WO2006048931A8 - カラム吸着ヘッドおよびカラム搭載方法 - Google Patents

カラム吸着ヘッドおよびカラム搭載方法

Info

Publication number
WO2006048931A8
WO2006048931A8 PCT/JP2004/016321 JP2004016321W WO2006048931A8 WO 2006048931 A8 WO2006048931 A8 WO 2006048931A8 JP 2004016321 W JP2004016321 W JP 2004016321W WO 2006048931 A8 WO2006048931 A8 WO 2006048931A8
Authority
WO
WIPO (PCT)
Prior art keywords
column
columns
suction head
holes
mounting jig
Prior art date
Application number
PCT/JP2004/016321
Other languages
English (en)
French (fr)
Other versions
WO2006048931A1 (ja
Inventor
Isamu Sato
Shinichi Nomoto
Original Assignee
Senju Metal Industry Co
Isamu Sato
Shinichi Nomoto
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Senju Metal Industry Co, Isamu Sato, Shinichi Nomoto filed Critical Senju Metal Industry Co
Priority to PCT/JP2004/016321 priority Critical patent/WO2006048931A1/ja
Priority to JP2005512258A priority patent/JP4059514B2/ja
Priority to AT04821970T priority patent/ATE495543T1/de
Priority to EP04821970A priority patent/EP1688992B1/en
Priority to US10/546,574 priority patent/US7810772B2/en
Priority to CNB2004800021271A priority patent/CN100499087C/zh
Priority to DE602004031042T priority patent/DE602004031042D1/de
Priority to KR1020057011728A priority patent/KR100932144B1/ko
Priority to TW094117329A priority patent/TWI371235B/zh
Publication of WO2006048931A1 publication Critical patent/WO2006048931A1/ja
Publication of WO2006048931A8 publication Critical patent/WO2006048931A8/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/4853—Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67138—Apparatus for wiring semiconductor or solid state device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/303—Surface mounted components, e.g. affixing before soldering, aligning means, spacing means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
    • H01R43/20—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for assembling or disassembling contact members with insulating base, case or sleeve
    • H01R43/205—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for assembling or disassembling contact members with insulating base, case or sleeve with a panel or printed circuit board
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10227—Other objects, e.g. metallic pieces
    • H05K2201/1031—Surface mounted metallic connector elements
    • H05K2201/10318—Surface mounted metallic pins
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10227—Other objects, e.g. metallic pieces
    • H05K2201/10424—Frame holders
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/08—Treatments involving gases
    • H05K2203/082—Suction, e.g. for holding solder balls or components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Manipulator (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Glass Compositions (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Ceramic Products (AREA)
PCT/JP2004/016321 2004-11-04 2004-11-04 カラム吸着ヘッドおよびカラム搭載方法 WO2006048931A1 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
PCT/JP2004/016321 WO2006048931A1 (ja) 2004-11-04 2004-11-04 カラム吸着ヘッドおよびカラム搭載方法
JP2005512258A JP4059514B2 (ja) 2004-11-04 2004-11-04 カラム吸着ヘッドおよびカラム搭載方法
AT04821970T ATE495543T1 (de) 2004-11-04 2004-11-04 Säulensaugkopf
EP04821970A EP1688992B1 (en) 2004-11-04 2004-11-04 Column suction head
US10/546,574 US7810772B2 (en) 2004-11-04 2004-11-04 Column suction-holding head and column mounting method
CNB2004800021271A CN100499087C (zh) 2004-11-04 2004-11-04 柱状物吸附头和柱状物装载方法
DE602004031042T DE602004031042D1 (de) 2004-11-04 2004-11-04 Säulensaugkopf
KR1020057011728A KR100932144B1 (ko) 2004-11-04 2004-11-04 칼럼 흡착 헤드 및 칼럼 탑재방법
TW094117329A TWI371235B (ja) 2004-11-04 2005-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2004/016321 WO2006048931A1 (ja) 2004-11-04 2004-11-04 カラム吸着ヘッドおよびカラム搭載方法

Publications (2)

Publication Number Publication Date
WO2006048931A1 WO2006048931A1 (ja) 2006-05-11
WO2006048931A8 true WO2006048931A8 (ja) 2006-07-13

Family

ID=36318951

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2004/016321 WO2006048931A1 (ja) 2004-11-04 2004-11-04 カラム吸着ヘッドおよびカラム搭載方法

Country Status (9)

Country Link
US (1) US7810772B2 (ja)
EP (1) EP1688992B1 (ja)
JP (1) JP4059514B2 (ja)
KR (1) KR100932144B1 (ja)
CN (1) CN100499087C (ja)
AT (1) ATE495543T1 (ja)
DE (1) DE602004031042D1 (ja)
TW (1) TWI371235B (ja)
WO (1) WO2006048931A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7195552B2 (ja) 2021-05-19 2022-12-26 公立大学法人 富山県立大学 ピン固定方法及びピン固定装置

