JPS649890A - Apparatus for molecular beam growth - Google Patents

Apparatus for molecular beam growth

Info

Publication number
JPS649890A
JPS649890A JP16569887A JP16569887A JPS649890A JP S649890 A JPS649890 A JP S649890A JP 16569887 A JP16569887 A JP 16569887A JP 16569887 A JP16569887 A JP 16569887A JP S649890 A JPS649890 A JP S649890A
Authority
JP
Japan
Prior art keywords
gas
silane gas
substrate
silane
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16569887A
Other languages
English (en)
Inventor
Hiroyuki Hirayama
Toru Tatsumi
Hisaaki Aizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP16569887A priority Critical patent/JPS649890A/ja
Publication of JPS649890A publication Critical patent/JPS649890A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP16569887A 1987-07-01 1987-07-01 Apparatus for molecular beam growth Pending JPS649890A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16569887A JPS649890A (en) 1987-07-01 1987-07-01 Apparatus for molecular beam growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16569887A JPS649890A (en) 1987-07-01 1987-07-01 Apparatus for molecular beam growth

Publications (1)

Publication Number Publication Date
JPS649890A true JPS649890A (en) 1989-01-13

Family

ID=15817350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16569887A Pending JPS649890A (en) 1987-07-01 1987-07-01 Apparatus for molecular beam growth

Country Status (1)

Country Link
JP (1) JPS649890A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02296797A (ja) * 1989-05-09 1990-12-07 Nec Corp 選択的ボロンドープ層の形成方法
JPH05277557A (ja) * 1992-03-27 1993-10-26 Nippon Steel Corp ストリップ搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02296797A (ja) * 1989-05-09 1990-12-07 Nec Corp 選択的ボロンドープ層の形成方法
JPH05277557A (ja) * 1992-03-27 1993-10-26 Nippon Steel Corp ストリップ搬送装置

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