JPS6414820A - Manufacture of superconductor thin film - Google Patents

Manufacture of superconductor thin film

Info

Publication number
JPS6414820A
JPS6414820A JP62170233A JP17023387A JPS6414820A JP S6414820 A JPS6414820 A JP S6414820A JP 62170233 A JP62170233 A JP 62170233A JP 17023387 A JP17023387 A JP 17023387A JP S6414820 A JPS6414820 A JP S6414820A
Authority
JP
Japan
Prior art keywords
target
elements
thin film
spattering
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62170233A
Other languages
Japanese (ja)
Inventor
Tsuneo Mitsuyu
Hideaki Adachi
Osamu Yamazaki
Kiyotaka Wasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62170233A priority Critical patent/JPS6414820A/en
Publication of JPS6414820A publication Critical patent/JPS6414820A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To obtain a good superconductor thin film with the desired composi tion ratio by using the first target made of Y, La elements, the second target made of alloy of Cu and group IIa elements such as Ba, and the third target made of Cu and deposition-spattering them in the atmosphere containing O2 while controlling the applied power respectively. CONSTITUTION:The mixed gas of Ar:O2=1:1 is introduced into a container 6 and maintained at 10<-2>-10<-3>Torr. The negative voltage is applied to targets 1-3 from variable DC power sources 1a-3a and discharged. Generated ions shock the target faces end evaporate the constituting elements by spattering and generate an oxide film on a substrate 4 by O2 in the gas. If the power of each target is properly selected, a superconductive film with the desired composition ratio is obtained. If elements are mixed to Ba:Cu=1:1 for the second target in particular, a uniform compound Ba-Cu is formed, and good results are obtained. If a material with the linear expansion coefficient of alpha>10<-6>/ deg.C is used for the substrate 4, no crack occurs on the formed thin film.
JP62170233A 1987-07-08 1987-07-08 Manufacture of superconductor thin film Pending JPS6414820A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62170233A JPS6414820A (en) 1987-07-08 1987-07-08 Manufacture of superconductor thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62170233A JPS6414820A (en) 1987-07-08 1987-07-08 Manufacture of superconductor thin film

Publications (1)

Publication Number Publication Date
JPS6414820A true JPS6414820A (en) 1989-01-19

Family

ID=15901134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62170233A Pending JPS6414820A (en) 1987-07-08 1987-07-08 Manufacture of superconductor thin film

Country Status (1)

Country Link
JP (1) JPS6414820A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01176217A (en) * 1987-12-29 1989-07-12 Sumitomo Electric Ind Ltd Production of superconducting thin film of compound oxide
US5734456A (en) * 1990-11-16 1998-03-31 Canon Kabushiki Kaisha Ferroelectric liquid crystal device and display having maximum peak of surface roughness of color filter of 0.1 micron or less
JP2008266676A (en) * 2007-04-17 2008-11-06 Choshu Industry Co Ltd Apparatus and method for manufacturing alloy thin film
CN112962075A (en) * 2021-02-04 2021-06-15 西南交通大学 Method for preparing second-generation high-temperature superconducting tape by three-target co-sputtering

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01176217A (en) * 1987-12-29 1989-07-12 Sumitomo Electric Ind Ltd Production of superconducting thin film of compound oxide
US5734456A (en) * 1990-11-16 1998-03-31 Canon Kabushiki Kaisha Ferroelectric liquid crystal device and display having maximum peak of surface roughness of color filter of 0.1 micron or less
JP2008266676A (en) * 2007-04-17 2008-11-06 Choshu Industry Co Ltd Apparatus and method for manufacturing alloy thin film
CN112962075A (en) * 2021-02-04 2021-06-15 西南交通大学 Method for preparing second-generation high-temperature superconducting tape by three-target co-sputtering

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