JPS6445180A - Manufacture of superconductive thin film using composite target - Google Patents

Manufacture of superconductive thin film using composite target

Info

Publication number
JPS6445180A
JPS6445180A JP62200787A JP20078787A JPS6445180A JP S6445180 A JPS6445180 A JP S6445180A JP 62200787 A JP62200787 A JP 62200787A JP 20078787 A JP20078787 A JP 20078787A JP S6445180 A JPS6445180 A JP S6445180A
Authority
JP
Japan
Prior art keywords
thin film
composite target
composition
manufacture
alloys
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62200787A
Other languages
Japanese (ja)
Inventor
Shigeto Takebayashi
Yasuo Takagi
Shunpei Miyajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP62200787A priority Critical patent/JPS6445180A/en
Publication of JPS6445180A publication Critical patent/JPS6445180A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming superconductor layers
    • H10N60/0408—Processes for depositing or forming superconductor layers by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To obtain a uniform superconducting thin film with good reproducibility and to make it possible to use the thin film as a superconductive material by a method wherein a composite target is used and the thin film is manufactured by a sputtering method. CONSTITUTION:A multicomponent superconducting thin film consisting of a rare earth element, an alkali earth metal and copper is manufactured by a sputtering method wherein a composite target is used. That is, the rare earth element and the alkali earth metal or these alloys or these oxides are sputtered on a Cu target substrate in a surface area ratio to correspond to the composition of the thin film, which is targeted to each of the above element, metal, alloys and oxides, and moreover, using the composite target arranged in some form of a sector, the form of a concentric circle and the form of a pinhole. Thereby, a control of the composition of the thin film can be easily performed and the thin film, whose composition and thickness are uniform and which has a superior superconductivity, can be easily obtained with good reproducibility.
JP62200787A 1987-08-13 1987-08-13 Manufacture of superconductive thin film using composite target Pending JPS6445180A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62200787A JPS6445180A (en) 1987-08-13 1987-08-13 Manufacture of superconductive thin film using composite target

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62200787A JPS6445180A (en) 1987-08-13 1987-08-13 Manufacture of superconductive thin film using composite target

Publications (1)

Publication Number Publication Date
JPS6445180A true JPS6445180A (en) 1989-02-17

Family

ID=16430183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62200787A Pending JPS6445180A (en) 1987-08-13 1987-08-13 Manufacture of superconductive thin film using composite target

Country Status (1)

Country Link
JP (1) JPS6445180A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6476619A (en) * 1987-09-16 1989-03-22 Sumitomo Electric Industries Manufacture of composite oxide superconductive thin film
JPH03260063A (en) * 1990-03-09 1991-11-20 Kokusai Chodendo Sangyo Gijutsu Kenkyu Center Formation of oxide thin film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6476619A (en) * 1987-09-16 1989-03-22 Sumitomo Electric Industries Manufacture of composite oxide superconductive thin film
JPH03260063A (en) * 1990-03-09 1991-11-20 Kokusai Chodendo Sangyo Gijutsu Kenkyu Center Formation of oxide thin film

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