JPS53114671A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS53114671A JPS53114671A JP2860077A JP2860077A JPS53114671A JP S53114671 A JPS53114671 A JP S53114671A JP 2860077 A JP2860077 A JP 2860077A JP 2860077 A JP2860077 A JP 2860077A JP S53114671 A JPS53114671 A JP S53114671A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- metallic
- hydrosilicon
- attaching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To change a part of the metal into metallic silicide, by attaching the metallic film of high melting point on the insulating film and by placing it under the atmosphere where thermal cracking reaction of hydrosilicon is taken place.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2860077A JPS53114671A (en) | 1977-03-17 | 1977-03-17 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2860077A JPS53114671A (en) | 1977-03-17 | 1977-03-17 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53114671A true JPS53114671A (en) | 1978-10-06 |
Family
ID=12253070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2860077A Pending JPS53114671A (en) | 1977-03-17 | 1977-03-17 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53114671A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5694671A (en) * | 1979-12-27 | 1981-07-31 | Fujitsu Ltd | Manufacture of mis field-effect semiconductor device |
JPS6362356A (en) * | 1986-09-03 | 1988-03-18 | Mitsubishi Electric Corp | Semiconductor device |
-
1977
- 1977-03-17 JP JP2860077A patent/JPS53114671A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5694671A (en) * | 1979-12-27 | 1981-07-31 | Fujitsu Ltd | Manufacture of mis field-effect semiconductor device |
JPH0214791B2 (en) * | 1979-12-27 | 1990-04-10 | Fujitsu Ltd | |
JPS6362356A (en) * | 1986-09-03 | 1988-03-18 | Mitsubishi Electric Corp | Semiconductor device |
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