JPS6487760A - Stainless steel member for semiconductor producing device - Google Patents
Stainless steel member for semiconductor producing deviceInfo
- Publication number
- JPS6487760A JPS6487760A JP24505287A JP24505287A JPS6487760A JP S6487760 A JPS6487760 A JP S6487760A JP 24505287 A JP24505287 A JP 24505287A JP 24505287 A JP24505287 A JP 24505287A JP S6487760 A JPS6487760 A JP S6487760A
- Authority
- JP
- Japan
- Prior art keywords
- stainless steel
- steel member
- producing device
- semiconductor producing
- coating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To improve the gas release resistance of a stainless steel member by electropolishing the surface of the member and heating the member in the air to form an amorphous oxide coating film of a specified thickness. CONSTITUTION:Each of structural members of gas and pure water feeding and discharging systems, a reaction chamber, etc., as structural members of a semiconductor producing device is made of stainless steel. The surface of the stainless steel member is electropolished with an aq. H2SO4-H3PO4 soln. and the member is heated, e.g., to 250-550 deg.C in the air to form an amorphous oxide coating film of >=75Angstrom thickness. A surface treated stainless steel member having superior surface smoothness and gas release resistance is obtd.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24505287A JPS6487760A (en) | 1987-09-28 | 1987-09-28 | Stainless steel member for semiconductor producing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24505287A JPS6487760A (en) | 1987-09-28 | 1987-09-28 | Stainless steel member for semiconductor producing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6487760A true JPS6487760A (en) | 1989-03-31 |
JPH0465144B2 JPH0465144B2 (en) | 1992-10-19 |
Family
ID=17127864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24505287A Granted JPS6487760A (en) | 1987-09-28 | 1987-09-28 | Stainless steel member for semiconductor producing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6487760A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02141566A (en) * | 1988-11-21 | 1990-05-30 | Shinko Pantec Co Ltd | Apparatus piping material for ultra-pure water producing and supplying device |
US5407492A (en) * | 1991-02-18 | 1995-04-18 | Osaka Sanso Kogyo Ltd. | Process for forming passivated film |
WO1995018247A1 (en) * | 1993-12-30 | 1995-07-06 | Tadahiro Ohmi | Method of forming oxidized passive film, ferrite system stainless steel, fluid feed system and fluid contact component |
US6027792A (en) * | 1995-10-03 | 2000-02-22 | Kabushiki Kaisha Kobe Seiko Sho | Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same |
KR100494739B1 (en) * | 2002-06-27 | 2005-06-13 | 주식회사 아스플로 | Method for Polishing a Surface of Chrome Oxygen Passivation |
KR100494576B1 (en) * | 2002-06-27 | 2005-06-13 | 주식회사 아스플로 | Apparatus for Treating a Surface of Chrome Oxidize Passivation |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6217184A (en) * | 1985-07-12 | 1987-01-26 | Shinko Fuaudoraa Kk | Surface treatment of stainless steel |
JPS6431956A (en) * | 1987-07-25 | 1989-02-02 | Tadahiro Omi | Manufacture of stainless steel member for semiconductor-manufacturing equipment |
-
1987
- 1987-09-28 JP JP24505287A patent/JPS6487760A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6217184A (en) * | 1985-07-12 | 1987-01-26 | Shinko Fuaudoraa Kk | Surface treatment of stainless steel |
JPS6431956A (en) * | 1987-07-25 | 1989-02-02 | Tadahiro Omi | Manufacture of stainless steel member for semiconductor-manufacturing equipment |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02141566A (en) * | 1988-11-21 | 1990-05-30 | Shinko Pantec Co Ltd | Apparatus piping material for ultra-pure water producing and supplying device |
US5407492A (en) * | 1991-02-18 | 1995-04-18 | Osaka Sanso Kogyo Ltd. | Process for forming passivated film |
WO1995018247A1 (en) * | 1993-12-30 | 1995-07-06 | Tadahiro Ohmi | Method of forming oxidized passive film, ferrite system stainless steel, fluid feed system and fluid contact component |
US6027792A (en) * | 1995-10-03 | 2000-02-22 | Kabushiki Kaisha Kobe Seiko Sho | Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same |
KR100494739B1 (en) * | 2002-06-27 | 2005-06-13 | 주식회사 아스플로 | Method for Polishing a Surface of Chrome Oxygen Passivation |
KR100494576B1 (en) * | 2002-06-27 | 2005-06-13 | 주식회사 아스플로 | Apparatus for Treating a Surface of Chrome Oxidize Passivation |
Also Published As
Publication number | Publication date |
---|---|
JPH0465144B2 (en) | 1992-10-19 |
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