JPS6435820A - Manufacture of membrane superconductor - Google Patents
Manufacture of membrane superconductorInfo
- Publication number
- JPS6435820A JPS6435820A JP62192959A JP19295987A JPS6435820A JP S6435820 A JPS6435820 A JP S6435820A JP 62192959 A JP62192959 A JP 62192959A JP 19295987 A JP19295987 A JP 19295987A JP S6435820 A JPS6435820 A JP S6435820A
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- substrate
- superconductor
- manufacture
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000002887 superconductor Substances 0.000 title abstract 2
- 239000012528 membrane Substances 0.000 title 1
- 238000004544 sputter deposition Methods 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 4
- 238000000151 deposition Methods 0.000 abstract 3
- 230000008021 deposition Effects 0.000 abstract 3
- 150000001875 compounds Chemical class 0.000 abstract 2
- 229910052788 barium Inorganic materials 0.000 abstract 1
- 229910052790 beryllium Inorganic materials 0.000 abstract 1
- 229910052791 calcium Inorganic materials 0.000 abstract 1
- 238000005137 deposition process Methods 0.000 abstract 1
- 150000002603 lanthanum Chemical class 0.000 abstract 1
- 229910052749 magnesium Inorganic materials 0.000 abstract 1
- 238000001755 magnetron sputter deposition Methods 0.000 abstract 1
- 229910052712 strontium Inorganic materials 0.000 abstract 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE:To manufacture a superconductor of extremely high precision by positioning the surface of a substrate in sputtering discharge when the complex compound film of the predetermined composition is deposited on the substrate via a sputtering deposition process. CONSTITUTION:When oxide containing at least A, B and Cu is used to form a complex compound film having an element mole ratio of 0.5<=(A+B)/Cu<=2.5 on the surface of a substrate via sputtering deposition, the surface is positioned in sputtering discharge. In this case, A stands for at least one type of Sc, Y and lanthanum series elements and B for at least one type of IIa group elements such as Ba, Sr, Ca, Be and Mg. Also, deposition is made with magnetron sputtering. Furthermore, a distance between the surfaces of the substrate and a target is taken at 15 mm to 60 mm in the sputtering deposition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62192959A JPS6435820A (en) | 1987-07-31 | 1987-07-31 | Manufacture of membrane superconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62192959A JPS6435820A (en) | 1987-07-31 | 1987-07-31 | Manufacture of membrane superconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6435820A true JPS6435820A (en) | 1989-02-06 |
Family
ID=16299879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62192959A Pending JPS6435820A (en) | 1987-07-31 | 1987-07-31 | Manufacture of membrane superconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6435820A (en) |
-
1987
- 1987-07-31 JP JP62192959A patent/JPS6435820A/en active Pending
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