JPS647577A - Mimim type element - Google Patents

Mimim type element

Info

Publication number
JPS647577A
JPS647577A JP62129756A JP12975687A JPS647577A JP S647577 A JPS647577 A JP S647577A JP 62129756 A JP62129756 A JP 62129756A JP 12975687 A JP12975687 A JP 12975687A JP S647577 A JPS647577 A JP S647577A
Authority
JP
Japan
Prior art keywords
amorphous
electrode material
film
insulating layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62129756A
Other languages
Japanese (ja)
Other versions
JP2609523B2 (en
Inventor
Hidekazu Ota
Yuji Kimura
Katsuhiko Tani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP62129756A priority Critical patent/JP2609523B2/en
Publication of JPS647577A publication Critical patent/JPS647577A/en
Application granted granted Critical
Publication of JP2609523B2 publication Critical patent/JP2609523B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To enable the formation of an insulating film uniform and excellent quality and reproducibility by a method wherein at least one of insulating layers is made to contain a specified amorphous rigid carbon material. CONSTITUTION:A first electrode material layer 20 is formed on a substrate 10, and first insulating layer 30 consisting of an amorphous rigid carbon film of diamond-like carbon film is so formed on the electrode material layer 20 as to cover it. A second electrode material layer 40 is formed on the insulating layer 30, a second insulating layer 50 is laid on the electrode material layer 40, and further a third electrode material 60 is deposited on the insulating layer 50. The amorphous rigid carbon film used for the first insulating layer 30 is an amorphous material which consists of primary structure forming elements such as carbon and hydrogen atoms, and amorphous, chemically stable, and high in strength. The amorphous rigid carbon film can be formed into a film at such a comparatively low temperature as an ordinary temperature. By these processes, a film can be obtained which is uniform and excellent in quality and reproducibility.
JP62129756A 1987-03-28 1987-05-28 MIMIM type element Expired - Fee Related JP2609523B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62129756A JP2609523B2 (en) 1987-03-28 1987-05-28 MIMIM type element

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP7301587 1987-03-28
JP62-73015 1987-03-28
JP62129756A JP2609523B2 (en) 1987-03-28 1987-05-28 MIMIM type element

Publications (2)

Publication Number Publication Date
JPS647577A true JPS647577A (en) 1989-01-11
JP2609523B2 JP2609523B2 (en) 1997-05-14

Family

ID=26414149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62129756A Expired - Fee Related JP2609523B2 (en) 1987-03-28 1987-05-28 MIMIM type element

Country Status (1)

Country Link
JP (1) JP2609523B2 (en)

Also Published As

Publication number Publication date
JP2609523B2 (en) 1997-05-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees