JPS5465396A - Thin film resistor - Google Patents
Thin film resistorInfo
- Publication number
- JPS5465396A JPS5465396A JP13169277A JP13169277A JPS5465396A JP S5465396 A JPS5465396 A JP S5465396A JP 13169277 A JP13169277 A JP 13169277A JP 13169277 A JP13169277 A JP 13169277A JP S5465396 A JPS5465396 A JP S5465396A
- Authority
- JP
- Japan
- Prior art keywords
- mob
- substrate
- thin film
- spattering
- film resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Non-Adjustable Resistors (AREA)
- Conductive Materials (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Abstract
PURPOSE: To obtain thin film resistor with the capability of wide range of resistivity prescription and stability to head and change on standing in moist condition by heating the substrate and evaporating or spattering molybdenum boride.
CONSTITUTION: Forming MoB thin film on the substrate such as glass or glazed ceramic by electron beam evaporating or spattering. In the case of the electron beam evaporation procedure MoB tablets are prepared by pressing MoB powder, and MoB is evaporated under heating the substrate at 200 to 500°C. In the case of the spattering procedure MoB is spattered on a substrate with high frequency dipolar spatter under heating the substrate at 200 to 500°C, using hot pressed (e.g. at 1300°C) MoB as a target. Thereby, a small-sized thin film resistor with reduced resistance temperature coefficient and cxcellent stability to changes in temperature and other conditions of atmosphere can be obtained.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52131692A JPS6032961B2 (en) | 1977-11-02 | 1977-11-02 | thin film resistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52131692A JPS6032961B2 (en) | 1977-11-02 | 1977-11-02 | thin film resistor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5465396A true JPS5465396A (en) | 1979-05-25 |
JPS6032961B2 JPS6032961B2 (en) | 1985-07-31 |
Family
ID=15063968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52131692A Expired JPS6032961B2 (en) | 1977-11-02 | 1977-11-02 | thin film resistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6032961B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5911402U (en) * | 1982-07-14 | 1984-01-24 | エヌオーケー株式会社 | contact type variable resistor |
-
1977
- 1977-11-02 JP JP52131692A patent/JPS6032961B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5911402U (en) * | 1982-07-14 | 1984-01-24 | エヌオーケー株式会社 | contact type variable resistor |
Also Published As
Publication number | Publication date |
---|---|
JPS6032961B2 (en) | 1985-07-31 |
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