JPS6486551A - Semiconductor storage device - Google Patents
Semiconductor storage deviceInfo
- Publication number
- JPS6486551A JPS6486551A JP63128410A JP12841088A JPS6486551A JP S6486551 A JPS6486551 A JP S6486551A JP 63128410 A JP63128410 A JP 63128410A JP 12841088 A JP12841088 A JP 12841088A JP S6486551 A JPS6486551 A JP S6486551A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- aluminum
- film
- type
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Memories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63128410A JPS6486551A (en) | 1988-05-27 | 1988-05-27 | Semiconductor storage device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63128410A JPS6486551A (en) | 1988-05-27 | 1988-05-27 | Semiconductor storage device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6486551A true JPS6486551A (en) | 1989-03-31 |
Family
ID=14984085
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63128410A Pending JPS6486551A (en) | 1988-05-27 | 1988-05-27 | Semiconductor storage device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6486551A (ja) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5015550A (ja) * | 1973-06-08 | 1975-02-19 | ||
JPS5380985A (en) * | 1976-12-25 | 1978-07-17 | Toshiba Corp | Semiconductor device |
JPS5413283A (en) * | 1977-06-30 | 1979-01-31 | Ibm | Method of forming metal silicide layer on substrate |
JPS5488783A (en) * | 1977-12-26 | 1979-07-14 | Cho Lsi Gijutsu Kenkyu Kumiai | Semiconductor |
JPS54116184A (en) * | 1978-03-01 | 1979-09-10 | Mitsubishi Electric Corp | Manufacture for semiconductor device |
JPS5534492A (en) * | 1978-09-02 | 1980-03-11 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor integrated circuit device having mis field effect type transistor and its manufacture |
JPS5583251A (en) * | 1978-12-20 | 1980-06-23 | Fujitsu Ltd | Method of fabricating semiconductor device |
JPS5650533A (en) * | 1979-10-01 | 1981-05-07 | Hitachi Ltd | Semiconductor device |
-
1988
- 1988-05-27 JP JP63128410A patent/JPS6486551A/ja active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5015550A (ja) * | 1973-06-08 | 1975-02-19 | ||
JPS5380985A (en) * | 1976-12-25 | 1978-07-17 | Toshiba Corp | Semiconductor device |
JPS5413283A (en) * | 1977-06-30 | 1979-01-31 | Ibm | Method of forming metal silicide layer on substrate |
JPS5488783A (en) * | 1977-12-26 | 1979-07-14 | Cho Lsi Gijutsu Kenkyu Kumiai | Semiconductor |
JPS54116184A (en) * | 1978-03-01 | 1979-09-10 | Mitsubishi Electric Corp | Manufacture for semiconductor device |
JPS5534492A (en) * | 1978-09-02 | 1980-03-11 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor integrated circuit device having mis field effect type transistor and its manufacture |
JPS5583251A (en) * | 1978-12-20 | 1980-06-23 | Fujitsu Ltd | Method of fabricating semiconductor device |
JPS5650533A (en) * | 1979-10-01 | 1981-05-07 | Hitachi Ltd | Semiconductor device |
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