JPS53114671A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS53114671A
JPS53114671A JP2860077A JP2860077A JPS53114671A JP S53114671 A JPS53114671 A JP S53114671A JP 2860077 A JP2860077 A JP 2860077A JP 2860077 A JP2860077 A JP 2860077A JP S53114671 A JPS53114671 A JP S53114671A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
metallic
hydrosilicon
attaching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2860077A
Other languages
Japanese (ja)
Inventor
Kenji Shibata
Toru Mochizuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2860077A priority Critical patent/JPS53114671A/en
Publication of JPS53114671A publication Critical patent/JPS53114671A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To change a part of the metal into metallic silicide, by attaching the metallic film of high melting point on the insulating film and by placing it under the atmosphere where thermal cracking reaction of hydrosilicon is taken place.
COPYRIGHT: (C)1978,JPO&Japio
JP2860077A 1977-03-17 1977-03-17 Manufacture for semiconductor device Pending JPS53114671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2860077A JPS53114671A (en) 1977-03-17 1977-03-17 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2860077A JPS53114671A (en) 1977-03-17 1977-03-17 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS53114671A true JPS53114671A (en) 1978-10-06

Family

ID=12253070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2860077A Pending JPS53114671A (en) 1977-03-17 1977-03-17 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53114671A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694671A (en) * 1979-12-27 1981-07-31 Fujitsu Ltd Manufacture of mis field-effect semiconductor device
JPS6362356A (en) * 1986-09-03 1988-03-18 Mitsubishi Electric Corp Semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694671A (en) * 1979-12-27 1981-07-31 Fujitsu Ltd Manufacture of mis field-effect semiconductor device
JPH0214791B2 (en) * 1979-12-27 1990-04-10 Fujitsu Ltd
JPS6362356A (en) * 1986-09-03 1988-03-18 Mitsubishi Electric Corp Semiconductor device

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