JPS6435820A - Manufacture of membrane superconductor - Google Patents

Manufacture of membrane superconductor

Info

Publication number
JPS6435820A
JPS6435820A JP62192959A JP19295987A JPS6435820A JP S6435820 A JPS6435820 A JP S6435820A JP 62192959 A JP62192959 A JP 62192959A JP 19295987 A JP19295987 A JP 19295987A JP S6435820 A JPS6435820 A JP S6435820A
Authority
JP
Japan
Prior art keywords
sputtering
substrate
superconductor
manufacture
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62192959A
Other languages
Japanese (ja)
Inventor
Hideaki Adachi
Kentaro Setsune
Kumiko Hirochi
Osamu Yamazaki
Kiyotaka Wasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62192959A priority Critical patent/JPS6435820A/en
Publication of JPS6435820A publication Critical patent/JPS6435820A/en
Pending legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To manufacture a superconductor of extremely high precision by positioning the surface of a substrate in sputtering discharge when the complex compound film of the predetermined composition is deposited on the substrate via a sputtering deposition process. CONSTITUTION:When oxide containing at least A, B and Cu is used to form a complex compound film having an element mole ratio of 0.5<=(A+B)/Cu<=2.5 on the surface of a substrate via sputtering deposition, the surface is positioned in sputtering discharge. In this case, A stands for at least one type of Sc, Y and lanthanum series elements and B for at least one type of IIa group elements such as Ba, Sr, Ca, Be and Mg. Also, deposition is made with magnetron sputtering. Furthermore, a distance between the surfaces of the substrate and a target is taken at 15 mm to 60 mm in the sputtering deposition.
JP62192959A 1987-07-31 1987-07-31 Manufacture of membrane superconductor Pending JPS6435820A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62192959A JPS6435820A (en) 1987-07-31 1987-07-31 Manufacture of membrane superconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62192959A JPS6435820A (en) 1987-07-31 1987-07-31 Manufacture of membrane superconductor

Publications (1)

Publication Number Publication Date
JPS6435820A true JPS6435820A (en) 1989-02-06

Family

ID=16299879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62192959A Pending JPS6435820A (en) 1987-07-31 1987-07-31 Manufacture of membrane superconductor

Country Status (1)

Country Link
JP (1) JPS6435820A (en)

Similar Documents

Publication Publication Date Title
EP0285132A3 (en) Method for producing thin film of oxide superconductor
JPS6414814A (en) Manufacture of oxide superconductive thin film
CA2045267A1 (en) Process and Apparatus for Preparing Superconducting Thin Films
JPS5727079A (en) Manufacture of josephson element of oxide superconductor
JPS6435820A (en) Manufacture of membrane superconductor
CA2103085A1 (en) Method for Preparing Superconducting Thin Film Formed of High Temperature Superconductor Oxide
JPS6414820A (en) Manufacture of superconductor thin film
JPS6452326A (en) Superconductor
JPS6452313A (en) Superconductor
JPS6452324A (en) Superconductor
JPS6433818A (en) Superconductor
JPS6411380A (en) Manufacture of josephson element
JPS64614A (en) Manufacture of oxide superconducting film
JPS5538947A (en) Forming method of metallic compound coating
JPS6452314A (en) Superconductor
JPS6487516A (en) Production of thin film superconductor
JPS6452320A (en) Superconductor
JPS6452312A (en) Superconductor
CA2043541A1 (en) Process for preparing high-temperature superconducting thin films
JPS6452321A (en) Superconductor
JPS56152963A (en) Sputtering apparatus
JPS6452322A (en) Superconductor
JPS6414821A (en) Manufacture of oxide superconductor thin film
EP0396478A3 (en) Processes of forming conductive films and articles so produced
JPS6443929A (en) Manufacture of oxide superconductor film