JPS6487760A - Stainless steel member for semiconductor producing device - Google Patents

Stainless steel member for semiconductor producing device

Info

Publication number
JPS6487760A
JPS6487760A JP24505287A JP24505287A JPS6487760A JP S6487760 A JPS6487760 A JP S6487760A JP 24505287 A JP24505287 A JP 24505287A JP 24505287 A JP24505287 A JP 24505287A JP S6487760 A JPS6487760 A JP S6487760A
Authority
JP
Japan
Prior art keywords
stainless steel
steel member
producing device
semiconductor producing
coating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24505287A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0465144B2 (enrdf_load_stackoverflow
Inventor
Kazuo Fujiwara
Haruo Tomari
Fumihiro Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP24505287A priority Critical patent/JPS6487760A/ja
Publication of JPS6487760A publication Critical patent/JPS6487760A/ja
Publication of JPH0465144B2 publication Critical patent/JPH0465144B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP24505287A 1987-09-28 1987-09-28 Stainless steel member for semiconductor producing device Granted JPS6487760A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24505287A JPS6487760A (en) 1987-09-28 1987-09-28 Stainless steel member for semiconductor producing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24505287A JPS6487760A (en) 1987-09-28 1987-09-28 Stainless steel member for semiconductor producing device

Publications (2)

Publication Number Publication Date
JPS6487760A true JPS6487760A (en) 1989-03-31
JPH0465144B2 JPH0465144B2 (enrdf_load_stackoverflow) 1992-10-19

Family

ID=17127864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24505287A Granted JPS6487760A (en) 1987-09-28 1987-09-28 Stainless steel member for semiconductor producing device

Country Status (1)

Country Link
JP (1) JPS6487760A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02141566A (ja) * 1988-11-21 1990-05-30 Shinko Pantec Co Ltd 超純水製造供給装置用機器配管材料
US5407492A (en) * 1991-02-18 1995-04-18 Osaka Sanso Kogyo Ltd. Process for forming passivated film
WO1995018247A1 (en) * 1993-12-30 1995-07-06 Tadahiro Ohmi Method of forming oxidized passive film, ferrite system stainless steel, fluid feed system and fluid contact component
US6027792A (en) * 1995-10-03 2000-02-22 Kabushiki Kaisha Kobe Seiko Sho Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same
KR100494739B1 (ko) * 2002-06-27 2005-06-13 주식회사 아스플로 크롬 산화 부동태막 표면 처리 방법
KR100494576B1 (ko) * 2002-06-27 2005-06-13 주식회사 아스플로 크롬 산화 부동태막 표면 처리 장치

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6217184A (ja) * 1985-07-12 1987-01-26 Shinko Fuaudoraa Kk ステンレス鋼の表面処理方法
JPS6431956A (en) * 1987-07-25 1989-02-02 Tadahiro Omi Manufacture of stainless steel member for semiconductor-manufacturing equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6217184A (ja) * 1985-07-12 1987-01-26 Shinko Fuaudoraa Kk ステンレス鋼の表面処理方法
JPS6431956A (en) * 1987-07-25 1989-02-02 Tadahiro Omi Manufacture of stainless steel member for semiconductor-manufacturing equipment

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02141566A (ja) * 1988-11-21 1990-05-30 Shinko Pantec Co Ltd 超純水製造供給装置用機器配管材料
US5407492A (en) * 1991-02-18 1995-04-18 Osaka Sanso Kogyo Ltd. Process for forming passivated film
WO1995018247A1 (en) * 1993-12-30 1995-07-06 Tadahiro Ohmi Method of forming oxidized passive film, ferrite system stainless steel, fluid feed system and fluid contact component
US6027792A (en) * 1995-10-03 2000-02-22 Kabushiki Kaisha Kobe Seiko Sho Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same
KR100494739B1 (ko) * 2002-06-27 2005-06-13 주식회사 아스플로 크롬 산화 부동태막 표면 처리 방법
KR100494576B1 (ko) * 2002-06-27 2005-06-13 주식회사 아스플로 크롬 산화 부동태막 표면 처리 장치

Also Published As

Publication number Publication date
JPH0465144B2 (enrdf_load_stackoverflow) 1992-10-19

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