JPS6463222A - Manufacture of superconductive thin film - Google Patents
Manufacture of superconductive thin filmInfo
- Publication number
- JPS6463222A JPS6463222A JP63062913A JP6291388A JPS6463222A JP S6463222 A JPS6463222 A JP S6463222A JP 63062913 A JP63062913 A JP 63062913A JP 6291388 A JP6291388 A JP 6291388A JP S6463222 A JPS6463222 A JP S6463222A
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- target
- thin film
- perovskite type
- composite oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000002131 composite material Substances 0.000 abstract 4
- 230000008020 evaporation Effects 0.000 abstract 4
- 238000001704 evaporation Methods 0.000 abstract 4
- 239000000203 mixture Substances 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 1
- 238000001552 radio frequency sputter deposition Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
PURPOSE:To obtain a thin film of a superconductive material having high critical temperatures and uniform composition and a system by conducting physical evaporation using a target of the mixture of a specific oxide and/or a composite oxide, or of a composite oxide including a specific element, and forming a thin film of a perovskite type oxide or a dummy perovskite type oxide. CONSTITUTION:Physical evaporation is conducted using a target of the mixture of an oxide including at least one kind selected from a group composed of Ho, Ba, and Cu and/or a composite oxide, or a target of a composite oxide containing all elements included in the element group mentioned above. It is advantageous that the target includes a perovskite type oxide or a dummy perovskite type oxide. It is preferable that an atomic ratio Ba/(Ba+Ho) and Cu/(Ba+Ho) has the range of 0.04-0.97 and 0.5-0.7 respectively. An evaporation atmosphere is made to include Ar and O2, and Ar partial pressure to have the range of 1.0X10<-3>-3X10<-1>Torr. Physical evaporation is RF sputtering, and a substrate is heated with a heater when sputtering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63062913A JP2501615B2 (en) | 1987-03-18 | 1988-03-16 | Preparation method of superconducting thin film |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6320487 | 1987-03-18 | ||
| JP62-63204 | 1987-03-18 | ||
| JP63062913A JP2501615B2 (en) | 1987-03-18 | 1988-03-16 | Preparation method of superconducting thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6463222A true JPS6463222A (en) | 1989-03-09 |
| JP2501615B2 JP2501615B2 (en) | 1996-05-29 |
Family
ID=26403972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63062913A Expired - Lifetime JP2501615B2 (en) | 1987-03-18 | 1988-03-16 | Preparation method of superconducting thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2501615B2 (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6362914A (en) * | 1986-09-03 | 1988-03-19 | クライネヴエ−フア−ス ゲゼルシヤフト ミツト ベシユレンクタ− ハフツング | Deformation control roll |
| JPS6362911A (en) * | 1986-08-29 | 1988-03-19 | Miyoshi Sato | Criteria mechanism for direction of resultant force using inclined axis |
| JPS6362912A (en) * | 1986-08-29 | 1988-03-19 | Tokuden Kk | Induction heating roller device |
| JPS6362915A (en) * | 1986-09-02 | 1988-03-19 | ユナイテッド・テクノロジ−ズ・コ−ポレイション | Bearing supporter |
| JPS63224116A (en) * | 1987-03-11 | 1988-09-19 | Matsushita Electric Ind Co Ltd | Manufacture of thin film superconductor |
| JPS63224375A (en) * | 1987-03-13 | 1988-09-19 | Toshiba Corp | Superconducting transistor |
-
1988
- 1988-03-16 JP JP63062913A patent/JP2501615B2/en not_active Expired - Lifetime
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6362911A (en) * | 1986-08-29 | 1988-03-19 | Miyoshi Sato | Criteria mechanism for direction of resultant force using inclined axis |
| JPS6362912A (en) * | 1986-08-29 | 1988-03-19 | Tokuden Kk | Induction heating roller device |
| JPS6362915A (en) * | 1986-09-02 | 1988-03-19 | ユナイテッド・テクノロジ−ズ・コ−ポレイション | Bearing supporter |
| JPS6362914A (en) * | 1986-09-03 | 1988-03-19 | クライネヴエ−フア−ス ゲゼルシヤフト ミツト ベシユレンクタ− ハフツング | Deformation control roll |
| JPS63224116A (en) * | 1987-03-11 | 1988-09-19 | Matsushita Electric Ind Co Ltd | Manufacture of thin film superconductor |
| JPS63224375A (en) * | 1987-03-13 | 1988-09-19 | Toshiba Corp | Superconducting transistor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2501615B2 (en) | 1996-05-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090313 Year of fee payment: 13 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090313 Year of fee payment: 13 |