JPS647577A - Mimim type element - Google Patents
Mimim type elementInfo
- Publication number
- JPS647577A JPS647577A JP62129756A JP12975687A JPS647577A JP S647577 A JPS647577 A JP S647577A JP 62129756 A JP62129756 A JP 62129756A JP 12975687 A JP12975687 A JP 12975687A JP S647577 A JPS647577 A JP S647577A
- Authority
- JP
- Japan
- Prior art keywords
- amorphous
- electrode material
- film
- insulating layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To enable the formation of an insulating film uniform and excellent quality and reproducibility by a method wherein at least one of insulating layers is made to contain a specified amorphous rigid carbon material. CONSTITUTION:A first electrode material layer 20 is formed on a substrate 10, and first insulating layer 30 consisting of an amorphous rigid carbon film of diamond-like carbon film is so formed on the electrode material layer 20 as to cover it. A second electrode material layer 40 is formed on the insulating layer 30, a second insulating layer 50 is laid on the electrode material layer 40, and further a third electrode material 60 is deposited on the insulating layer 50. The amorphous rigid carbon film used for the first insulating layer 30 is an amorphous material which consists of primary structure forming elements such as carbon and hydrogen atoms, and amorphous, chemically stable, and high in strength. The amorphous rigid carbon film can be formed into a film at such a comparatively low temperature as an ordinary temperature. By these processes, a film can be obtained which is uniform and excellent in quality and reproducibility.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62129756A JP2609523B2 (en) | 1987-03-28 | 1987-05-28 | MIMIM type element |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7301587 | 1987-03-28 | ||
JP62-73015 | 1987-03-28 | ||
JP62129756A JP2609523B2 (en) | 1987-03-28 | 1987-05-28 | MIMIM type element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS647577A true JPS647577A (en) | 1989-01-11 |
JP2609523B2 JP2609523B2 (en) | 1997-05-14 |
Family
ID=26414149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62129756A Expired - Fee Related JP2609523B2 (en) | 1987-03-28 | 1987-05-28 | MIMIM type element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2609523B2 (en) |
-
1987
- 1987-05-28 JP JP62129756A patent/JP2609523B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2609523B2 (en) | 1997-05-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |