JPH0465144B2 - - Google Patents

Info

Publication number
JPH0465144B2
JPH0465144B2 JP62245052A JP24505287A JPH0465144B2 JP H0465144 B2 JPH0465144 B2 JP H0465144B2 JP 62245052 A JP62245052 A JP 62245052A JP 24505287 A JP24505287 A JP 24505287A JP H0465144 B2 JPH0465144 B2 JP H0465144B2
Authority
JP
Japan
Prior art keywords
stainless steel
oxide film
gas
release resistance
gas release
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62245052A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6487760A (en
Inventor
Kazuo Fujiwara
Haruo Tomari
Fumihiro Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP24505287A priority Critical patent/JPS6487760A/ja
Publication of JPS6487760A publication Critical patent/JPS6487760A/ja
Publication of JPH0465144B2 publication Critical patent/JPH0465144B2/ja
Granted legal-status Critical Current

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  • Chemical Vapour Deposition (AREA)
JP24505287A 1987-09-28 1987-09-28 Stainless steel member for semiconductor producing device Granted JPS6487760A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24505287A JPS6487760A (en) 1987-09-28 1987-09-28 Stainless steel member for semiconductor producing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24505287A JPS6487760A (en) 1987-09-28 1987-09-28 Stainless steel member for semiconductor producing device

Publications (2)

Publication Number Publication Date
JPS6487760A JPS6487760A (en) 1989-03-31
JPH0465144B2 true JPH0465144B2 (enrdf_load_stackoverflow) 1992-10-19

Family

ID=17127864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24505287A Granted JPS6487760A (en) 1987-09-28 1987-09-28 Stainless steel member for semiconductor producing device

Country Status (1)

Country Link
JP (1) JPS6487760A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2862546B2 (ja) * 1988-11-21 1999-03-03 神鋼パンテック株式会社 超純水製造供給装置用機器配管材料
JP3017301B2 (ja) * 1991-02-18 2000-03-06 大阪酸素工業株式会社 不動態膜の形成方法
JP3576598B2 (ja) * 1993-12-30 2004-10-13 忠弘 大見 酸化不動態膜の形成方法及びフェライト系ステンレス鋼並びに流体供給システム及び接流体部品
US6027792A (en) * 1995-10-03 2000-02-22 Kabushiki Kaisha Kobe Seiko Sho Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same
KR100494576B1 (ko) * 2002-06-27 2005-06-13 주식회사 아스플로 크롬 산화 부동태막 표면 처리 장치
KR100494739B1 (ko) * 2002-06-27 2005-06-13 주식회사 아스플로 크롬 산화 부동태막 표면 처리 방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6217184A (ja) * 1985-07-12 1987-01-26 Shinko Fuaudoraa Kk ステンレス鋼の表面処理方法
JP2517727B2 (ja) * 1987-07-25 1996-07-24 忠弘 大見 半導体製造装置用ステンレス鋼部材の製造方法

Also Published As

Publication number Publication date
JPS6487760A (en) 1989-03-31

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