JPS6450314A - Manufacture of superconductive material - Google Patents

Manufacture of superconductive material

Info

Publication number
JPS6450314A
JPS6450314A JP62206089A JP20608987A JPS6450314A JP S6450314 A JPS6450314 A JP S6450314A JP 62206089 A JP62206089 A JP 62206089A JP 20608987 A JP20608987 A JP 20608987A JP S6450314 A JPS6450314 A JP S6450314A
Authority
JP
Japan
Prior art keywords
thin film
oxide superconductive
plural species
target
periodic table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62206089A
Other languages
Japanese (ja)
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP62206089A priority Critical patent/JPS6450314A/en
Publication of JPS6450314A publication Critical patent/JPS6450314A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To stabilize a crystal grain boundary by making an oxide superconductive material a thin film structure, and a multilayer structure of the material and metal. CONSTITUTION:A target for forming an oxide superconductive thin film and a target for forming a metallic thin film are made to be sputtered, a formed surface is rotated, and the oxide superconductive thin film and the metallic thin film and laminated in multilayer on a substrate. The oxide superconductive thin film formed has the formula of (A1-xBx)yCuzOwXv, where x=0.1-1.0, y=2.0-4.0, z=1.0-4.0, w=4.0-8.0, and v=0-3.0, A is an element selected from one or plural species of the element periodic table IIIa group, B contains an element selected from one or plural species of the element periodic table IIa group, and X contains an element of one or plural species selected from Si, Ge, Sn, Pb, In, pr Sb. And the main component of the metallic thin film formed is copper, silver, or their compound. By the way, the temperatures of the formed surface is made at room temperature -700 deg.C.
JP62206089A 1987-08-19 1987-08-19 Manufacture of superconductive material Pending JPS6450314A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62206089A JPS6450314A (en) 1987-08-19 1987-08-19 Manufacture of superconductive material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62206089A JPS6450314A (en) 1987-08-19 1987-08-19 Manufacture of superconductive material

Publications (1)

Publication Number Publication Date
JPS6450314A true JPS6450314A (en) 1989-02-27

Family

ID=16517631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62206089A Pending JPS6450314A (en) 1987-08-19 1987-08-19 Manufacture of superconductive material

Country Status (1)

Country Link
JP (1) JPS6450314A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0375300A (en) * 1989-08-11 1991-03-29 Hitachi Ltd Oxide superlattice material, its production and apparatus therefor
JPH03252007A (en) * 1990-02-28 1991-11-11 Chodendo Hatsuden Kanren Kiki Zairyo Gijutsu Kenkyu Kumiai Oxide superconductor and manufacture thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63318014A (en) * 1987-06-19 1988-12-26 Hitachi Ltd Superconductive film of metal oxide

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63318014A (en) * 1987-06-19 1988-12-26 Hitachi Ltd Superconductive film of metal oxide

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0375300A (en) * 1989-08-11 1991-03-29 Hitachi Ltd Oxide superlattice material, its production and apparatus therefor
JPH03252007A (en) * 1990-02-28 1991-11-11 Chodendo Hatsuden Kanren Kiki Zairyo Gijutsu Kenkyu Kumiai Oxide superconductor and manufacture thereof

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