列装置 |
CN104779186B (zh) * | 2014-12-31 | 2017-06-13 | 中国航天科技集团公司第五研究院第五一三研究所 | 一种用于ccga芯片植柱工艺的装置 |
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JP7195552B2 (ja) * | 2021-05-19 | 2022-12-26 | 公立大学法人 富山県立大学 | ピン固定方法及びピン固定装置 |
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2004
- 2004-11-04 DE DE602004031042T patent/DE602004031042D1/de active Active
- 2004-11-04 CN CNB2004800021271A patent/CN100499087C/zh active Active
- 2004-11-04 JP JP2005512258A patent/JP4059514B2/ja active Active
- 2004-11-04 US US10/546,574 patent/US7810772B2/en active Active
- 2004-11-04 EP EP04821970A patent/EP1688992B1/en active Active
- 2004-11-04 WO PCT/JP2004/016321 patent/WO2006048931A1/ja active Search and Examination
- 2004-11-04 KR KR1020057011728A patent/KR100932144B1/ko active IP Right Grant
- 2004-11-04 AT AT04821970T patent/ATE495543T1/de not_active IP Right Cessation
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013051393A (ja) * | 2011-07-29 | 2013-03-14 | Ngk Spark Plug Co Ltd | 部品付き配線基板の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2006048931A8 (ja) | 2006-07-13 |
CN100499087C (zh) | 2009-06-10 |
DE602004031042D1 (de) | 2011-02-24 |
EP1688992A4 (en) | 2008-12-17 |
KR20070083240A (ko) | 2007-08-24 |
US20070039998A1 (en) | 2007-02-22 |
EP1688992A1 (en) | 2006-08-09 |
TWI371235B (ja) | 2012-08-21 |
CN1735966A (zh) | 2006-02-15 |
KR100932144B1 (ko) | 2009-12-16 |
JP4059514B2 (ja) | 2008-03-12 |
ATE495543T1 (de) | 2011-01-15 |
WO2006048931A1 (ja) | 2006-05-11 |
EP1688992B1 (en) | 2011-01-12 |
US7810772B2 (en) | 2010-10-12 |
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