JPS648683A - Manufacture of josephson element - Google Patents
Manufacture of josephson elementInfo
- Publication number
- JPS648683A JPS648683A JP62164932A JP16493287A JPS648683A JP S648683 A JPS648683 A JP S648683A JP 62164932 A JP62164932 A JP 62164932A JP 16493287 A JP16493287 A JP 16493287A JP S648683 A JPS648683 A JP S648683A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thin
- oxide
- barium
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000010408 film Substances 0.000 abstract 10
- 239000010409 thin film Substances 0.000 abstract 6
- 239000000758 substrate Substances 0.000 abstract 4
- FFWQPZCNBYQCBT-UHFFFAOYSA-N barium;oxocopper Chemical compound [Ba].[Cu]=O FFWQPZCNBYQCBT-UHFFFAOYSA-N 0.000 abstract 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 2
- 239000010931 gold Substances 0.000 abstract 2
- 229910052737 gold Inorganic materials 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 230000005668 Josephson effect Effects 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 229910052788 barium Inorganic materials 0.000 abstract 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000007935 neutral effect Effects 0.000 abstract 1
- 239000011224 oxide ceramic Substances 0.000 abstract 1
- 229910052574 oxide ceramic Inorganic materials 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
PURPOSE:To easily manufacture a Josephson element with high reproducibility by using an oxide ceramic superconducting thin film by forming a first thin superconducting film made of IIIa barium-copper oxide thin film, and further forming a second thin superconducting film made of similar group IIIa barium- copper oxide thin film through an insulating film thereon. CONSTITUTION:Group IIIa metal and/or its oxide, barium and/or its oxide, and copper and/or its oxide are adhered to a substrate 14 held at 400-700 deg.C, and an oxygen neutral beam is irradiated on the substrate to form a first thin superconducting film 23a made of group IIIa barium-copper oxide thin film. Second thin superconducting film 23b is formed on an insulating film 24 similarly to the first thin film. Since the substrate is maintained at relatively low temperatures of 400-700 deg.C during these film forming processes, the insulating film is not thermally diffused in the thin superconducting film. A gold electrode film is formed on the second thin film, a voltage is applied to the gold electrode on the substrate, and its temperature is reduced. Thus, a current exhibiting Josephson effect at 85K flowed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62164932A JPS648683A (en) | 1987-06-30 | 1987-06-30 | Manufacture of josephson element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62164932A JPS648683A (en) | 1987-06-30 | 1987-06-30 | Manufacture of josephson element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS648683A true JPS648683A (en) | 1989-01-12 |
Family
ID=15802579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62164932A Pending JPS648683A (en) | 1987-06-30 | 1987-06-30 | Manufacture of josephson element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS648683A (en) |
-
1987
- 1987-06-30 JP JP62164932A patent/JPS648683A/en active Pending
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