JPS6463223A - Manufacture of superconductive thin film - Google Patents

Manufacture of superconductive thin film

Info

Publication number
JPS6463223A
JPS6463223A JP63062914A JP6291488A JPS6463223A JP S6463223 A JPS6463223 A JP S6463223A JP 63062914 A JP63062914 A JP 63062914A JP 6291488 A JP6291488 A JP 6291488A JP S6463223 A JPS6463223 A JP S6463223A
Authority
JP
Japan
Prior art keywords
oxide
target
perovskite type
thin film
composite oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63062914A
Other languages
Japanese (ja)
Other versions
JP2501616B2 (en
Inventor
Nobuhiko Fujita
Naoharu Fujimori
Hideo Itozaki
Saburo Tanaka
Keizo Harada
Tetsuji Jodai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP63062914A priority Critical patent/JP2501616B2/en
Publication of JPS6463223A publication Critical patent/JPS6463223A/en
Application granted granted Critical
Publication of JP2501616B2 publication Critical patent/JP2501616B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To obtain a thin film of a superconductive material having high critical temperatures and uniform composition and a system by conducting physical evaporation using a target of the mixture of a specific oxide and/or a composite oxide, or of a composite oxide including a specific element, and forming a thin film of a perovskite type oxide or a dummy perovskite type oxide. CONSTITUTION:Physical evaporation is conducted using a target of the mixture of an oxide including at least one kind selected from a group composed of Er, Ba, and Cu and/or a composite oxide, or a target of a composite oxide containing all elements included in the element group mentioned above. It is advantageous that the target includes a perovskite type oxide or a dummy perovskite type oxide. It is preferable that an atomic ratio Ba/(Ba+Er) and Cu/(Ba+Er) has the range of 0.04-0.96 and 0.5-0.7 respectively. An evaporation atmosphere is made to include Ar and O2, and Ar partial pressure to have the range of 1.2X10<-3>-2X10<-1>Torr. Physical evaporation is RF sputtering, and a substrate is heated with a heater etc., when sputtering.
JP63062914A 1987-03-18 1988-03-16 Preparation method of superconducting thin film Expired - Fee Related JP2501616B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63062914A JP2501616B2 (en) 1987-03-18 1988-03-16 Preparation method of superconducting thin film

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP62-63205 1987-03-18
JP6320587 1987-03-18
JP63062914A JP2501616B2 (en) 1987-03-18 1988-03-16 Preparation method of superconducting thin film

Publications (2)

Publication Number Publication Date
JPS6463223A true JPS6463223A (en) 1989-03-09
JP2501616B2 JP2501616B2 (en) 1996-05-29

Family

ID=26403974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63062914A Expired - Fee Related JP2501616B2 (en) 1987-03-18 1988-03-16 Preparation method of superconducting thin film

Country Status (1)

Country Link
JP (1) JP2501616B2 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6362913A (en) * 1986-08-29 1988-03-19 Tokuden Kk Induction heating roller device
JPS6362915A (en) * 1986-09-02 1988-03-19 ユナイテッド・テクノロジ−ズ・コ−ポレイション Bearing supporter
JPS6362911A (en) * 1986-08-29 1988-03-19 Miyoshi Sato Criteria mechanism for direction of resultant force using inclined axis
JPS6362912A (en) * 1986-08-29 1988-03-19 Tokuden Kk Induction heating roller device
JPS63224375A (en) * 1987-03-13 1988-09-19 Toshiba Corp Superconducting transistor
JPS63224116A (en) * 1987-03-11 1988-09-19 Matsushita Electric Ind Co Ltd Manufacture of thin film superconductor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6362913A (en) * 1986-08-29 1988-03-19 Tokuden Kk Induction heating roller device
JPS6362911A (en) * 1986-08-29 1988-03-19 Miyoshi Sato Criteria mechanism for direction of resultant force using inclined axis
JPS6362912A (en) * 1986-08-29 1988-03-19 Tokuden Kk Induction heating roller device
JPS6362915A (en) * 1986-09-02 1988-03-19 ユナイテッド・テクノロジ−ズ・コ−ポレイション Bearing supporter
JPS63224116A (en) * 1987-03-11 1988-09-19 Matsushita Electric Ind Co Ltd Manufacture of thin film superconductor
JPS63224375A (en) * 1987-03-13 1988-09-19 Toshiba Corp Superconducting transistor

Also Published As

Publication number Publication date
JP2501616B2 (en) 1996-05-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees