JPS53125764A - Silicon wafer laminating plate and its manufacture - Google Patents

Silicon wafer laminating plate and its manufacture

Info

Publication number
JPS53125764A
JPS53125764A JP4073077A JP4073077A JPS53125764A JP S53125764 A JPS53125764 A JP S53125764A JP 4073077 A JP4073077 A JP 4073077A JP 4073077 A JP4073077 A JP 4073077A JP S53125764 A JPS53125764 A JP S53125764A
Authority
JP
Japan
Prior art keywords
manufacture
silicon wafer
laminating plate
wafer laminating
brazing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4073077A
Other languages
Japanese (ja)
Inventor
Sadao Okano
Takuzo Ogawa
Tetsuo Kosugi
Masahiro Okamura
Komei Yatsuno
Yutaka Misawa
Yasuhiro Mochizuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4073077A priority Critical patent/JPS53125764A/en
Publication of JPS53125764A publication Critical patent/JPS53125764A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To manufacture a laminating plate constituent having heat proof construction sufficiently withstanding a high temperature processing, by brazing Si inter-substrates with a brazing material consisting of Ge or GeSi alloy.
COPYRIGHT: (C)1978,JPO&Japio
JP4073077A 1977-04-09 1977-04-09 Silicon wafer laminating plate and its manufacture Pending JPS53125764A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4073077A JPS53125764A (en) 1977-04-09 1977-04-09 Silicon wafer laminating plate and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4073077A JPS53125764A (en) 1977-04-09 1977-04-09 Silicon wafer laminating plate and its manufacture

Publications (1)

Publication Number Publication Date
JPS53125764A true JPS53125764A (en) 1978-11-02

Family

ID=12588733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4073077A Pending JPS53125764A (en) 1977-04-09 1977-04-09 Silicon wafer laminating plate and its manufacture

Country Status (1)

Country Link
JP (1) JPS53125764A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59198714A (en) * 1983-04-26 1984-11-10 Fujitsu Ltd Manufacture of semiconductor element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59198714A (en) * 1983-04-26 1984-11-10 Fujitsu Ltd Manufacture of semiconductor element

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