JPS56150874A - Method of continuously manufacturing amorphous silicon solar battery - Google Patents

Method of continuously manufacturing amorphous silicon solar battery

Info

Publication number
JPS56150874A
JPS56150874A JP5289380A JP5289380A JPS56150874A JP S56150874 A JPS56150874 A JP S56150874A JP 5289380 A JP5289380 A JP 5289380A JP 5289380 A JP5289380 A JP 5289380A JP S56150874 A JPS56150874 A JP S56150874A
Authority
JP
Japan
Prior art keywords
substrate
amorphous silicon
solar battery
film
silicon solar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5289380A
Other languages
Japanese (ja)
Inventor
Hiroshi Okaniwa
Kenji Nakatani
Mitsuo Asano
Wataru Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP5289380A priority Critical patent/JPS56150874A/en
Publication of JPS56150874A publication Critical patent/JPS56150874A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/206—Particular processes or apparatus for continuous treatment of the devices, e.g. roll-to roll processes, multi-chamber deposition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photovoltaic Devices (AREA)

Abstract

PURPOSE:To eliminate the deterioration of the characteristics of an amorphous silicon solar battery by introducing a flexible conductive substrate into a reaction tank, depositing an amorphous silicon thin film on the substrate, and then continuously winding up it in a rolled shape so that the radius of the curvature becomes larger than a predetermined value. CONSTITUTION:The surface resistance of a substrate is set less than 1,000OMEGA/cm by employing, for example, a metallic film such as a stainless steel film (having a thickness of 10-200mum) or laminating, for example, a metallic layer (having a thickness of 0.01-20mum) on a polyimide film. This substrate is introduced, for example, into a reaction tank by a glow discharge method or the like to cover an amorphous silicon thin film on the substrate, and then continuously wound in a rolled shape. The radius of the curvature of the rolled substrate is larger than 4.0cm. Thus, irreversible characteristic deterioration caused by the winding can be eliminated for a solar battery made of the amorphous silicon coating continuously formed.
JP5289380A 1980-04-23 1980-04-23 Method of continuously manufacturing amorphous silicon solar battery Pending JPS56150874A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5289380A JPS56150874A (en) 1980-04-23 1980-04-23 Method of continuously manufacturing amorphous silicon solar battery

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5289380A JPS56150874A (en) 1980-04-23 1980-04-23 Method of continuously manufacturing amorphous silicon solar battery

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP61121269A Division JPS621281A (en) 1986-05-28 1986-05-28 Manufacture of amorphous silicon thin-film

Publications (1)

Publication Number Publication Date
JPS56150874A true JPS56150874A (en) 1981-11-21

Family

ID=12927536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5289380A Pending JPS56150874A (en) 1980-04-23 1980-04-23 Method of continuously manufacturing amorphous silicon solar battery

Country Status (1)

Country Link
JP (1) JPS56150874A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58115872A (en) * 1981-12-28 1983-07-09 Kanegafuchi Chem Ind Co Ltd Flexible photoelectromotive force generating device
JPS60214572A (en) * 1984-04-11 1985-10-26 Matsushita Electric Ind Co Ltd Thin-film solar cell and manufacture thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51141587A (en) * 1975-05-30 1976-12-06 Sharp Kk Method of producing solar battery
JPS5671930A (en) * 1979-11-19 1981-06-15 Canon Inc Film formation

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51141587A (en) * 1975-05-30 1976-12-06 Sharp Kk Method of producing solar battery
JPS5671930A (en) * 1979-11-19 1981-06-15 Canon Inc Film formation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58115872A (en) * 1981-12-28 1983-07-09 Kanegafuchi Chem Ind Co Ltd Flexible photoelectromotive force generating device
JPS60214572A (en) * 1984-04-11 1985-10-26 Matsushita Electric Ind Co Ltd Thin-film solar cell and manufacture thereof

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