JPS6476619A - Manufacture of composite oxide superconductive thin film - Google Patents
Manufacture of composite oxide superconductive thin filmInfo
- Publication number
- JPS6476619A JPS6476619A JP62231275A JP23127587A JPS6476619A JP S6476619 A JPS6476619 A JP S6476619A JP 62231275 A JP62231275 A JP 62231275A JP 23127587 A JP23127587 A JP 23127587A JP S6476619 A JPS6476619 A JP S6476619A
- Authority
- JP
- Japan
- Prior art keywords
- targets
- thin film
- elements
- sputtering
- composite oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
PURPOSE:To make it possible to obtain a high critical voltage and good superconductive characteristics by using simple substances of a plurality of specified elements for targets and sputtering while adjusting sputtering area of the targets. CONSTITUTION:The composite oxide superconductive thin film includes at least one element alpha selected among group IIa elements in the periodic table, at least one element beta selected among group IIIa elements in the periodic table, and at least one element gamma selected among group Ib, IIb, IIIb, IVa, VIII elements. For manufacturing this superconductive thin film, simple substances of the elements alpha, beta and gamma, that is, for Ba, Y, and Cu, for example, Ba targets 2 and Y targets 3, are formed first. The sputtering area of these targets are adjusted taking the composition of the composite oxide superconductive thin film to be formed corresponding to sputtering efficiency and reaction rate of each element as the standard, and sputtering is performed in an atmosphere including oxygen.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62231275A JPS6476619A (en) | 1987-09-16 | 1987-09-16 | Manufacture of composite oxide superconductive thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62231275A JPS6476619A (en) | 1987-09-16 | 1987-09-16 | Manufacture of composite oxide superconductive thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6476619A true JPS6476619A (en) | 1989-03-22 |
Family
ID=16921050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62231275A Pending JPS6476619A (en) | 1987-09-16 | 1987-09-16 | Manufacture of composite oxide superconductive thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6476619A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03271359A (en) * | 1990-03-20 | 1991-12-03 | Japan Steel Works Ltd:The | Method for synthesizing multiple oxide |
US5145713A (en) * | 1990-12-21 | 1992-09-08 | Bell Communications Research, Inc. | Stoichiometric growth of compounds with volatile components |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6445180A (en) * | 1987-08-13 | 1989-02-17 | Nippon Steel Corp | Manufacture of superconductive thin film using composite target |
-
1987
- 1987-09-16 JP JP62231275A patent/JPS6476619A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6445180A (en) * | 1987-08-13 | 1989-02-17 | Nippon Steel Corp | Manufacture of superconductive thin film using composite target |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03271359A (en) * | 1990-03-20 | 1991-12-03 | Japan Steel Works Ltd:The | Method for synthesizing multiple oxide |
US5145713A (en) * | 1990-12-21 | 1992-09-08 | Bell Communications Research, Inc. | Stoichiometric growth of compounds with volatile components |
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