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CA2451951A1 (en) * 2003-12-03 2005-06-03 Ibm Canada Limited-Ibm Canada Limitee Apparatus for mounting columns for grid array electronic packages
CN101802967B (zh) * 2007-09-14 2013-08-28 国立大学法人东北大学 阴极体以及采用该阴极体的荧光管
KR101267182B1 (ko) 2010-01-22 2013-05-24 센주긴조쿠고교 가부시키가이샤 땜납 칼럼의 제조 방법, 땜납 칼럼의 제조 장치 및 땜납 칼럼
US8550525B2 (en) * 2011-06-30 2013-10-08 J.L. Souser & Associates, Inc. Tool and process for handling pliant comestibles
JP2013051393A (ja) * 2011-07-29 2013-03-14 Ngk Spark Plug Co Ltd 部品付き配線基板の製造方法
CN102569108B (zh) * 2011-12-27 2014-06-18 三星半导体(中国)研究开发有限公司 焊球贴装工具
JP6217101B2 (ja) * 2013-03-22 2017-10-25 富士電機株式会社 半導体装置の製造方法及び取り付け治具
US10405434B2 (en) 2013-03-22 2019-09-03 Fuji Electric Co., Ltd. Mounting jig for semiconductor device
CN103258748B (zh) * 2013-05-16 2015-11-04 无锡中微高科电子有限公司 柱栅阵列陶瓷封装用焊柱的组装方法
CN103394842B (zh) * 2013-07-23 2015-05-20 中国电子科技集团公司第五十八研究所 Ccga封装焊柱焊针排列装置
CN104779186B (zh) * 2014-12-31 2017-06-13 中国航天科技集团公司第五研究院第五一三研究所 一种用于ccga芯片植柱工艺的装置
GB2572016A (en) * 2018-03-16 2019-09-18 Maxwell Wade Colin Vacuum plate
KR20190114330A (ko) * 2018-03-29 2019-10-10 (주)포인트엔지니어링 마이크로 led 전사헤드
US20240121931A1 (en) * 2022-10-05 2024-04-11 Google Llc Methods and Structures for Coupling Thermal Dissipating Elements and Thermal Cooling Structures to Integrated Circuit Dies

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US5261157A (en) * 1991-01-22 1993-11-16 Olin Corporation Assembly of electronic packages by vacuum lamination
US5749614A (en) * 1995-12-04 1998-05-12 Motorola, Inc. Vacuum pickup tool for placing balls in a customized pattern
US5762258A (en) * 1996-07-23 1998-06-09 International Business Machines Corporation Method of making an electronic package having spacer elements
US6230963B1 (en) * 1997-01-28 2001-05-15 Eric L. Hertz Method and apparatus using colored foils for placing conductive preforms
TW524873B (en) * 1997-07-11 2003-03-21 Applied Materials Inc Improved substrate supporting apparatus and processing chamber
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JP3076305B2 (ja) * 1998-06-23 2000-08-14 九州日本電気株式会社 半田ボール搭載装置およびその方法
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JP2000349220A (ja) * 1999-06-04 2000-12-15 Mitsubishi Electric Corp 電極ピン装着装置
US6818545B2 (en) * 2001-03-05 2004-11-16 Megic Corporation Low fabrication cost, fine pitch and high reliability solder bump
US6513802B2 (en) * 2001-03-07 2003-02-04 Tooling Technology Llc Quick change tooling system for a vacuum holding fixture for a thermoformed part
JP4626098B2 (ja) * 2001-06-15 2011-02-02 イビデン株式会社 プリント配線板の製造方法
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JP2004221287A (ja) * 2003-01-15 2004-08-05 Senju Metal Ind Co Ltd カラム吸着治具
CA2451951A1 (en) * 2003-12-03 2005-06-03 Ibm Canada Limited-Ibm Canada Limitee Apparatus for mounting columns for grid array electronic packages
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7195552B2 (ja) 2021-05-19 2022-12-26 公立大学法人 富山県立大学 ピン固定方法及びピン固定装置

Also Published As

Publication number Publication date
EP1688992B1 (en) 2011-01-12
EP1688992A4 (en) 2008-12-17
TWI371235B (ja) 2012-08-21
EP1688992A1 (en) 2006-08-09
JPWO2006048931A1 (ja) 2009-05-07
ATE495543T1 (de) 2011-01-15
KR20070083240A (ko) 2007-08-24
CN1735966A (zh) 2006-02-15
CN100499087C (zh) 2009-06-10
US7810772B2 (en) 2010-10-12
WO2006048931A1 (ja) 2006-05-11
JP4059514B2 (ja) 2008-03-12
KR100932144B1 (ko) 2009-12-16
US20070039998A1 (en) 2007-02-22
DE602004031042D1 (de) 2011-02-24

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