JPS53110459A - Electrode forming method for iii-v group compounds semiconductor - Google Patents
Electrode forming method for iii-v group compounds semiconductorInfo
- Publication number
- JPS53110459A JPS53110459A JP2489677A JP2489677A JPS53110459A JP S53110459 A JPS53110459 A JP S53110459A JP 2489677 A JP2489677 A JP 2489677A JP 2489677 A JP2489677 A JP 2489677A JP S53110459 A JPS53110459 A JP S53110459A
- Authority
- JP
- Japan
- Prior art keywords
- iii
- forming method
- electrode forming
- group compounds
- compounds semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE: To make the life of W boat longer and to perform suitable Au-Si vaporization, by superimposing the gold thin plate and Si thin plate on the metallic plate of high melting point such as W and by heating the metallic plate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2489677A JPS53110459A (en) | 1977-03-09 | 1977-03-09 | Electrode forming method for iii-v group compounds semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2489677A JPS53110459A (en) | 1977-03-09 | 1977-03-09 | Electrode forming method for iii-v group compounds semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53110459A true JPS53110459A (en) | 1978-09-27 |
JPS5758774B2 JPS5758774B2 (en) | 1982-12-11 |
Family
ID=12150938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2489677A Granted JPS53110459A (en) | 1977-03-09 | 1977-03-09 | Electrode forming method for iii-v group compounds semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53110459A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6372521B1 (en) * | 1998-01-21 | 2002-04-16 | Globitech Incorporated | Post epitaxial thermal oxidation |
-
1977
- 1977-03-09 JP JP2489677A patent/JPS53110459A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6372521B1 (en) * | 1998-01-21 | 2002-04-16 | Globitech Incorporated | Post epitaxial thermal oxidation |
Also Published As
Publication number | Publication date |
---|---|
JPS5758774B2 (en) | 1982-12-11 |
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