JPS53125764A - Silicon wafer laminating plate and its manufacture - Google Patents
Silicon wafer laminating plate and its manufactureInfo
- Publication number
- JPS53125764A JPS53125764A JP4073077A JP4073077A JPS53125764A JP S53125764 A JPS53125764 A JP S53125764A JP 4073077 A JP4073077 A JP 4073077A JP 4073077 A JP4073077 A JP 4073077A JP S53125764 A JPS53125764 A JP S53125764A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- silicon wafer
- laminating plate
- wafer laminating
- brazing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Thyristors (AREA)
Abstract
PURPOSE: To manufacture a laminating plate constituent having heat proof construction sufficiently withstanding a high temperature processing, by brazing Si inter-substrates with a brazing material consisting of Ge or GeSi alloy.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4073077A JPS53125764A (en) | 1977-04-09 | 1977-04-09 | Silicon wafer laminating plate and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4073077A JPS53125764A (en) | 1977-04-09 | 1977-04-09 | Silicon wafer laminating plate and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53125764A true JPS53125764A (en) | 1978-11-02 |
Family
ID=12588733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4073077A Pending JPS53125764A (en) | 1977-04-09 | 1977-04-09 | Silicon wafer laminating plate and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53125764A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59198714A (en) * | 1983-04-26 | 1984-11-10 | Fujitsu Ltd | Manufacture of semiconductor element |
-
1977
- 1977-04-09 JP JP4073077A patent/JPS53125764A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59198714A (en) * | 1983-04-26 | 1984-11-10 | Fujitsu Ltd | Manufacture of semiconductor element |
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