JPS6443929A - Manufacture of oxide superconductor film - Google Patents

Manufacture of oxide superconductor film

Info

Publication number
JPS6443929A
JPS6443929A JP62200655A JP20065587A JPS6443929A JP S6443929 A JPS6443929 A JP S6443929A JP 62200655 A JP62200655 A JP 62200655A JP 20065587 A JP20065587 A JP 20065587A JP S6443929 A JPS6443929 A JP S6443929A
Authority
JP
Japan
Prior art keywords
oxide
film
target
yttrium
barium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62200655A
Other languages
Japanese (ja)
Inventor
Tomoji Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Idemitsu Kosan Co Ltd
Original Assignee
Idemitsu Kosan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idemitsu Kosan Co Ltd filed Critical Idemitsu Kosan Co Ltd
Priority to JP62200655A priority Critical patent/JPS6443929A/en
Publication of JPS6443929A publication Critical patent/JPS6443929A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To make such a thin film that is high in superconductive transition temperature and excellent in film quality securable by setting an oxide containing a yttrium or lanthanum series element, barium and copper down as a target, and irradiating an exciting beam to this target for sputtering it. CONSTITUTION:An oxide containing at least one type element (a) in yttrium and lanthanum series elements, barium (b) and copper (c) is set down as a target, irradiating an exciting beam to it for sputtering, and an oxide film superconductized is formed on a substrate. In this oxide as material, an atomic ratio of (a), (b) and (c) is not restricted in particular, and such one that is a:b:c=0.5-3:0.5-3:1.5-5 in usual time, especially a:b:c=1:2:3-4.5 is optimum. And, as for the exciting beam, excimer laser (ArF excimer laser or a short wavelength of pulse laser is used after strong beam convergence. With this constitution, such an oxide superconductive film that is excellent in membranaceous quality and shows superconductivity at high temperature of a liquid nitrogen temperature or so is manufacturable.
JP62200655A 1987-08-11 1987-08-11 Manufacture of oxide superconductor film Pending JPS6443929A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62200655A JPS6443929A (en) 1987-08-11 1987-08-11 Manufacture of oxide superconductor film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62200655A JPS6443929A (en) 1987-08-11 1987-08-11 Manufacture of oxide superconductor film

Publications (1)

Publication Number Publication Date
JPS6443929A true JPS6443929A (en) 1989-02-16

Family

ID=16428018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62200655A Pending JPS6443929A (en) 1987-08-11 1987-08-11 Manufacture of oxide superconductor film

Country Status (1)

Country Link
JP (1) JPS6443929A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0217685A (en) * 1988-05-11 1990-01-22 Siemens Ag Manufacture of metal oxide superconducting material layer using laser vaporization
US5054311A (en) * 1989-12-11 1991-10-08 Expertek, Inc. Fully automated leak testing apparatus
US5263361A (en) * 1988-08-22 1993-11-23 Gates Donald C Apparatus for leak testing a fluid containing chamber utilizing a laser beam

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0217685A (en) * 1988-05-11 1990-01-22 Siemens Ag Manufacture of metal oxide superconducting material layer using laser vaporization
US5263361A (en) * 1988-08-22 1993-11-23 Gates Donald C Apparatus for leak testing a fluid containing chamber utilizing a laser beam
US5054311A (en) * 1989-12-11 1991-10-08 Expertek, Inc. Fully automated leak testing apparatus

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