JPS5552936A - Humidity detector - Google Patents

Humidity detector

Info

Publication number
JPS5552936A
JPS5552936A JP12667678A JP12667678A JPS5552936A JP S5552936 A JPS5552936 A JP S5552936A JP 12667678 A JP12667678 A JP 12667678A JP 12667678 A JP12667678 A JP 12667678A JP S5552936 A JPS5552936 A JP S5552936A
Authority
JP
Japan
Prior art keywords
heat
thermisters
semiconductor
thin film
prepared
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12667678A
Other languages
Japanese (ja)
Inventor
Masao Kasahara
Tsuneo Mitsuyu
Kiyotaka Wasa
Kenzo Ochi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12667678A priority Critical patent/JPS5552936A/en
Publication of JPS5552936A publication Critical patent/JPS5552936A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: To make the mass production possible by using a thermister element using a thin film heat-sensitive material.
CONSTITUTION: A thermister element, which constitutes dry and wet ball thermisters 12 and 13 connected with blocks 22 and 23 for converting the electric resitance of a block 21 into a temperature, is prepared by forming a comb-shaped electrode 43 on one of the surfaces of a heat-sensitive thin film 41, which is prepared by the electron beam evaporation or by the sputtering evaporation of a heat-sensitive material composed of a metal oxide such as Mn-Ni or Mn-Co-Ni, a composite metal oxide such as ZrO2-Y2O3, CoO-Al2O3-CaSiO3 or Mg(Al, Cr, Fe)2O4, a carbite semiconductor such as silicon carbide, and a semiconductor of metal nitride such as tantalum, titanium or aluminum nitride. Thus, the mass production of the thermisters 12 and 13 can be accomplished to attain the desired object.
COPYRIGHT: (C)1980,JPO&Japio
JP12667678A 1978-10-13 1978-10-13 Humidity detector Pending JPS5552936A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12667678A JPS5552936A (en) 1978-10-13 1978-10-13 Humidity detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12667678A JPS5552936A (en) 1978-10-13 1978-10-13 Humidity detector

Publications (1)

Publication Number Publication Date
JPS5552936A true JPS5552936A (en) 1980-04-17

Family

ID=14941091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12667678A Pending JPS5552936A (en) 1978-10-13 1978-10-13 Humidity detector

Country Status (1)

Country Link
JP (1) JPS5552936A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329243A (en) * 1986-07-22 1988-02-06 Nok Corp Thin film temperature sensing element
CN102774806A (en) * 2012-06-25 2012-11-14 中国科学院上海技术物理研究所 Producing method of micro-mesa of Mn-Co-Ni-O line array detector
JP2016145756A (en) * 2015-02-09 2016-08-12 三菱マテリアル株式会社 Temperature sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5252686A (en) * 1975-10-25 1977-04-27 Yamatake Honeywell Co Ltd Relative humidity meter
JPS5376877A (en) * 1976-12-18 1978-07-07 Matsushita Electric Ind Co Ltd Case earth type temperature sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5252686A (en) * 1975-10-25 1977-04-27 Yamatake Honeywell Co Ltd Relative humidity meter
JPS5376877A (en) * 1976-12-18 1978-07-07 Matsushita Electric Ind Co Ltd Case earth type temperature sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329243A (en) * 1986-07-22 1988-02-06 Nok Corp Thin film temperature sensing element
CN102774806A (en) * 2012-06-25 2012-11-14 中国科学院上海技术物理研究所 Producing method of micro-mesa of Mn-Co-Ni-O line array detector
JP2016145756A (en) * 2015-02-09 2016-08-12 三菱マテリアル株式会社 Temperature sensor

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