JPS6487516A - Production of thin film superconductor - Google Patents
Production of thin film superconductorInfo
- Publication number
- JPS6487516A JPS6487516A JP62245165A JP24516587A JPS6487516A JP S6487516 A JPS6487516 A JP S6487516A JP 62245165 A JP62245165 A JP 62245165A JP 24516587 A JP24516587 A JP 24516587A JP S6487516 A JPS6487516 A JP S6487516A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- vapor deposition
- specified
- superconductor
- compd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title abstract 6
- 239000002887 superconductor Substances 0.000 title abstract 3
- 238000007740 vapor deposition Methods 0.000 abstract 3
- 239000010949 copper Substances 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 125000001153 fluoro group Chemical group F* 0.000 abstract 1
- 229910052747 lanthanoid Inorganic materials 0.000 abstract 1
- 150000002602 lanthanoids Chemical class 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000000737 periodic effect Effects 0.000 abstract 1
- 229910052706 scandium Inorganic materials 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 229910052727 yttrium Inorganic materials 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C5/00—Preparation of hydrocarbons from hydrocarbons containing the same number of carbon atoms
- C07C5/02—Preparation of hydrocarbons from hydrocarbons containing the same number of carbon atoms by hydrogenation
- C07C5/03—Preparation of hydrocarbons from hydrocarbons containing the same number of carbon atoms by hydrogenation of non-aromatic carbon-to-carbon double bonds
- C07C5/05—Partial hydrogenation
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
PURPOSE:To produce a thin film superconductor having uniform quality and high precision by depositing thin film of a ternary compd. consisting of oxides of a specified element A, a specified element B, and copper, wherein the molar fraction of each element is expressed by the specified inequality, on a substrate, and exposing the thin film to F ions. CONSTITUTION:Thin film of a ternary compd. consisting of (A) at least one element A among Sc, Y, and lanthanoids (No.57-71 in atomic number), (B) at least one element B among element of the group II of the periodic table, and (C) an oxide contg. Cu, wherein the molar fraction of each element is expressed by the inequality, is formed on a substrate by physical vapor growth, such as sputtering vapor deposition, electron beam vapor deposition, laser beam vapor deposition, etc. Then, F atoms. are introduced into said thin film by treating the film with F ions generated by the discharge of F-contg. gas. By this method, a superconductor having more uniform quality than the conventional sintered bodies, accordingly having extremely high precision, is obtd.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62245165A JPS6487516A (en) | 1987-09-29 | 1987-09-29 | Production of thin film superconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62245165A JPS6487516A (en) | 1987-09-29 | 1987-09-29 | Production of thin film superconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6487516A true JPS6487516A (en) | 1989-03-31 |
Family
ID=17129577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62245165A Pending JPS6487516A (en) | 1987-09-29 | 1987-09-29 | Production of thin film superconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6487516A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01111702A (en) * | 1987-10-24 | 1989-04-28 | Hiroyuki Yoshida | Production of room temperature superconductor from composite oxide utilizing irradiation |
-
1987
- 1987-09-29 JP JP62245165A patent/JPS6487516A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01111702A (en) * | 1987-10-24 | 1989-04-28 | Hiroyuki Yoshida | Production of room temperature superconductor from composite oxide utilizing irradiation |
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