JPS5758774B2 - - Google Patents

Info

Publication number
JPS5758774B2
JPS5758774B2 JP2489677A JP2489677A JPS5758774B2 JP S5758774 B2 JPS5758774 B2 JP S5758774B2 JP 2489677 A JP2489677 A JP 2489677A JP 2489677 A JP2489677 A JP 2489677A JP S5758774 B2 JPS5758774 B2 JP S5758774B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2489677A
Other languages
Japanese (ja)
Other versions
JPS53110459A (en
Inventor
Noburo Yasuda
Choji Ogawa
Masayuki Asaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP2489677A priority Critical patent/JPS53110459A/en
Publication of JPS53110459A publication Critical patent/JPS53110459A/en
Publication of JPS5758774B2 publication Critical patent/JPS5758774B2/ja
Granted legal-status Critical Current

Links

JP2489677A 1977-03-09 1977-03-09 Electrode forming method for iii-v group compounds semiconductor Granted JPS53110459A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2489677A JPS53110459A (en) 1977-03-09 1977-03-09 Electrode forming method for iii-v group compounds semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2489677A JPS53110459A (en) 1977-03-09 1977-03-09 Electrode forming method for iii-v group compounds semiconductor

Publications (2)

Publication Number Publication Date
JPS53110459A JPS53110459A (en) 1978-09-27
JPS5758774B2 true JPS5758774B2 (en) 1982-12-11

Family

ID=12150938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2489677A Granted JPS53110459A (en) 1977-03-09 1977-03-09 Electrode forming method for iii-v group compounds semiconductor

Country Status (1)

Country Link
JP (1) JPS53110459A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6372521B1 (en) * 1998-01-21 2002-04-16 Globitech Incorporated Post epitaxial thermal oxidation

Also Published As

Publication number Publication date
JPS53110459A (en) 1978-09-27

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